Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8

Rubber seal 5 Port Solenoid Valve Series SYJ5000

8 1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8

3 Port Solenoid Valve Series SYJ300/500/700

Features 1 Series SYJ300/500/700 Manifold Variations A port size With one-touch fitting Valve series A port location P, R ports size M3 M5 1/8 Applicable tubing O.D. 6 4 N3 N7 N9 8 Note 1) M5 x 0.8 SYJ300 Top Note 2) Body ported Base mounted 1/8 SYJ500 Top 1/8 Note 1) 1/8 SYJ700 Top 1/4 Note 1) M5 x 0.8 SYJ300 Side 1/8 Bottom SYJ500 1/8 Side Note 1) 1/8 Bottom SYJ700 1/4 Side 1/4 Note 1)

SMC Electronic Switch Series Variations

Connector style (For vacuum) ISE2 (For positive pressure) For General Pneumatics Can be integrated with ZX or ZR vacuum system. 3.10-1 Compact Pressure Switch ZSE2/ISE2 How to Order Operating pressure range Port thread 01 T1 0 to 0.97MPa 0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.

180° Angular Style Air Gripper Series MHY2/MHW2

MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 4.3 7.4 7.4 17.7 37.2 2.9 5.9 5.9 17.7 37.2 10 12 12 16 20 7 10 10 15 20 Model Applicable bolts Max. tightening torque (Nm) Max. screw-in depth (lmm) MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M5 x 0.8 M6 x 1 M6 x

VZ1000

4 2 3 1 2 4 3 0.6 1.5 1.0 0.9 M5 x 0.8 90 2 position single solenoid VZ1120-M5 3-3-10 4 Port Solenoid Valve Body Ported Series VZ1000 Use as a guide for selection.

SMC Pneumatic Clean Series

to 200 mm/s 0.5 to 200 mm/s 8 M8 x 1.25 14 M14 x 1.5 8 M8 x 1.25 14 M14 x 1.5 10 12 10 12 M10 x 1.25 M10 x 1.25 JIS Class 2 +1.4 0 mm 1/4 1/4 1/8 1/8 Vacuum suction port, Relief port Grease Particle generation grade M5 x 0.8 Fluorine grease Grade 2 Grade 1 2 l/min (ANR) Suction flow rate (Reference values) External dimensions and applicable auto switches are the same as 10-/11-CM2.

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

9@0@1 rtyui!3 weui!0!1!8!9@0 w!0!1 e !4 Order 1 piece finger assembly per one unit.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

AKH/AKB Series

Effective area (mm) Weight g A M5, UNF10-32> H L M Model (Width across flats) AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8

Precision Regulator

(Option) 30 2 ARJ 2.3 48 Pressure gauge (Option) AR425 to 935 Pressure gauge (Option) ARX 5.5 9.5 M5 depth 7 AMR 9 M5 depth 7 2 x Rc 1/8 15.5 IN 119 Pressure gauge port 83 75 Bleed Bleed IN ARM Exhaust IN OUT(2) Bleed Bleed SUP(1) IN G 2 OUT 144 43 G ARP 76 22 2 x Rc 1/8 Pressure gauge port 50 50 (17.7) 2 x Rc 1/4 Port size IR-A EXH(3) OUT 2 OUT(2) SUP(1) 60 Rc 1/2 Exhaust port 66 2 x Rc

AKH/AKB Series Check Valve with One-touch Fitting

Effective area (mm) Weight g A M5, UNF10-32> H L M Model (Width across flats) AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

4 1/8 1/8 1/4 1/4 P, R port 1/8 Port size 1/8 1/8 6 one-touch fitting 1/8 1/8 A port C6 8 one-touch fitting C8 X port Note) M5 x 0.8 M5 x 0.8 M3 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1R2 (PRA) 2R3 (ARR) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv Type SS3YJ7-20 1/8 2.2 2.2 2.1 2.2 2.0 1.6 2.1 0.34 0.39 0.35 0.35

Manifold Specifications

+ COM (For COM specifications, specify them separately.) 1 3 5 6 VZ1120MOZ-M5 Applicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note 1) Value at manifold base mounted, single operating Note 2) Withstand voltage specification of wiring unit part is equivalent to JIS C 0704 class 1.

Precision Regulator Series IR1000/2000/3000

2.3 Bracket (Option) 76 148 Bleed 43 Pressure gauge (Option) EXH(3) OUT(2) SUP(1) 22 15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port Bleed 22 76 144 43 EXH(3) OUT(2) SUP(1) 68 66 Rc 1/2 Exhaust port 66 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port 556 Precision Regulator Series IR1000/2000/3000 Series IR1000 Flow Characteristics

IR1000/2000/3000

Precautions. 60 50 50 Rc 1/8 2-Rc 1/4 Pressure gauge port Port size M6 x P0.5 15.5 82 60 IR3120-0 9 Mounting hole 48 2.3 Bracket (Option) 76 148 Bleed 43 Pressure gauge (Option) EXH(3) OUT(2) SUP(1) 22 15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN Bleed 2-Rc 1/8 Pressure gauge port 2-Rc 1/4 to 1/2 Port size 22 76 144 43 EXH(3) SUP(1) OUT(2) Rc 1/2 Exhaust port 68 66 66 2-Rc 1/4 to 1/

ZQ-OM01301

valve ZQ1-CV 7 V port fitting VVQ1000-50A-C4 (1) Specifications 50A-M5 Without fitting (M5x0.8) 50A-C3 3.2 (Straight) (1) 50A-C4 4 (Straight) Clip (10 pcs. are included in one set) 50A-C6 6 (Straight) A A F1-LC3 3.2(Elbow) ZK1-CP-A F1-LC4 4 (Elbow) 8 Bracket assembly ZQ1-BK1-A 24 - Doc.

IR1000/2000/3000

depth 7 75 83 Approx. 119 18 1 1 SMC IN Bleed Pressure gauge (optional) Exhaust SUP(1) OUT(2) OUT 43 Approx. 60 50 50 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port M6 x P0.5 15.5 9 82 60 IR3120-0 Mounting hole 48 2.3 76 Approx. 148 22 Bracket (optional) Bleed 43 Pressure gauge (optional) EXH(3) OUT SUP(1) OUT(2) Rc(PT) 1/2 Exhaust port 15.5 M5 depth 7 Approx. 68 66 9 66 22 76 Approx

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Digital Pressure Switch Series ZSE10(F)/ISE10 How to Order Rated pressure range ISE10 0.100 to 1.000 MPa ISE10 For positive pressure M5 A M For vacuum/ compound pressure ZSE10 M5 B M Option 3 Rated pressure range Symbol Calibration certificate Nil K p ZSE10 ZSE10F 0.0 to 101.0 kPa 100.0 to 100 kPa Piping specifications Option 2 M5 female thread/Side ported Piping port None Nil M5 Panel mount

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13