1

M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A RB1007 M5 x 0.8

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

42

1/2" 1(P), 4 (A), 2 (B) port VQ 4/5 VQ 4/5 M5 x 0.8 ground screw 4(A), 2(B) port SMC VQC 1/2 VQC 4/5 37 41 50 98 PE X 18 31.5 VQZ 26.5 P R1 R2 16 27.5 41 41 27.5 SQ 1/8" External pilot port 1/8" PE. port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port VFS VFR 2-position double: VQ525 0 1-l G H 3-position closed center: VQ535 0 1-l G H 3-position exhaust center: VQ545 0 1-l G H 3-position pressure

Proposals for Energy Saving

8, M5 x 0.8, NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Port size R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Enclosure IP40 Note 1) For vacuum operation, a momentary pressure of 0.5MPa will not be a problem.

smcmaintenancepartslist

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

•

1 :M6x 1 Y Rat type Flat with rib Deaptype Bellows type ,~ G H G H Rat Ratwith rib M5 M6 MB M5 M6 M8 M5 M6 M8 M4 Ms M6 ~.

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

Battery-less

How to Order LEFS 25 H R B E 200 C N K R1 CD17T q w e r t u y i o !0 !1 !

SQ1000/2000

2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(R2) u u 3 position: SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 SQ2330 SQ2331 (A)(B) (A)(B) 4 2 4 2 y e e q w y e e q w 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ2430 SQ2431 (A)(B) (A)(B) 4 2 4 2

Series VQ Base Mounted Metal Seal/Rubber Seal

G H J1 J2 K Q R1 R2 V Note 1) Refer to p.1.10160 for details.

One-touch Fittings

[mm] 1 D Weight [g] Nylon Urethane X 4 M5 x 0.8 KQ2U04-M5G 10 8.2 7.7 33.9 30.9 13.3 8.2 5.7 6 3.2 2.2 2.2 1.8 6.7 6 M5 x 0.8 KQ2U06-M5G 12 10.4 9.7 35 32 13.3 10.4 6.8 6 3.2 2.2 2.2 1.8 10 D Round type 4, 6 M 1: D is maximum diameter. 2 x N Release button dimensions A L 2 x O X D H Connection thread Q Q Branch Y: KQ2U-G (Sealant) Connection thread R Model H (Width across flats) 2 x Applicable

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

C85

1 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 q o !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 M14 x 1 6.2 Width across flats 19 M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5