Fieldbus System

E 16 outputs D-sub connector (25 pins) Note1) 2) F 16 outputs Spring type terminal block (32 pins) Note1) 2) DM EX600 P F Digital Input/Output Unit Input/Output type Number of Inputs/Outputs and Connector Symbol Number of inputs Number of outputs Connector Symbol Description P PNP N NPN E 8 inputs 8 outputs D-sub connector (25 pins) Note1) 2) F 8 inputs 8 outputs Spring type terminal block

Valve Single Unit

How to Order Port Block Assembly Only replacement of the fittings assembly is possible. 000 6A SY Metric size One-touch fitting for 6 One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-50A-C6 SX3000 VVQ1000-50A-C4 Series Thread type One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 Symbol Series Nil Rc 3 SX3000 SX5000 VVQ1000-51A-C6 VVQ1000-51A-C8 G F 5 SX5000 N NPT 7 SX7000

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VQ 20 stations 20 R port A port M5 X 0.8, C4 P port Rc(PT)1/8 Rc(PT)1/8 A port side P port VQZ Rc(PT)1/8 M5 X 0.8 M5 R port 4 One-touch fitting C4 VZ A port M5 X 0.8, C4 Rc(PT)1/8 Note) If more than 8 stations, supply air to both sides of "P" Port and exhaust air from both sides of "R" port.

PFxx-OMJ0005CN

Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

Fieldbus System

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tube O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.

3 Port Solenoid Valve Series SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 one-touch fitting F G R port N3 5/32" one-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

2-Color Display High Precision

--F ZSE40A(F)/ISE40A-WF1--F Panel mounting + Front protective cover 44.7 29.2 7.5 40 51.2 Panel thickness 1 to 5 38.6 11 Series ZSE40A(F)/ISE40A Dimensions ZSE40A(F)/ISE40A-C4-E ZSE40A(F)/ISE40A-C6-E Panel mounting 41.2 40 29.2 4 43.6 40 Panel thickness 1 to 5 38.6 ZSE40A(F)/ISE40A-C4-F ZSE40A(F)/ISE40A-C6-F Panel mounting + Front protective cover 44.7 40 7.5 29.2 51.2 Panel thickness 1 to

Manifold Specifications

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

C4/C6 One-touch fitting C4/C6 One-touch fitting (elbow type) Outstanding seal performance The new rubber seals offer improved durability and performance. Valve failures due to line contaminants have been greatly reduced. (Ozone resistant seals available by special order.)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(PF2A7 0) 2% F .S. (PF2A7 1) 2% F.S. Monitor unit 1% F.S. 1 digit (Fluid: Dry air) 1% F .S. 1% F .S. (Fluid: Dry air) 1% F.S. Monitor unit 0.1% F.S. Monitor unit Monitor unit 0.1% F.S. 0.1% F.S. 0.1% F.S. (Fluid: Dry air) (Fluid: Dry air) Analog output: 5% F.S. Analog output: 0.3% F.S.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Directional Control Valves Air Grippers Modular F. R.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Digital Flow Switch (Integrated display type)

[F 3] Digital filter setting completed -44No.PF-OMW0007-E [F 4] Auto-preset function setting This function will automatically calculate and set the optimum pressure based on the actual operating condition, when hysteresis mode has been selected. Press the UP or DOWN button in function selection mode to display [F 4]. Press the SET button.

smcmaintenancepartslist

AMF150C AMF-EL150 AMF-EL150-F AMF250C AMF-EL250 AMF-EL250-F AMF350C AMF-EL350 AMF-EL350-F AMF550C AMF-EL550 AMF-EL550-F AMF650 AMF-EL650 AMF850 AMF-EL850 Except option F For option F Element assembly Glass fiber, others AMF-EL450 AMF-EL450-F 4 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Compact Vacuum Unit

ZB0020-K1L(O)-P Vacuum pump system Exhaust port 2 Port open to atmosphere 1 3 Port open to atmosphere Release pressure SUP (PD) port 1 Supply valve M5 thread depth 0.158 Air pressure SUP Vacuum pressure SUP (PV) port PV Silencer cover (Detachable) Release valve M5 thread depth 0.158 PD 0.894 0.394 V Pressure sensor L(O)10 11 20 21 (inch) K1 Q1 E F ZB Manual override Port type A B C2 C4 N1

VZ100/300/500

Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.