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discharge oil mist concentration is 30 mg/m3 (ANR).

MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX A shock absorber can be installed (option). D-X Can be mounted on two sides. 20Mounting from the bottom side Mounting from the upper side Data Guide of high rigidity Adjusting bolt with bumper is standard.

MTS MY Two types of guide rod bearing for different applications CY Pusher MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Slide bearing Slide bearing Strength against side load is more than 2 times as compared conventional stopper cylinder.

1 Rodless Cylinder for Vacuum Series CYV 15, 32 MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data Simplifies and reduces the size of equipment Air cylinder for transfer in vacuum environments (1.3 x 10-4 Pa) Since the cylinder can be installed

MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Miniature linear guide D-X 20Data Traveling parallelism (No load) 0.05 mm or less Displacement accuracy against moments Table edge displacement Table turning angle M1 (Pitch moment) : 0.02 mm or less

MTS MY CY MG CX Miniature linear guide D-X 20Data Traveling parallelism (No load) 0.05 mm or less Displacement accuracy against moments Table edge displacement Table turning angle M1 (Pitch moment) : 0.02 mm or less M2 (Yaw moment): 0.01 mm or less M3 (Roll moment): 0.25 or less Auto switch can be mounted. Piping is possible from 3 directions.

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (d= outside dia. of screw) CX D2d or more -X 20Data 3. If the cylinder is to be bottom mounted, bypass ports should be provided for the guide rods.

CL MLGC CNA CB CV/MVG CXW CXS CXT MX MXU MXS MXQ MXF High level of stopping accuracy Three-styles of locking mechanism MXW MXP MG Spring lock Pneumatic Spring/Pneumatic lock Lock style MGP Lockable in both directions Stop precision 1.0mm 0.5mm MGQ PWorks on the safety side. (Exhaust lock) PHigh precision PHolding power can be adjusted freely.

At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)

MXW MXP Grommet, L/M plug connector With light (lZ) MG MGP MGQ MGG MGC MGF CY1 MY1 3.5-5

Note 2) At oil mist density of 30 mg/m 3 ANR is blown out by compressor. Refer to Made to Order Specifications on page 14-20-55.

/m3 (ANR) (2) (At saturation of element oil, less than 0.01 mg/m 3 (ANR) 0.008 ppm) 2 years or when pressure drop reaches 0.1 MPa Element life Note 2) At oil mist density of 30 mg/m 3 ANR is blown out by compressor.

Specifications 0.01 m (95% filtered particle diameter) Filtration of outlet air Max. 0.1 mg/m3 (ANR) (0.08 ppm) Note) Outlet air oil mist concentration (Prior to oil saturated 0.01 mg/m3 (ANR) or less, (0.008 ppm or less)) Note) With inlet air oil mist concentration of 30 mg/m3 (ANR) (24 ppm) Applicable Model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Load inertial energy E1 at the cushion seal contact point E1 = MV/2 = 50 x 0.3/2 = 2.25J Mg sin E = 3.7J 2. External force F applied in axial direction of the cylinder at the cushion seal contact point F = Mg sin = 50 x 9.8 x sin 30 = 245N 30 Mg 5.

Max. 1.0 mg/m3 Downstream oil mist concentration (ANR)( 0.8 ppm) (2) Note 1) With auto-drain is 0.15 MPa Note 2) When compressor discharge oil mist concentration is 30 mg/m3 (ANR) 2 years, or when pressure drop reaches 0.1 MPa Element life Specifications Filter regulator + Mist seperator Air combination Series AC2040/3040 Model Model AC2040 AC3040 AC4040

Center of rotation and center of gravity of the load are concentric. mg F L L mg Friction force is applied. Rotation shaft is vertical (up and down). 2 Ta = = t2 Ts = F L Gravity is applied in rotating direction.

Pressure dew point: 3C Oil concentration: 0.1 mg/m3 With the above conditions, notation of the quality class is 1, 4, 2. 344 LLB Series Clean Air Module / Precautions 2 Be sure to read this before handling the products.

(When greasy fumes are 1,000 mg/m3 at the IN side, it will be 5 mg/m3 or less at the OUT side.) Exhaust ducts from a vacuum pump is not necessary.

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard250.22