Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

5-Port Solenoid Valve

base*1 WF PROFINET compatible wireless base*1 WS Wireless remote*1 Nil None 1 1 station 9 9 stations * When not selecting an SI unit, the symbol will be nil. * SI unit is not included in I/O unit stations. * When I/O unit is selected, it is shipped separately, and assembled by users.

JA/JAH/JB/JS

41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000

JA/JAH/JB/JS

40 52 45 55 65 82 100 1100 2500 4400 11000 18000 28000 36000 55000 21 24 31 41 50 59.5 79 96 0.08 0.12 0.28 0.63 1.15 2.07 5.2 9 6 6 9 12 16 19 24 29 6.6 6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40

0.55

Built-in strainer 7 Pilot valve assembly HNBR DXT031-30-11 DXT156-9-8 8 Gasket 1/4: VF5000-71-1; 3/8: VF5000-71-2; 1/2: VF5000-71-3; 9 1/4: VF3000-71-1; 3/8: VF3000-71-2; Aluminum die-casted Sub-plate Caution Round head combination screw (1 pc.) DXT031-44-1 Tightening Torque for Mounting Valve For mounting valve (M4 x 39.5, With spring washer) Hexagon socket head cap screw (1 pc.)

MXS

9 !7 !8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9 10 19 500 300 300 30 134 3.2 171 500 300 52 45 143

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

10 19 40 4 40 55 20 8 21 7 4 60 75 6.8 25 102 3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 500

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Table of Contents

1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 8 M 27 Bottom view of MXQ12-40 13225 8.5 18.5 KA NA x M4 x 0.7 thread depth 4 9 39 29 5 8.5 18.5 K 4.8 19 0.3 29.2 30 Z ZZ G (NN 1) x H H 16 8 16 8 A B 4.2 4.2 9 8.5 9 1 A B NN x M5 x 0.8 thread depth 10 5 HA GA 4H9 ( ) depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18

Cylinder with Lock Series CLS

Unlocked condition (when air is supplied.) 788 Double Acting, Single Rod Series CLS Cylinder with Lock Construction @7 @4 @8 @6 %8 @2 %9 @7 !0 i o @1 @0 @3 q w !9 %7 $1 $2 $3 $6 %2 %3 %4 %6 $8 $9 ^6 $0 #3 y u !1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !

LEC-OM02704CN

1 9 9 8 () `9.1 PB2 3 PB01 PB16 0 0 0 1 1 2 1 2 9.2 (1) II() () 1002.25kHz 9 2 9 (2) (PB01) PB01 PB01 0 0 0 0 OFF () 1 PB13 PB14 2 .

21

A1 E1 L L1 MM ND NX NZ R1 U1 A Part no. size Applicable bore size Type C9 for axis Y-020B Y-032B Y-040B 20 25, 32 40 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 46 16 20 25 36 M8 x 1.25 9 9 18 5 14 CDP-1 48 18 20 25 38 M10 x 1.25 9 9 18 5 14 CDP-1 Type C9 for axis 68 22 24 49.7 55 M14 x 1.5 12 16 38 13 25 CDP-3 3 x 18 l A knuckle pin and retaining rings (split pins for 40) are included.

2–4

Bore size (mm) KB L M N OB Q RA RB T V W KA 12 16 20 25 10 7.1 3.5 15.5 3.5 6.5 7.5 7 4 0.5 14.9 6 14 9.9 3.5 20 3.5 6.5 7.5 7 4 0.5 20 6 17 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

CM2

A E1 L R1 NZ NX MM +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 36 Y-020B Y-032B Y-040B 9 46 16 20 25 5 14 18 M8 X 1.25 CDP-1 20 9 C9 type for pivot 38 9 48 18 20 25 5 14 18 M10 X 1.25 CDP-1 25,32 9 C9 type for pivot 55 12 68 22 24 49.7 13 25 38 M14 X 1.5 3 X 18l CDP-3 40 16 Clevis pins and snap rings (cotter pins for bore size 40) are attached.

Air Slide Table Series MXS

9 !5 !7 q !1 !0 !6 !2 !3 !

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16

ISO Cylinder

: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke [mm] (40)1 0.7 34 30 23 50 63 1 The data in ( ) are limited by max. stroke length