2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

Proposals for Energy Saving

1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Fluoropolymer Piping Equipment

3/8" 3/4" 1/2" 20 29 24 17 26 21 44 54 49 23 39 28 5.8 LQ1T5A-R32 1/4" 3/4" 1/4" 39.5 20 36 17 46.5 55 46.5 49 23 3.6 LQ1T6A-R2 1" 1/2" 1" 8 39.5 24 20 20 29 14 28 TD TID 7 TH TIH 9 LQ1T6A-R3 1" 3/8" 1" 5.8 LQ1T6A-R4 1" 1/4" 1" 20 17 55 47.5 55 23 3.6 LQ1T6A-R5 3/4" 1" 1" 8 39.5 18 36 36 69.5 69.5 69.5 49 15 LQ1T6A-R6 1/2" 1" 1" 24 21 54.5 28 9 LQ1T6A-R7 3/4" 3/4" 1" 39.5 36 69.5

Air Cylinder

) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces 20 90 100 110 120 and same surface) 1 20 + 55 (n 2) (n 4) 100 + 55 (n 4) 110 + 55 (n 4) 120 + 55 (n 4) D-A59W 90 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 15 90 100 110 120 1 2 (Different surfaces and same surface) 1 25 110 120 130 140 D-F5NT

Air Cylinder

40 55 M8 x 1.25 24 1/8 62 20 8 21 131 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4 6.8 28 102 3.2 40 55 M10 x 1.25 30 1/8 62 20 8 25 135 32 22 19.5 47 17 32 12 13 8 45 6 8 37.5 5.5 10 4 6.8 28 104 3.2 40 55 M10 x 1.25 34.5 1/8 64 20 8 25 137 40 24 21 54 22 41 14 16 11 50 8 10 46.5 7 12 4 7 30 134 3.2 55 75 M14 x 1.5 42.5 1/4 88 23 10 27 171 With Rod Boot (mm) B3 e h l Z Symbol Stroke

Table of Contents

ZM-E15CN . 1 pc. ZS-20-5A-50 . 1 pc.

Electric Actuator/Slider Type

Do not use any cable other than this cable. 2500 10 to 20 (33) 3000 (20) 4.0 6 (55) (100) 111 Series LECYM/LECYU AC Servo Motor Driver/ Specic Product Precautions 1 LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection Be sure to read this before handling.

MXQ

thread depth 16 7 B A 35 12 12 6H9 depth 6 +0.030 0 6.6 6.6 11 11 B H A 32 11.5 32 11.5 Section AA Section BB (NN 1) x H G (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45

Air Slide Table Series MXS

MXY With end lock (20) MXS20-R With buffer (20) MXS20-F MTS Operating port 2 x Rc 1/8 (NPT 1/8, G 1/8) 2 x M6 x 1 thread depth 13 15.5 J 15 20 58 25 44.5 30.5 45.5 0.5 Other dimensions are the same as the basic style.

LJ1H

20 20 20 20 20 LJ1S10 LJ1S20 LJ1S30 LJ1S10 LJ1S20 LJ1S30 88 Standard motor 90 92 Slider guide LJ1S Horizontal 94 Standard motor 96 98 Option specifications Page 100 Made to Order 101 Dust seal specification 116 TSUBAKI CABLEVEYOR specification 128 Construction 137 Mounting 140 Non-standard Motor Mounting 143 Deflection Data 145 Part Number Designations 100 F S 1 1 C G LJ1

CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, 20+55 n=2, 4, 6, 8, 90+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 D-A59W n (Same side) 1.16 (1.21) 1.79 (1.84) 2.79 (2.83) 4.88 (5.03) 7.17 (7.38) Double clevis 90 100 110 120 15 1 2 (Dif. / same side(s)), 1 D-F5W, J59W D-F5BAL

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 125 25 135 150 25 + 55 (n2) 2 125 + 55 (n4) 2 135 + 55 (n4) 2 150 + 55 (n4) 2 n pcs. (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 145 35 155 170 D-F5NTL 35 + 55 (n2) 2 (n = 4, 8, 12, 16) 145 + 55 (n4) 2 155 + 55 (n4) 2 170 + 55 (n4) 2 n pcs.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

40 37 11 17 23 37 21 0 40 22 up to 750 92 30 52 14 21 21 72 116 16 20 41 72.8 87.5 M12 X 1.75 M26 X 1.5 126 215 40 37 17 40 21 40 11 23 0 26 With rod boot Bore (mm) e Stroke range (mm) f h ZZ l 40 50 63 80 100 1/4 stroke 20 to 500 43 11.2 59 154 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 20 to 600 52 11.2 66 178 1/4 stroke 20 to 750 65 12.5 80 213 1/4 stroke 20 to 750 65 14 81 224 3.8

MXS Series Air Slide Table

With end lock (20) MXS20R With buffer (20) MXS20F 2-M6 X 1 thread 13 deep Operating port 2-Rc(PT)1/8 J 15.5 15 20 58 25 44.5 30.5 0.5 45.5 Dimensions not indicated are the same as basic type.

CNA

8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 x 1.25 6 14 Up to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 2035 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20

CNA

8 1/8 44 10 16 32 10 85 15 52 16 12 12 10 8 Up to 500 0.1 0.3 18 35 32 70 27 108 1/4 1/8 52 12 20 40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20

MY1

0 @1 -X #4 #1 20@7 #2 Data @3 #3 #7 #6 @6 !

Air Slide Table Series MXQ

With end lock (20): MXQ20-R Operating port 2 x Rc 1/8 (NPT 1/8, G 1/8) 8 34 33 65 11.5 78.5 Other dimensions are the same as basic style. 20 Axial piping type (20): MXQ20-P 26 Operating port 2 x Rc 1/8 (NPT 1/8, G 1/8) D-X 32 Individual -X Other dimensions are the same as basic style. 14 115 Series MXQ Dimensions: MXQ20L/Symmetric Type For detailed dimensions about the stroke adjuster,