Type: Module, Type: Relay Output Module (SV4000), Number of Inputs/Outputs: 2 points (output), Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: 24 DC, Specification: -, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Table of Contents

ZS-20-5A-50 . 1 pc.

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

XL-OMY0002

9-1A XLD100-2-9-1A XLD160-2-9-1A XLD63-2-9-1A ** XLD80-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** AS568-020V AS568-020 ** 1) FKM:No.1349-80** AS568-030-XN1 2) 5 P11 3) 7 XL-OMY0002 Barrel ULTIC ARMOR Perfluoro Kalrez Chemraz VMQ FKM for R R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro

High Vacuum L Type Valve

-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** Assy (4) Initial pumping Standard AS568-020V valve seal (5).

3 Port Solenoid Valve

V100-31-1A Part No. V100-77-1A Round head combination screw Place the notch mark on a blank plate to the port 2 side when assembling.

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NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

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5 Port Solenoid Valve

Bore size CJ2 series Pressure 0.5 MPa Load ratio 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load ratio 50% Stroke 300 mm CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] 6 10 16 125 140 160 180 200 250 20 25 32 40 40 50 63 80 100 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward

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Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16

Manifold Specifications

Internal wiring 1 3 5 6 M5 C4 C6 VZ323MOZApplicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note ) Withstand voltage specifications of wiring unit part is equivalent to JIS C 0704 class 1.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

silencer SJ3000-50-6AS-ll SJ3000-53-1A SJ3000-53-2A VZ1000-11-1-l For U side End block assembly 2 For D side End block assembly 3 Refer to page 61.

3 Port Air Operated Valve Series SYJA300 1

Free 300/50 VPA342: VP300-27-1A VPA542: VP500-27-1A VPA742: VP700-27-1A Bracket (With screw) Option N.C. N.O. Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

0.55

Body Ported 0.5 MPa = 73 psi Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed Series (mm/s) 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 1000 Perpendicular, upward actuation Horizontal

Table of Contents

65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

AC AC Note) SYJ300 LPush-locking slotted style LWith indicator light and surge voltage suppressor 50 60 50 L100V AC / Hz 110V AC / Hz 200V AC / Hz 220V AC / Hz 1.8 (0.1) 60 50 M5 X 0.8 60 50 60 SYJ500 4.5 (0.25) Rc(PT)1/8 SYJ700 9.0 (0.5) Rc(PT) 1 8 / 1 4 Note) All AC voltage models have built-in surge voltage suppressor. 2.2-2 Series SYJ300/500/700 Manifold Variations A port size With built-in

XM, XY

9-1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

VQ4000

Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 For type W, only DC voltage is available.