Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(same side) 100 + 55 100 + 55 110 + 55 120 + 55 20 + 55 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 15 100 110 120 1 pc. 100 1 or 2 pcs. (different sides/same side) 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 130 + 55 "n" pcs.

LX

to cross section C-C. 27.5 T-slo B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Air cylinder

(Same side) 90+55(n4)/2 n=4, 8, 12, 16 100+55(n4)/2 n=4, 8, 12, 16 110+55(n4)/2 n=4, 8, 12, 16 115+55(n4)/2 n=4, 8, 12, 16 95 1 switch 90 100 110 115 105 2 switches (Different side, Same side) 100 110 120 125 105+55(n4)/2 n=4, 8, 12, 16 125+55(n4)/2 n=4, 8, 12, 16 Other qty.

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Mechanically Jointed Rodless Cylinder Series MY1

38.5 46 220 Rc 1/16 Rc 1/8 80 35 264 17 51 16 23 4 16 16 16 MY1B32 8 70 10 10 19 32 48 55 280 Rc 1/16 59 24 27 10.5 20 22 19.5 MY1B40 23 36 340 60.5 85 12 9 Rc 1/4 100 40 322 18.5 14 67 Rc 1/8 P indicates cylinder supply ports. 2 x d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized Piping on the Bottom WX Y S d D R Applicable O-ring Model 28 9 7 6 11.4 1.1 MY1B25

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1) 20 + 55 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 90 + 55 (n 4) 2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) D-A59W 1 15 90 100 110 120 2 (Different surfaces, same surface), 1 25 110 120 130 140 D-F5NT n (Same surface) (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n

Battery-less

9 o @1 @2 !1 !9 @0 !8 @0 !0 !8 !4 u u !2 !3 i e !5 r t w q y !6 !

2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

CG1

2 2 2 2 3 3 24 29 35.5 44 55 69 80 100 12 14 18 25 30 32 40 50 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 77 77 79 87 102 102 122 122 15.5 19.5 19.5 27 32 32 37 37 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 18 22 22 30 35 35 40 40 5 5.5 5.5 6 7 7 10 10 20

Table of Contents

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

Air Cylinder

+ 55 (n 4) 110 + 55 (n 4) 120 + 55 (n 4) 15 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces 20 90 100 110 120 and same surface) 1 20 + 55 (n 2) (n 4) 100 + 55 (n 4) 110 + 55 (n 4) 120 + 55 (n 4) D-A59W 90 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8,

Proposals for Energy Saving

type (without silencer) 10/Rc 1/4 8/Rc 1/8 Threaded Threaded 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 10/Rc 1/4 6/Rc 1/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 16/Rc 1/2 16/Rc 1/2 Refer to page 3.4-1 of No. 3 for details.

Cylinder with Lock Series CLS

(Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 145 35 155 170 D-F5NTL 35 + 55 (n2) 2 (n = 4, 8, 12, 16) 145 + 55 (n4) 2 155 + 55 (n4) 2 170 + 55 (n4) 2 n pcs.

Fluoropolymer Piping Equipment

3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 1/8" x 0.086" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1/2" x 3/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/

MXQ

1 !2 !3 !4 !5 !6 !7 !8 !

Table of Contents

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16

Air Cylinder

13 8 41 5 8 28 5 6 4 6.8 25 3.2 40 55 M8 x 1.25 24 1/8 20 8 21 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4 6.8 28 3.2 40 55 M10 x 1.25 30 1/8 20 8 25 32 22 19.5 47 17 32 12 13 8 45 6 8 37.5 5.5 10 4 6.8 28 3.2 40 55 M10 x 1.25 34.5 1/8 20 8 25 40 24 21 54 22 41 14 16 11 50 8 10 46.5 7 12 4 7 30 3.2 55 75 M14 x 1.5 42.5 1/4 23 10 27 Dimensions by Stroke (mm) Stroke 1 to 50 51 to 100 101

Electric Actuator/Slider Type

8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 20 20 73.5 8 13 4 8 55 3.5 6 26 38 13 80 Up to 300 18 15.5 57.5 8 25 26 83.5 13 9 7 8 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 10 26 32 13 83.5 9 7 8 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 12 32 16 90.5 8 8 11 70 40 4 11 41 52 22 100.5 Up to 300 24 21 76 14 H GR H1 K PG P N NA PH PL PW S TD TT TY TX TZ Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 127 38 10