MNB

16.5 19 19 104 120.5 134.5 169 189 Bore size (mm) J GF GR GE MB K MM N P Q H S T V VA W ZZ 32 40 50 63 80 100 1/8 1/4 1/4 3/8 3/8 1/2 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 9 11.5 17 88.5 96.5 111.2 123.5 157 177 18.3 19.5 22.4 20.7 26 26 4 4 5 5 5 5 6 6 7 7 10 10 27 27 31.5 31.5 38 38 37 41.5 47.5 55 61

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1 Rolled steel Rod end nut #5 e.

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16

KJ

Body size KK3P-50N KKH3S-50N 5/8 5/8 -60N -60N 6/9 6/9 1/8 1/8 -65N -65N 6.5/10 6.5/10 KK4P-50N KKH4S-50N 5/8 5/8 -60N -60N 6/9 6/9 -65N -65N 6.5/10 6.5/10 1/4 1/4 -80N -80N 8/12 8/12 -85N -85N 8.5/12.5 8.5/12.5 Series KKH are only available as sockets.

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

MGG

1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

CL

1 !2 !3 !4 !5 !6 !7 !8 !

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 NA x M6 x 1 thread depth 6 M 37 25 KA 6.5 12 Bottom view of MXQ20-50 132225 K 12 48 36 6.5 12 43.5 0.5 6.5 46 Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

CQM

1 !2 !3 !4 !5 !6 !

CHKD/CHKG

8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth

JA/JAH/JB/JS

38 47.5 56.5 68 94.5 112 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 8 10 14 14 45 55 12 12 16 16 21 24 31 41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000

JA/JAH/JB/JS

41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000 54000 71000 0.01 0.01 0.02 0.02 0.05 0.07 0.16 0.31 0.58 1.08 2.7 4.7 Option Pneumatic: Up to 1 MPa Hydraulic:

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

C95

1!7w !6ui e!5 !

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

MY1

M6 x 1 A B MY-S32 45 64 11.7 6 11 6.6 M8 x 1.25 A B MY-S50 55 80 14.8 8.5 14 9 M10 x 1.5 A B MY-S63 70 100 18.3 10.5 17.5 11.5 M12 x 1.75 Side support A MY-S16A SMY1B16, #5 (#1 + #5 + #7) MY-S20A SMY1B20, #7 (#1 + #7 + #9) For 25 to 63 MY-S Bore size A SMY1B Bore size , #8 (#1 + #8 + #10) Side support B MY-S16B SMY1B16, #6 (#1 + #6 + #7) MY-S20B SMY1B20, #8 (#1 + #8 + #9) For 25 to 63 MY-S