Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table (mm) ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 NA 2 2 2 2 2 4 4 4 H 40 40 40 50 30 35 35 35 KA 125 173 223 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 Model F 35 35 35 40 30 55 65
H J H J AW10-A M5 x 0.8 1/16 25 59.9 47.4 12.5 M18 x 1 25 12.5 26 26 AW20(K)-B 1/8, 1/4 1/8 40 87.6 72.4 26 M28 x 1 40 26 5 28 27 27.8 37.5 37.5 62.5 37.5 63.5 AW30(K)-B 1/4, 3/8 1/8 53 115.1 85.6 29.4 30 M38 x 1.5 55 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AW40(K)-B 1/4, 3/8, 1/2 1/8 70 147.1 91.7 37.3 38.4 M42 x 1.5 80 37.3 1.5 28 38.3 27.8 48.8 42.5 74.8 42.5 74.8 AW40(K)-06
40 15 30 62 22 10 55 20 13 8 8 25 45 25 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 6 8 6.8 104 3.2 M26 X 1.5 137 47 4 28 40 15 64 22 12 55 20 13 8 8 25 45 32 21 7 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 134 3.2 171 54 4 30 55 88 24 14 75 23 16 10 11 27 50 40 With rod boot (mm) Symbol h Z l Stroke e f 1 to 50 51 to 100 1 to 50 1 to 50 101 to 150 151 to 200 201 to 300 301 to 400
KA FL 10.5 10.5 10.5 13.5 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 LC WB 13 13 13 16 LH 6.8 6.8 6.8 7 LX 3.2 3.2 3.2 3.2 LZ 40 40 40 55 X 55 55 55 75 NA M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NN 24 30 34.5 42.5 P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 WA 31 31 31 36 Y 20 20 20 23 Z 8 8 8 10 LD 4 4 4 4 LT LS 25 28 28 30 Bore size 40 47 47 54
T NPTF F G Note 1) R port of VQZ200 is only PF 1/16.
So [mm] 1500 2000 2500 3000 28.5 3/8, 16 3/8, 16 3/8, 16 1/2, 16 100 =0.7 38 47 0.5 56.5 0.1 0.3 50 10, 12, 16 1/4, 3/8 500 15 63 1000 1500 2000 2500 3000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 0 45 1,000 2,000 3,000 60 Maximum speed Vmax [mm/s] 75 80 89.5 16 3/8, 1/2 500 24.5 =0.7 1000 1500 2000 2500 3000 500 1000 1500 2000 2500 3000 48.5 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4
Housing 23.5 24.6 105 118 29 24.6 B Thread size M3 x 0.5 6 4 45 M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D. 55 55 A A Motor mounting area 1 For the motor mounting area dimensions of the models below, refer to the long stroke type dimensions. B Section BB Section BB Long stroke type1 Coupling Motor P.C.D.
PC04] (3) (3) (4) (4) (PSEL ) LECSS2T ABZ (5) (5) LECSS2T (6) (6) (7) (7) (8) (8) 16.5 [AL. 16.1] 1 16.6 2 16.7 3 8 14 8. 16 1 16.A (1) LECSS2T 1 (2) (2) (3) (3) 16.B [AL. 16.A] 2 16.C 3 16.D 4 16.E 5 16.F 6 17 17.1 1 (1) ON LECSS2T (2) (2) 17.3 2 [AL. 17.1] 17.4 3 (1) (2) (2) 17.5 4 (1) LECSS2T (SW1) (2) (2) 17.6 5 (1) DIP (SW2) (2) (2) 17.8 6 (1) 8 15 8. 19 3(FLASH-ROM
1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions
Model: 3000 (SV3000), Valve Manifold Stations: 20
Model: 3000 (SV3000), Valve Manifold Stations: 11