Air Cylinder

7.5 5.5 8 M10 x 1.25 29 1/8 77 32 Up to 300 301 to 1500 22 19.5 17 20 12 18 2 12 6 38 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 79 40 Up to 300 301 to 1500 30 27 19 26 16 25 2 13 8 47 M6 x 1 depth 12 6 14 M14 x 1.5 44 1/8 87 50 Up to 300 301 to 1500 35 32 27 32 20 30 2 14 11 58 M8 x 1.25 depth 16 7 18 M18 x 1.5 55 1/4 102 63 Up to 300 301 to 1500 35 32 27 38 20 32 2 14 11 72 M10 x 1.5

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

41 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 20 25 32 40 50 63 80 100 Without rod boot With rod boot on one side With rod boot on both sides Bore size (mm) TA Air-hydro TC H 35 40 40 50 58 58 71 71 ZZ 147 157 159 187 218 218 264 264 e 30 30 35 35 40 40 52 62 f 16 17 17 17 17 18 10 7 h 55

ISO Standard Hydraulic Cylinder

8 ) Note 1) 14 16 18 (n 2) 2 20 + 55 8 9 10 12 14.5 D-D-F5NT 25 (n = 2, 4, 6, 8 ) Note 1) D-A5/A6/A59W cannot be mounted to 40, 50.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(same side) 100 + 55 100 + 55 110 + 55 120 + 55 20 + 55 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 15 100 110 120 1 pc. 100 1 or 2 pcs. (different sides/same side) 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 130 + 55 "n" pcs.

LX

to cross section C-C. 27.5 T-slo B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1) 20 + 55 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 90 + 55 (n 4) 2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) D-A59W 1 15 90 100 110 120 2 (Different surfaces, same surface), 1 25 110 120 130 140 D-F5NT n (Same surface) (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n

Battery-less

9 o @1 @2 !1 !9 @0 !8 @0 !0 !8 !4 u u !2 !3 i e !5 r t w q y !6 !

2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

Table of Contents

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

Proposals for Energy Saving

type (without silencer) 10/Rc 1/4 8/Rc 1/8 Threaded Threaded 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 10/Rc 1/4 6/Rc 1/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 16/Rc 1/2 16/Rc 1/2 Refer to page 3.4-1 of No. 3 for details.

Fluoropolymer Piping Equipment

3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 1/8" x 0.086" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 1/4" x 5/32" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1/2" x 3/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/

MXQ

1 !2 !3 !4 !5 !6 !7 !8 !

Table of Contents

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16

Electric Actuator/Slider Type

8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, 20+55 n=2, 4, 6, 8, 90+55 (n4) 2 n=4, 8, 12, 16, (n2) 2 D-A59W n (Same side) 1.16 (1.21) 1.79 (1.84) 2.79 (2.83) 4.88 (5.03) 7.17 (7.38) Double clevis 90 100 110 120 15 1 2 (Dif. / same side(s)), 1 D-F5W, J59W D-F5BAL

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 20 20 73.5 8 13 4 8 55 3.5 6 26 38 13 80 Up to 300 18 15.5 57.5 8 25 26 83.5 13 9 7 8 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 10 26 32 13 83.5 9 7 8 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 12 32 16 90.5 8 8 11 70 40 4 11 41 52 22 100.5 Up to 300 24 21 76 14 H GR H1 K PG P N NA PH PL PW S TD TT TY TX TZ Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 127 38 10