High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

To order connector cable only Connector dimensions 4 Brown: 1 Blue: 3 9 3 1 Black: 4 33.9 L 35 10 Cable length (L) Part no. 300 mm V100-49-1-1 500 mm 1000 mm 2000 mm 5000 mm V100-49-1-2 V100-49-1-3 V100-49-1-4 V100-49-1-7 3000 mm V100-49-1-5 4000 mm V100-49-1-6 Caution Failure to meet IP65 performance may result if using alternative connectors than those shown above, or when insufficiently

Clamp Cylinder with Lock Series CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 46 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 50 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 56 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port Rear cushion valve Top width across

F

8 4 KSH06-01S 14.5 39.5 35.5 17 14 17 13.4 6 1/8 4 14 23 KSH06-02S 14.5 42.5 36.5 17 13.4 1/4 6 17 23 KSH08-01S 17.5 44 40 18.5 26.1 8 1/8 6 17 29 KSH08-02S 17.5 47 41 18.5 26.1 1/4 6 17 37 KSH08-03S 17.5 48 18.5 41.5 26.1 3/8 22 55 KSH10-02S 22.5 54 21 7 48 36.3 10 1/4 22 63 KSH10-03S 22.5 55 21 7 48.5 36.3 3/8 22 81 KSH10-04S 22.5 21 7 57.5 49.5 36.3 1/2 24 75 KSH12-03S 24.5 22 8 57 50.5

Modular F.R.L. Unit

M 2.8 P 26 T 0 B 104 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 85 26 35 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 60 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50

CLA

MlaXt.5 32 35 11( I 86 11,5 V, ~ 2( 40 1102 1 26 67 18 37 140 1119 1102 1129 y , y, 78 I 25 52 1,,3 I 21 I 30 72 I 23 " 1 17 IMl2x1. 111 17 17 I M22 Xl .5 Wthboot .. f h , ZZ 43 15 59 ~ 52 15 66 ~ 52 17.5 66 'I, 65 2 1.5 81 % I 4( 1133 116 140 V, V. ' 92 3( 52 1124 I 21 I 31 I 76 I 25 100 -1 0IX 119 IM12X17!

smcmaintenancepartslist

1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Actuators Modular F.R.L.

Brake mechanism added

90 (n = 2, 4, 6, 8 ) Note 1) 90 + 55 (n = 4, 8, 12, 16 ) Note 2) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 20 + 55 (n 2) 2 (n 4) 2 D-A59W n (Same surface) 1 100 110 120 15 90 2 (Different surfaces, Same surface) 1 120 130 140 25 110 D-F5NT (n = 2, 4, 6, 8 ) Note 1) 110 + 55 (n = 4, 8, 12, 16

•

F G J V , w K I KA l w LH LS 43 15 M14 x 1.5 15 17 15 27 I 19 85 188 15 I' 27 I Hi 100 188 17 I 34 I 19 106 206 43 15 M14 x 1.S ., 15' 1?

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Lead wire length) 7 15 4-Rc (PT)1/8 7 15 4-Rc (PT)1/8 (P/R port) (P/R port) 56.4 [57.7] 52.4 66 17 30 6.5 17 30 6.5 8 38.5 8 38.5 [ ] for AC Other dimensions are the same as the grommet

15

) 20 20 17 17 Weight (g) Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications.

KR

18.5 17 26.5 10 23 40.0 28.4 1 2 KRY10-04S 54.5 66 31 41 22 1 4 3 8 KRY12-02S KRY12-03S 53.5 55 17 57.4 45.4 24 17 28.5 1 2 KRY12-04S 20.9 57.5 68 12 Connection thread (With seal) 22 Reference dimensions after R thread installation.

RHC

19 22 18 19.5 12 32 Up to 1000 11 8 35 9 7.5 23 32 47 54.5 51.5 56 21 24 20.5 21 16 40 Up to 1000 RS H A MM LZ LY LX LT S NN ND NF NE P NB ZZ NA Y LS N WH X Bore size (mm) RZQ 55 41 40 6.5 M22 x 1.5 15.0 13 33.5 30 265 26 9 232 M8 x 1.25 192 22 20 20 1/4 55 46.5 40 6.5 M24 x 1.5 19.6 17 37 36.9 270 32 9 233 M10 x 1.25 193 5.8 to 8.8 27 20 25 1/4 MI W S 60 53 45 7 M30 x 1.5 19.6 17 43.5 43.9

Sine Cylinder Series REC

8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC Dimensions

Sine Cylinder Series REC

8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN P S X Y Z ZZ Bore (mm) 20 M20 x 1.5 1/8 146 20 8 21 215 Individual -X 25 M26 x 1.5 1/8 146 20 8 25 219 32 M26 x 1.5 1/8 159 20 8 25 232 40 M32 x 2 1/4 181 23 10 27 264 1031 Series REC Dimensions

51

Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35

LJ1H

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

Cylinder with Lock Series MNB

81 22 55 25 100 to 1000 40 41 16 114 189 89 30 20 19 37.5 26 116 20 17 177 37 1/4 170 96 26 Bore size (mm) LD T N P S V LH LS LT LX LY LZ K MM Q H VA W X Y ZZ J 32 34 27 1/8 154 6.5 7 30 198 3.2 32 57 50 6 M10 x 1.25 37 47 13 6.5 22 9 232 M6 x 1.0 40 39.5 27 1/4 161 8 9 33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 50 47 31.5 1/4 183 9 9 40 237 3.2 46 77.5 70 7 M18 x

CG1

Basic CG1DN20SCG1 20, #1 CG1DN25SCG1 25, #1 CG1DN32SCG1 32, #1 CG1DN40SCG1 40, #1 Basic CG1DN50SCG1 50, #1 CG1DN63SCG1 63, #1 CG1DN80SCG1 80, #1 CG1DN100 SCG1 100, #1 Add #7 Add #7 Basic/With Air Cushion: CG1BA With rod boot (mm) Bore (mm) l JH IJ h f JW ZZ e 20 25 32 40 50 63 80 100 27 32 38 48 59 72 59 71 55 62 62 70 78 78 80 80 16 17 17 17 17 18 10 7 30 30 35 35 40 40 52 62 (14.5) (11.5

High Power Cylinder Series RHC

19 18 22 12 200 to 1000 32 21 11 8 35 9 7.5 23 32 47 54.5 51.5 56 21 20.5 24 16 200 to 1000 40 MM LZ LY LX LT S NN ND NF NE P NB ZZ LS NA Y N WH X Bore size (mm) 55 41 40 5.5 M22 x 1.5 15.0 13 33.5 30 265 26 9 22 20 232 M8 x 1.25 192 1/4 20 55 46.5 40 5.5 M24 x 1.5 19.6 17 37 36.9 270 32 9 27 5.8 to 8.8 20 233 M10 x 1.25 193 1/4 25 60 53 45 6 M30 x 1.5 19.6 17 43.5 43.9 278 38 9 27 23 241