0.4

2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 97 130 152 31 42 53 64 75 86 108 119 141 125 150 175 50 62.5 75 87.5 100 125 112.5

5 Port Solenoid Valve Series VQZ1000/2000/3000

) Example VQZ2120-5M1-C6 U side 1 Stations VQZ2220-5M1-C6 VQZ2320-5M1-C6 VV5QZ22-05C 1 set (C kit 5-station manifold base part no.)

Manifold Specifications

B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 VV5Z3-40 VV5Z3-41 VV5Z3-42-01 VV5Z3-42-C6 VV5Z3-43 0.16 0.17 0.21 0.20 0.19 0.26 0.23 0.31 0.29 0.32 0.64 0.68 0.82 0.80 0.74 0.15 0.16 0.18 0.17 0.14 0.35 0.35 0.22 0.24 0.29 0.55 0.59 0.74 0.71 0.55 1/8 1/8 1/4 1/4 1/8 M5 x 0.8 M5 x 0.8 1/8 C6 C4 VZS VZ34 VFS Note) Value at manifold base mounted, 2 position single operating VS4

5 Port Solenoid Valve

fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Max. 24 stations) 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 108 125 135.5 97 125 135.5 152 175 185.5 119 137.5 148 141 162.5 173 130 150 160.5 86 112.5 123 75 100 110.5 64 87.5 98 53

VZ5000

Rc 1/8 VZS How to Order Type 42 VFS VV5Z5 05 C6 42 1 VS4 P, R port thread type A, B port size Stations VQ7 C6 One-touch fitting for 6 C8 One-touch fitting for 8 02 2 stations 1(P) port Rc 1/4 Rc Nil G F B7 One-touch fitting for 1/4" 20 20 stations EVS N NPTF T NPT B9 One-touch fitting for 5/16" 4(A), 2(B) port 3/5(R) port Rc 1/4 C6, C8 VFN Note) For more than 8 stations, supply air to both

SZ3000

If 12 VDC specifications are required, enter 12 at the end of the assembly part number. 1 2 1 2 P N SZ3000-42-6A-DSZ3000-42-5A-D For flat ribbon cable 20 pins D side 1 2 1 2 P N SZ3000-42-8A-DSZ3000-42-7A-D For flat ribbon cable 10 pins D side SZ3000-42-10A-D For serial D side Note) Connector block assembly can be shipped as an assembly only in the case of double wiring.

SZ3000

If 12 VDC specifications are required, enter 12 at the end of the assembly part number. 1 2 1 2 P N SZ3000-42-6A-DSZ3000-42-5A-D For flat ribbon cable 20 pins D side 1 2 1 2 P N SZ3000-42-8A-DSZ3000-42-7A-D For flat ribbon cable 10 pins D side SZ3000-42-10A-D For serial D side Note) Connector block assembly can be shipped as an assembly only in the case of double wiring.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Type 42 How to Order Applicable solenoid valve 10-SYJ714M-(-Q) 10-SYJ724M-(-Q) 10 SS3YJ7 42 05 C6 R port 1/4 Clean series Applicable blanking plate assembly Refer to page 633. -+ -+ -+ -+ Stations P port 1/4 A A A port size R X 02 : 20 2 stations : 20 stations P 01 C6 C8 N7 N9 1

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

For details on Gateway System Serial Transmission System Series EX510, refer to CAT.E02-22B catalog. 42 Series SJ2000/3000 EX510 Gateway System Serial Transmission System Plug-in Connector Type How to Order Solenoid Valves SJ 3 1 U 60 C6 5 C Standard SJ 3 1 C Z 60 C6 J 5 With switch Individual wiring SJ 3 1 Z 60 C6 5 M Note 1) [For plug-in mixed mounting] Single solenoid wiring spec.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting 65.2 [67.4] Approx. 300 (Lead

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) Applicable tubing O.D. C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.

0.4

U side D side SUP block plate 1(P) 2(B) (A)4 2(B) (A)4 (A)42(B) (A)42(B) Description/Model Stations 1 2 3 4 5 6 7 Individual EXH spacer VVQ1000-R-1Individual EXH spacer C6 N7 Single Valve Option C6 (EXH port) C6: 6 One-touch fitting When valve exhaust affects other stations due to the circuit configuration, this spacer is used for individual valve exhaust.

Manifold Specifications

Rc 1/8 VZS How to Order Type 42 VFS VV5Z5 05 C6 42 1 VS4 P, R port thread type A, B port size Stations VQ7 C6 One-touch fitting for 6 C8 One-touch fitting for 8 02 2 stations 1(P) port Rc 1/4 Rc Nil G F B7 One-touch fitting for 1/4" 20 20 stations EVS N NPTF T NPT B9 One-touch fitting for 5/16" 4(A), 2(B) port 3/5(R) port Rc 1/4 C6, C8 VFN Note) For more than 8 stations, supply air to both

Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

Compact Manifold Regulator Series ARM5

End plate L 11 1 No.

SV

8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Mechanically Jointed Rodless Cylinder Series MY1

Grease pack part number: D-X GR-S-010 (10 g), GR-S-020 (20 g) Individual -X Technical data 961 Series MY1B Construction: 16 to 100 MY1B16 to 100 23 33 32 31 30 24 8 4 6 7 5 1 2 11 19 16 3 6 47 30 37 39 26 MY1B16/20 38 40 MY1B80/100 36 MY1B16 45 43 11 13 15 12 17 20 28 26 10 18 SMC SMC 22 27 MY1B63 36 21 46 44 34 MY1B50/63/80/100 S 42 41 16 9 MY1B80/100 17 MY1B16 29 MY1B80/100 25 14 35 29

Table of Contents

Refer to page 8-11-96.

V

A N I F O L D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SS5Y 4 A, B P O R T S I Z E M A N I F O L D S E R I E S Metric (mm) M5 M5x0.8 (SY3000 Type 41 Only) 01 Rc(PT)1/8 (SY5000 Type 41 & SY3000 Type 42 Only) 02 RC(PT)1/4 (SY5000 Type 42 Only) C4 One Touch Fittings for 4 (SY3000 Only) C6 One Touch Fittings for 6 (SY3000 & SY5000 Only) C8 One Touch Fittings for 8 (SY5000 Only) C10

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS