CG1

87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10

VZ3000

override (Non-locking) (Mounting hole pitch) MAX. 11 VZ3540 (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm 2-M5 x 0.8 (PE port) 4-Rc 1/8 (Piping port) L plug connector (L) VZ3 40-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3

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Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

Compact Manifold Regulator Series ARM5

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the handle is unlocked.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Type 40/Type 41 How to Order Applicable solenoid valve 10-SYJ714M-(-Q) 10-SYJ724M-(-Q) 10 SS3YJ7 40 05 01 R port 1/4 Clean series R port 1/8 Applicable blanking plate assembly Refer to page 633.

CNG

2.5 73 154 10 12 10 6.6 35 54.5 40 4.5 49.4 48 22 28 67.7 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 10 (12) 14 10 6.6 40 65.5 49 4.5 58.4 56 30 30 78.7 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 Z l ZZ H Z e f h ZZ 35 165 186 30 16 55 185 206 0.25 x Stroke 202 40 180 201 30 17 62 223 40 184 208 35 17 62 206 230 50 209 (216) 237 (244) 35 17 70 229 (

Sine Cylinder Series REC

KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN

Sine Cylinder Series REC

KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN

Sine Cylinder Series REC

KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5 47 32 13 10 55 45 10 17 45.5 186 40 6 8 37.5 5.5 8 6.8 28 D32 M10 x 1.25 22 22 19.5 42.5 47 32 13 11 55 45 12 17 49.5 199 40 6 8 46.5 5.5 10 6.8 28 40 M14 x 1.5 24 26.5 21 51 54 41 16 12.5 75 50 14 22 55.5 227 55 8 10 56.2 7 12 7 30 -X NN

OMU0023

0010 000B 01 0F 0010 000B Instruction to execute the operation of Step Data No. 2 13 02 0206 sent. 14 01 02 004B 0001 01 02 01 Acquires the INP signal information.

High performance type Step Motor Controller (Servo/24 VDC)

(1) Confirmation of the package content 14 (2) Installation 14 (3) Wiring and connection 14 (4) Power ON alarm (error) 15 (5) Operation pattern setting 15 (6) Trial run 15 3.

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A L2 M L1 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 Applicable tubing 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 12 10 14 35.8 37.5 36 9 21.8 34.9 36.9 31.9 16 14 17 12 1 4 3 8 1 4 L08-02 L08-03 L10-02 52 61 68 8 14 12 17 38 39.7 40.7 19 23.3 35.9 37.9 36.9 16 14

SV

50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-

0.4

Stations 01 1 station When ordering a double check block, order the DIN rail mounting [-D]. 16 stations 16 VVQ2000-FPG-06...6-station manifold VQ2000-FPGC6C6-D, 3 sets VQ2000-FPGC8C8-D, 3 sets Connection threads Rc 1/8 Rc 1/4 Proper tightening torque (Nm) 7 to 9 12 to 14 Bracket Assembly Double check block Part no.

7ND9071en

T100 C IP66, AEx tb IIIC T100 C IP66 Ambient temperature ranges T6 T5 T4 ND9_E2 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I02 -40 to +60 C -40 to +75 C -40 to +85 C ND9_E2/I09 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E2/I32 -25 to +60 C -25 to +70 C -25 to +70 C ND9_E2/D33 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/D44 -40 to +60 C -40 to +75 C -40 to +82 C ND9_E2/I45 -25 to +60

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

/4" 12 17 13.7 17.5 31.8 12.7 9.3 13.1 AS231FG-01-04 AS231FG-N01-01 24.9 24.4 4 9.3 1/8" 8.4 17 36.1 31.1 17.5 14.2 18 9.3 13.1 12.7 12 R 1/8 32.1 27.1 AS231FG-01-06 AS231FG-N01-03 22.9 31.8 37.2 13.5 26.9 24.9 6 11.6 5/32" 9.3 10.9 14 18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 36.1 31.1 32.1 27.1 28.2 41.7 18.5 23.9 30.9 26.8 8 15.2 3/16" 11.4 12.9 21 14 10.9 14 16.5 12.7 16.2 AS231FG-02-04

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

ARM10/11

Panel Display cover Display cover Panel nut 14-4-40 23 Series ARM10 Regulator Single Unit Type 5. Unit representation 4.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note 3) For the inch-size One-touch fittings, refer to page 4-14-40.