CLA

(f) B u L-~ __~~__~~~ ~ Operating piston speed in/s (mm/s) ...J Stoppage Accuracy (Variation In control system is not induded) mm (IN) PI.ton sPMd mm/'sec (I.v.c) Type ot IockJng 50(2) 300(12) 100(4) 500 (20) Spring lock O.4 (C.016) iO.S (O.02) .11.0 (~O .o.I) :::2.0 {:to 08) Air pres.u ... lOCk O 2 (a.008) 0.3 (O.OI 2) O .S (i O .02) =. 1.5 (O .OS) Sori...Alr _roM." I"".

KJ

Please consult with SMC for availability. 15-4-43

0.4

Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5

Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

3 Port Air Operated Valve

Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 20 stations Manifold Option Description Part no.

ZSE F/ISE

22 M L For positive pressure ZSE50 02 M F 22 L For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction Nil None NPT 1/4 (M5 with female screw), Piping in

7ND9071en

ND9100 ND7100 pointer The air supply must be clean, dry and oil-free instrument air, see Section 2.4. marks on housing Table 3 Spring rates 45 45 Actuator type Spring rate (bar/psi) B1JK 3 / 43 B1J 4.2 / 61 B1JV 5.5 / 80 QPB 3 / 43 QPC 4.3 / 62 QPD 5.6 / 81 Adjust regulator pressure to a level that is max 1 bar (14.5 psi) + spring rate.

HRX-OM-S004

Tap water: Standard of The Japan Refregeration And Air Conditioning Industry Association (JRA GL-02-1994) 15% ethylene glycol aqueous solution: diluted by tap water in condition above without any additives such as antiseptics.

Title not found

D 43 Order Made Specifications OUT SUP OUT Specifications/Content Symbol Clean room specifications 10 Copper-free specifications 20 Approx.

PSxx-OMH0002CN

43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D LCD () SET UP DOWN 4 24 ()OUT1ON LCD 4 UPON/OFF DOWNON/OFF SET -27-67 (-27-67 OUT2()) -9No.PS-OMH0002CN-D 7 7 "8"7 "-"(

VQ7-6/7-8

03 C10 02 03 C12 Enter only when using for a 2 position single or double.

Micro Mechanical Valve Series VM1000

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

Vacuum

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

CL

43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 11 11 11 11 11 16 16 18.5 60 70 86 102 116 145 161 182 MGC MGF CY1 MY1 In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than the boot outer diameter "e" W/o rod boot W/ rod boot Bore (mm) 40 50

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

g Double clevis style 151 g 352 g 16 50 43 20 78 67 CQS 25 104 92 32 158 141 CQM 40 235 216 50 460 399 CQ2 RQ MU Auto Switch Mounting Bracket Part No.

Table of Contents

Also, when exceeding the air cushion stroke ranges on page 8-11-43, the piston speed should be 100 to 200 mm per second. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 8-11-43.

Series KP/KPQ/KPG

KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R)

Series KP/KPQ/KPG

KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R)