Table of Contents LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12
MXQ 12-2 With end lock, extension stroke end adjuster (12) Type Adjuster part no.
Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22
60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port 32 Series VPA300/500/700 Series VPA500/Base Mounted/Dimensions Standard/VPA544-1l 02 03 A B 1/4, 3/8 2(A) port 13.5 28.5 51 2 x 5.2 (For mounting) 1/4, 3/8 3(R) port 47 17.6 23 1/8 12(PA) port NO 2A 42 52 NC 12 12 3R 1P NC (1/8) 12(PA) port 12.6 13.5 83 23 91 74.5 73.5 28.5 X M5 x 0.8 (Breathing hole) 13.5 28.5 57 1/4, 3/
80 M10 x 1.5 depth 22 37 3 40 25 40 22 Up to 300 110 60 71 16 10 M26 x 1.5 41 100 37 3 M12 x 1.75 depth 22 40 30 50 26 (mm) GB Rc, NPT port GB G port Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13
16 20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58
bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction
Bore size (mm) B D E J M O d1 d2 YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 L UT YB-08 80 16 11 38 13 52 18 depth 12 C UA YB-10 100 19 14 50 17 62 21 depth 14 Material: Chromium molybdenum steel (Nickel plating) Part no. Bore size (mm) T1 T2 V W RS Weight (g) Part no.
LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12
Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold
fitting size 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 20 18.5 KQ2R08-12 42 4.6 12 12 KQ2R10-12 18.5 44.5 41.5 32.8 33 23 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.
-41 VV5Z5-42 Before using, refer to page 3-3-8.
fitting size 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 18.5 KQ2R08-12 42 4.6 12 20 12 KQ2R10-12 18.5 44.5 41.5 32.8 33 23 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.
13 14 50 8 58 37 35 15 220 225 55 15 15 25 to 1400 63 M12 x 1.5 90 98 63 15 42 19 14 43 35 1/2 52 163 15 18 60 10 65 45 42 18 240 247 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 80 17 20 25 to 1800 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287 302 100 19 15 25 to 1800 Rod series
12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.
-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color (Mounting hole) B C D E F G H Model A ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 12 12 12 12 110 52.45 42
12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.
23 25 14 35 7 1/4 60 45 33.2 M6 x 1 7.5 M14 x 1.5 56 5.5 153.5 30 12 43 103 128 40 25 to 800 22 19 51 22 12 32 25 19 37 3/8 62 63 41.7 10 73 6.5 185 9 34 18 47 128 153 M8 x 1 M16 x 1.5 D50 25 to 800 28 25 57 28 9 33 25 24 42 1/2 67 75 52.3 12 74 7 199 11 42 18 53 134 159 M12 x 1.25 M20 x 1.5 63 36 25 to 800 32 55 36 13 33 32 30 39 1/2 71 90 64.3 12 80 12 216 13 50 17 68 136 168 M12 x 1.25
VDC, 24 VDC, 100 VAC, 110 VAC, 200 VAC, 220 VAC (50/60 Hz) Coil rated voltage 10% of rated voltage Allowable voltage fluctuation 2 position double (Rubber) 3 position closed center Class B or equivalent Coil insulation type (A) 4 (B) 2 (A) 4 (B) 2 1 W DC (42 mA) 24 VDC 1 W DC (83 mA) 12 VDC Power consumption (Current) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC 1 (P) 5 (R1) 3 (