Series VQ Metal Seal/Rubber Seal Body Ported

) 12 or less 15 or less Single Rubber seal VQ1141 6.3 (0.35) 15 or less 20 or less Metal seal VQ1240 4.5 (0.25) 12 or less 15 or less Double (latching) Rubber seal VQ1241 6.3 (0.35) 15 or less 20 or less Metal seal VQ1340 4.5 (0.25) 20 or less 26 or less Closed center 57 VQ1000 Rubber seal VQ1341 6.3 (0.35) 25 or less 33 or less Metal seal VQ1440 4.5 (0.25) 20 or less 26 or less Exhaust center

SV

9 260.5 250 234.5 13 10 285.5 275 250.5 17.5 11 298 287.5 266.5 16 12 310.5 300 282.5 14 13 323 312.5 298.5 12.5 14 348 337.5 314.5 17 15 360.5 350 330.5 15 16 373 362.5 346.5 13.5 L1 L2 L3 L4 1-2-30 27 Series SV Series EX500 Decentralized Serial Wiring Dimensions: Series SV1000 for EX500 Decentralized Serial Wiring C3, N1 C4, N3 C6, N7 Tie-rod base manifold: SS5V1-W10SAWDU D B (S, R, RS

V

Area Differential MPa Pressure Differential MPa (mm2) MPa Water / Air Oil 0.02 3/8 15 VXD2142-03 4.5 80 0.7 0.6 0.02 1/2 VXD2142-04 15 5.5 100 1.5 0.7 0.6 0.02 3/4 VXD2152-06 20 9.5 170 0.7 0.6 Courtesy of Steven Engineering, Inc. !

VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for 4-M4 Manual release

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

Vacuum System Peripherals:

C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M 2 to 15 stations Special specifications M 15 15 When creating the special specifications, complete the stations table on the right. Includes number of blanking plate assembly.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

light Indicator light 28.5 <32> Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-11 VQZ1000/2000/3000 Body Ported Dimensions: VQZ2000 2 position single Grommet (G): VQZ212 (R)wGwC4, C6, M5 0 1 2-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 23.5 Mounting holes M5: M5 thread 300 84.5 (Lead wire length) 54.5 17.3 22.5 29.5 R2.5 6 6 3.4 B 4 27 11 15 SMC

0.

) For details on external pilot type, refer to page 15.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note) Types with 15 pin are also available. Refer to page 2-4-92 for details.

5 Port Solenoid Valve, Series VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 Base-Mounted Type Plug-in Unit Series VQC1000/2000 1in = 25.4mm VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for

Fieldbus System

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tube O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.

Manifold Specifications

(Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Fieldbus System

Refer to page 15 for a table of mountable units. Note 2) Cannot be connected with the EX600-SPR1, EX600-SPR2, EX600-SDN1, or EX600-SDN2.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=16 23.9 (L4) (L3) P=16 SYJ L1 L2 3 2n-Rc(PT)1/8 2 P=16 20.4 SX 1 SMC A 4 16.9 18 A 4 B 2 B 2 Stations VK 5 D side 15 7.7 VZ 10 10 Rc(PT)1/8 53 38 VF 84.5 (Singles) 109 (Double) 122 (3 Position) 300 VFR (

3 Port Solenoid Valve

V110-D5CU-C4 3 sets (Double solenoid part no.) V110-D5CZJ-C4 1 set (Double solenoid, with switch part no.) V110-D5MZ-C4 1 set (Double solenoid, individual wiring/ lead wire length 300 mm part no.) 1 2 The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc. The valve arrangement is numbered as the 1st station from D side.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

Table of Contents

0 o VFS6000-15 VFS6000-15 NBR !2 VFS6000-8A !

Fieldbus System

U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) 16 16 stations 02 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations A, B port size (Metric) A, B port size (Inch) Symbol A, B port P, E port Applicable series C3 3.2 One-touch fitting 8 One-touch fitting SV1000 C4 4 One-touch fitting C6 6 One-touch fitting C4 4 One-touch