2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

Dual Rod Cylinder Series CXSJ/CXS

side: Same) 3 8 6 22.5 22.5 2 x 2 x M5 x 0.8 thread depth 4.5 (mm) (Piping port) (Opposite side: Same) W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (13) (Z) (13) 66 103 46 40 10 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

250 262.5 275 287.5 300 300 58.1 42.6 7.5 34.5 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

Vacuum Pad

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Vacuum Pad

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Vacuum Pad

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Best Pneumatics Vol. 14

L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

MXS Series Air Slide Table

MXS16L-10 MXS16L-20 MXS16L-30 MXS16L-40 MXS16L-50 MXS16L-75 MXS16L-100 MXS16L-125 125 173 223 70 70 Air Slide Table (Symmetric type) MXSIL Series Dimensions MXS 20 L /Symmetric type ZZ Z Basic type 0.5 45.5 50 13 M 5H9 5 deep +0.030 0 2-M6 X 1 thread 13 deep N -1 X F 2 27 25 F 5H9 5 deep +0.030 0 22.5 (With stroke adjuster at extension end) 30 30 FF 58 76 46 6-M5 X 0.8 thread 8 deep 6 2

Modular F.R.L. Unit

L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21 21 AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 M5

Combination Cylinder

With rod boot Bore (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 12 14 18 25 85 95 95 103 10 10 10 10 19 20 21 23 18 22 22 30 14 16.5 20 26 to 200 to 300 to 300 to 300 15.5 19.5 19.5 27 13 17 17 19 38 45 45 52 91 101 102 111 57.5 69 69 76 54 62 62 67 3.5 4 4 4 5.5 9 9 11 4 7 7 8 4 7 7 8 26 31 38 47 M4 depth 7 M5 depth 5 M5 depth 8 M6 depth 12

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Vacuum

Port srze M5 ( 10 32 nom.)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 13.

Vacuum

Port srze M5 ( 10 32 nom.)

CL

With Air Cushion/Basic: CLG1BA Bore (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 to 200 to 300 to 300 to 300 15.5 19.5 19.5 27 18 22 22 30 13 17 17 19 57.5 69 69 76 8 10 12 16 M4 X 0.7 depth 7 M5 X 0.8 depth 5 M5 X 0.8 depth 8 M6 X 1 depth 12 5 5.5 5.5 6 10 14 24 29 35.5 44 12 14 18 25 14 16.5 20 26 38 45 45 52 M8 X 1.25 M10 X 1.25 M10 X 1.25

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13