Rotary Actuator/Vane Type

[mm] 2 x d CRBU2 Series [mm] CRJ Size CRB2, CRBU2 Q M N 10 M3 8.5 9.5 15 M3 11 10 20 M5 14 13 30 M5 15.5 14 40 M5 21 20 Size CRB2, CRBU2 d 15 3.4 20 4.5 30 5.5 40 5.5 (Viewed from the long shaft side) CRA1 CRQ2 A port B port A port B port MSQ (Standard) (Altered) MSZ Symbol: C3 Symbol: C4 The position of the screws for tightening the actuator body is changed.

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

VKF300

/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

ACB ACB SYJ 2-4.5 (Mounting hole) SX 57.5 VK 52.5 51 3(R) 1(P) 3(R) 1(P) VZ 9 16 32 17 4 VF VFR 10 4 10 P=11 L2 VP7 36.5 41.5 L1 VP4 45 M plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

Title not found

11/32 Typ. 11/32 11/32 1/4 Hex Typ. 9/16 Typ. 11/32 Typ. 9/16 21/32 21/32 11/32 11/32 9/32 9/32 10-FB3 10-FB2 10-FB4 10-FB1 10-FLB1 (Short) 10-FLB2 10-FLB2 (Short) 10-FLB1 21 Page 5 Distributed by Power Aire, Inc.

PSxx-OML0002CN

/ [UnL] [FAL] 3[LoC] -45No.PS-OML0002CN-G [0] <> (45)(45) [UnL] 5 [0] / 1 / ( ) 1 (/30 ) -46No.PS-OML0002CN-G , (1015 ) O -47No.PS-OML0002CN-G <> 5 UnLLoC 5 5 (30) 5 0 (30) 46/ 1 -48No.PS-OML0002CN-G ZSE30A(F)/ISE30A ( ) No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -49No.PS-OML0002CN-G No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

Solenoid Valve

(mm) SQ1000 SQ2000 If it is difficult to loosen the screw, loosen it while 3.2 VVQ1000-50A-C3 pressing the valve gently on the area near the manual override. 4 VVQ1000-50A-C4 VVQ1000-51A-C4 6 VVQ1000-50A-C6 VVQ1000-51A-C6 Mounting and Removal of Manifold with 8 VVQ1000-51A-C8 *Part numbers above are for one fitting; however, order them in 10 piece units.

CRBU

11-3-4.

5 Port Solenoid Valve Series SV

Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size

Electric Actuator

LECSB Positioning unit 24 VDC Note 2) Note 4) CN1 QD75D (Manufactured by Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R+ 17 S/S NG 36 PULSE R 18

Rotary Actuator

port B port A port B port M 30 30 M5 15.5 14 5.5 (Standard) (Altered) 40 40 M5 21 20 5.5 (Viewed from the long shaft side) Symbol: C4 Applicable to single vane type only Symbol: C3 The position of the screws for tightening the actuator body is changed.

Rotary Actuator/Vane Style Series CRB2

(An additionally machined port will have an aluminum surface since it will be left unfinished.) 3 x d Body (B) (mm) Size N M Q (mm) Size d 10 9.5 8.5 M3 15 3.4 15 10 11 M3 Body (A) D20 4.5 20 Q N A port B port A port 13 14 M5 B port 30 5.5 30 14 15.5 M5 (Standard) (Altered) M 40 5.5 40 20 21 M5 (Top view from long shaft side) 79 Series CRB2 Symbol: C4 Change the position of the screws for

Information

LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 17 PULSE R+ S/S NG 36 4 LA 18 PULSE

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 11 Stations, A B Port Size: M5 (Base Mounted M5X0.8)