/

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

Series SV

21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port) 2-4.3 (Mounting hole) 21 21.5 A B PE 38 46 A B A B SMC B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 19.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 134.4 128.8 M12 waterproof connector 60.5 58.7 26.5 13.5 5-Rc 3/8, 1/4 (Piping port

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 ASN M5 x 0.8 10/32UNF 8 9.6 9.4 AQ ASV Inch Size [mm] AK Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 VCHC 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03

1

x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A RB1007

Smooth Cylinder/Low Speed Cylinder

x 0.8, 1/8 Note) M5 x 0.8, 1/8 Note) 1/4 1/4 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 M5 x 0.8 Female thread Male thread Rod end thread Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port M5 x 0.8 M5 x 0.8 1296 Clean Series Low Speed Cylinder Series 10-, 11-CM2X

Table of Contents

The lead wire entry is on D side (LD) in this case. 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

Valve Single Unit

-C6 Applicable series Symbol Port size M5 x 0.8 12 12 stations SX3000 SX5000 M5 Note) For SS5X3: 4 to 12 stations. 01 1 8 SS5X3-41P-06-C6 1 set (Type 41P , 6-station manifold base part no.)

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

Modular Type Regulator Series AR

Note 3) For M5 and NPT thread types.

Stainless Steel 316 Fittings

Hexagon Socket Head Male Connector: KQG2S (M5) Applicable tube O.D.

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

VFR

VFN Pilot type Nil R External pilot Internal pilot Plug-in VFR5000 P 06 Non plug-in VFS5000 S 06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

5 Port Solenoid Valve

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Base mounted Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m S0715-5G-M5 AS2002F-06 AS2002F-06 AN120-M5 Symbol Model Type of actuation JIS symbol (A) 4 (B) 2 S0710 S0711 S0715 2-position single 5 1 3 (R1) (P) (R2) (A) 4 (B) 2 S0720 S0721 S0725 2-position double 5 1 3 (R1) (P) (R2) 4 2 (A) (B) S07A0

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

High Flow/ Power Saving Type Refer to page 46 for details.

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

0.4

C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 97 130 152 31 42 53 64 75 86 108 119 141 125 150 175 50 62.5 75 87.5 100 125 112.5 137.5 162.5 110.5

Auto Switch Guide

CP95 Auto switch mounting screw M5 x 0.8 x 16 l 1.

KG

(mm) <M5> Note) A Weight (g) D1 D2 L1 M L2 Model Nylon Urethane Applicable tubing KGW04-M5 KGW04-01 8 18 30 37.5 32 38.5 M5 x 0.8 11 3.0 3.0 8 10.4 1 8 16 4 23 M5 x 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 30.5 40 33.5 42.5 3.0 3.0 8 8 1 8 10 6 17 12.8 20 10 1 4 KGW06-02 46 46.5 17 14 10.9 8.6 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 43.5 49.5 47 51

Auto Switch Guide

Auto switch CEP1 CE1 Auto switch mounting screw M5 x 0.8 x 16 l 1.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.