4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

SYJA3000

48(22) Base mounted 2 position double SYJA3240-M5 51(25) 1.8 (0.1) 3 position exhaust center SYJA3340-M5 M3 X 0.5 M5 X 0.8 54 (28) 3 position exhaust center SYJA3440-M5 3 position pressure center SYJA3540-M5 2 position single SYJA3130 22 4 port base mounted (For manifold) 2 position double SYJA3230 25 M3 X 0.5 (1) 1.2 (1) M3 X 0.5 3 position exhaust center SYJA3330 (0.067) M5 X 0.8 3 position

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Compact Cylinder with Lock Series CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10

0.

VQZ115l-lGl1-M5-PR M5 x 0.8 (X: External pilot port) M5 x 0.8 [1(P), 3(R) port] M5 x 0.8 [2(A) port] 1 P 3 R 10 10.7 9 32 30.2 Note) For one-touch fittings for P/R port and silencer part no., refer to back page 4.

ZX

41 1 trimmer Pressure sensor 51 Filter unit (F) M5 x 0.8 External release port 3.6 (Mounting hole) Vacuum switch 1 10 19 13.6 2-R1.8 (Mounting hole) Vacuum switch Supply valve Air operated Release valve External release Release flow rate adjusting needle Interface plate (63.5) 18 15.5 4 2-3.3 Mounting hole M5 (or M6) (PE port) M5 (or M6) (PV port) Vacuum supply pressure port (V port) Vacuum

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 14.5 13.3 13.5 54.1 43.3 35 5.8 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override 41 2.8 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 89.3 (L = 300 to 5000) 83.7 M12 waterproof connector 53.5 48.5 24.5 16.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Vacuum Module Series ZX

(or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112

Basic type / Direct mount type Series CY3B/CY3R

-01-04-X214 AS1201FPQ-M5-04-X214 Elbow type/Brass (throttle valve) AS2201FPQ-01-06-X214 AS1201FPQ-M5-06-X214 CY1S With clean One-touch fitting AS2201FPQ-01-08-X214 AS2201FPG-01-04-X214 AS1201FPG-M5-04-X214 Elbow type/ Stainless steel 304 (throttle valve) CY1L AS2201FPG-01-06-X214 AS1201FPG-M5-06-X214 AS2201FPG-01-08-X214 CY1H Note 1) Refer to Back Page 10 (How to Use Clean Series) for the

Series SV

center [M12 waterproof connector type] SV100(R)-W-01 13.3 14.5 13.5 62.6 51.8 14.3 35 19 19 2-3.2 M5 x 0.8 (External pilot port) 17 17 (Mounting hole) 3 A B 22 A B SMC B A PE X EB EA P Manual override (non-locking) A side: Orange B side: Green (Light/Surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 41 11.3 (L = 300 to 5000) 97.8 92.2 M12 waterproof connector

Tamper Proof and Flat Head Screw

Type Metric sizes 04 06 08 10 12 Inch sizes Universal 3 01 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 03 05 07 09 11 With One-touch fitting M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 01 02 03 04 U10/32 N01 N02 N03 N04 SMC Pneumatics, Inc. 11 Series ASIII1F-T Dimensions (mm) 1in=25.4mm Metric sizes L2 L3 Applicable tubing O.D. d D1 M1 L6 D2 L1 D4 L4 H (width

AC Servo Motor Driver

44 140 70 M5 M4 12 33 12.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Valve Single Unit

size M5 x 0.8 Rc SX3140-5G (2 set) G F SX3000 SX5000 M5 01 1 8 N NPT NPTF T One-touch fitting (Metric size) Symbol Port size Applicable series One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 6 One-touch fitting for 8 C8 C4 C6 C6 Cylinder port size SX3000 C6: With One-touch fittings for 6 Manifold base (5 stations) SX5000 SS5X3-41-05-C6 One-touch fitting (Inch size)

5 Port Solenoid Valve

2 x 6.5 Mounting hole 35 53 Manual override 53 35 Bottom ported drawing 1/2" 1(P), 4(A), 2(B) port M5 x 0.8 ground screw SMC 4(A), 2(B) port 98 50 41 37 31.5 18 G1/2 Electrical entry PE X 26.5 P R1 R2 18.4 16 1/8" PE. port 41 41 27.5 27.5 1/8" External pilot port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3-position double check: VQC560 0 1 2-position double: VQC520 0 1 3-position closed center

REA/REB

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Adjustment of Cushion Effect (Smooth Start-up, Soft Stop) Caution Since the external slider and piston slider are directional for size 10, refer to the drawings below when performing disassembly or maintenance.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet