LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

Series VQ Base Mounted Metal Seal/Rubber Seal

C4 Refer to p.1.10-195 for cylinder port fittings.

CE

Applicable counter Series CEU5 Connector Nil Z With connector Without connector Fluoro rubber seals: XC22 (Example) CEP1B12100F9NXC22 05 Extension cable CE1-R Mounting bracket part numbers Cable suffix Cable length 05 10 15 20 Cylinder part no.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2

AS-FG/ASD-FG

41 AS321FG-02-12 AS321FG-N02-09 69 22 32.8 44.3 20.9 12 15.2 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 31.8 43.3 AS321FG-03-06 AS321FG-N02-11 55 17 27.8 39.3 12.8 6 17.9 3/8" 21 67 27.8 39.3 AS321FG-03-08 AS321FG-N03-07 57 18.5 29.5 41 15.2 8 13.2 1/4" 17 55 R(PT) 3/8 23 41.5 46.5 20.9 19 40.2 35.2 NPT 3/8 19 20.9 29.5 41 AS321FG-03-10 AS321FG-N03-09 59 21 31.8 43.3 18.5 10 15.2 5/16" 46.5 41.5

One-touch Fittings Series KQ2

Weight (g) D L A M 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 7 32 32 24 19 17 14 4 9 8 9 7 2 9.6 34.5 18.5 17.5 17 1 8 15.5 2.5 9.2 34 10 34 34.5 34.5 36.5 37 39 40 41 42.5 5 32 16 17.5 3 10.4 11.4 10.7 18.5 18 18.5 18 3 16 16.5 3.5 1 4 12.5 17 4.6 5 16 14 18.5

C95

6 5.4-41 -XC10 Dual stroke cylinder/Double rod !7 Made to order common specifications 5.4-46 -XC11 Dual stroke cylinder/Single rod !8 5.4-52 -XC12 Tandem cylinder !

Table of Contents

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Compact Cylinder with Air Cushion Series RQ

Applicable mounting bracket Bore size (mm) Joint 55 6 18 56 YA-03 32, 40 A type mounting bracket B type mounting bracket 100 8 22 67 YA-05 50 YA-03 YB-03 32, 40 YU-03 YA-05 YB-05 50 YU-05 B type mounting bracket Allowable eccentricity mm Bore size 32 40 50 1 Eccentricity tolerance 0.5 Backlash Joints are not included with A type and B type mounting brackets.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

41 8 18.5 15.2 79 R3/8 19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5

ZP

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Fluoropolymer Piping Equipment

8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

21 36.4 18.2 36 36 15.2 1/4 1/4 AS321F-02-06 AS221F-02-11 6 3/8" 12.8 17 35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3 31.8 37.8 67 18.5 63 29.5 43.3 42.8 15.2 41 21.3 48.3 AS321F-02-12 AS321F-02-11 12 3/8" 20.9 22 31.8 44.3 32.8 69 43.3 21 67

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

" 17 (17.5) 18.5 40.4 29.4 34.4 35.4 AS221F-02-03 AS221F-02-08 36.4 8 15.2 27.2 34.4 16 25.2 18.5 34 10.4 5/32" 32 AS221F-02-05 AS221F-02-10 43.2 10 18.5 33.9 34.2 17 18.2 24.9 36 20 21 11.4 3/16" 17 (17.5) 1/4 AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16"

CE

Nil L 0.5 m Standard cylinder stroke (mm) Refer to Standard Stroke on page 10-12-9. 3 m Connector Nil Z With connector Without connector Fluoro rubber seals: -XC22 (Example) CEP1B12-100-M9N-XC22 Applicable counter Series CEU5 05 Extension cable CE1-R Mounting Bracket Part No. Cable length Suffix 05 10 15 20 Nil C Cylinder part no.

CE

Nil L 0.5 m Standard cylinder stroke (mm) Refer to Standard Stroke on page 10-12-9. 3 m Connector Nil Z With connector Without connector Fluoro rubber seals: -XC22 (Example) CEP1B12-100-M9N-XC22 Applicable counter Series CEU5 05 Extension cable CE1-R Mounting Bracket Part No. Cable length Suffix 05 10 15 20 Nil C Cylinder part no.