Stability of suction position,

ZP3EU-F6-TB12 [Weight: 236 g] ZP2 ZP2V 26 18 26 18 ZP Width across flats 22 M12 x 1.75 M12 x 1.75 Width across flats 22 ZPT ZPR 6 27 19 52 6 27 19 52 11 11 XT661 32 32 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 93.8 78.6 Applicable pad part no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHS (mm) MHC WC 20 24 32 42 52 Model BF VA 4H9 4H9 5H9 6H9 6H9 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZD 6 10 12 16 20 BG VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 19 22 35 FX 22 26 32 40 50 AF 18 21 30 35 48 BE 48 58 68 WD 1.5 1.5 1.5 2 2 ZG 15 16 18 22 26 ZF 20 21 28 32 41 ZE 5 8 10 14 17 0 -0.062 0 -0.062 0 -0.062 0 -0.074 0

MY1

M5 x 0.8 GB 16.2 20 G 13.5 12.5 NC 14 17 WW 13 14 VV 10 12.5 PP 7.5 11.5 XX 30 32 QQ 9 10 RR 11 14.5 TT 15 18 UU 14 12 SS 2.5 5 Model MY1M16G MY1M20G "P" indicates cylinder supply ports.

15

8 70 50 4 44 69.8 83.5 M4 x 12 M5 x 45 11 NX M5 x 0.8 9 63 50 5 47.7 69.8 83.5 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 69.8 83.5 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.7 69.8 83.5 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 69.8 83.5 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 69.8 83.5 M3 x 12 M5 x 45 12 NM2 M4 x 0.7 8 50 36* 4.5* 38.5 69.8 83.5 M4 x 12 M5 x 25 10 32

SY

18 147 28 9.5 22 Grommet .

SYJ300/500/700

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Proposals for Energy Saving

Specifications other than above Bore size (mm) 20 25 32 40 d J HA ZZ 3 M5 x 0.8 32 135 3 M5 x 0.8 32 139 3 M5 x 0.8 32 141 4 Rc 1/8 36 174 Precision cylinder/MTS8-XC38 Specifications 8 Bore size (mm) Standard type, Top ported type Port direction Female thread Rod end configuration Dimensions Use 4 or 2.5 urethane tubing (TU0425), or soft nylon tubing (TS0425). 1 4 7 + Stroke 60 + 2 x

Air Slide Table Series MXQ

56.5 66.5 91.5 116.5 J 34 34 42 58 70 110 135 I 12 12 14 15 13 17 17 NN 2 2 2 3 3 4 5 H 32 32 40 39 36 36 G 18 18 20 9 23 12 N 4 4 4 6 6 8 10 HA 32 32 40 39 39 72 72 Model F 28 28 38 34 34 36 36 GA 18 18 20 38 48 59 84 KA 117.5 142.5 NA 4 4 4 4 4 8 8 MXQ12L10 MXQ12L20 MXQ12L30 MXQ12L40 MXQ12L50 MXQ12L75 MXQ12L-100 Note) Note) Note) Refer to the bottom view of MXQ12L-40. 108 Air Slide Table

Electric Actuator

T1 U 2 x D LEY U025 Joint Joint Applicable size 025 25, 32 V T2 M W Type A mounting bracket Mounting bracket YA 03 Joint Joint F B E 03 25, 32 Applicable size Material: Chromium molybdenum steel (Nickel plated) [mm] Mounting bracket YA YB Applicable size 25, 32 18 B D E F M T1 T2 Part no.

Compact Rotary Actuator Series CRQ2

Applicable shaft types: J, K, T Long shaft side X = X = X = Long shaft side Long shaft side Long shaft side Short shaft side Y = Short shaft side Size 20, 30, 40 Size 10, 15 Short shaft side Short shaft side Y = Size 20, 30, 40 Size 20, 30, 40 (mm) X 3 to 18 3 to 20 3.5 to 30 4 to 32 4 to 36 Size 10 15 20 30 40 (mm) (mm) Y 17 to 30 18 to 32 18.5 to 36 X 17 to 30 18 to 32 18.5 to 36 Y 17 to

24

A0.2 Bore size [mm] A [mm] B [mm] C [mm] D [mm] Hexagon socket head cap screw MGPM MGPL/A 12* 50 18 41 10 8 M4 x 0.7 16 56 22 46 12 10 M5 x 0.8 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M6 x 1.0 32 98 34 78 22 18 M8 x 1.25 40 106 40 86 22 18 M8 x 1.25 50 130 46 110 27 22 M10 x 1.5 63 142 58 124 27 22 M10 x 1.5 80 180 54 156 33 28 M12 x 1.75 100 210 62 188 39 33 M14 x 2.0 4.

Air Cylinder

[mm] Bore size A B C D F GA GB H LB LC LH LS LT LX LY LZ MM NA NB NN WA WBWW S X Y Z 10 15 15 17 4 8 7.5 6.5 28 15 4.5 9 77 1.6 24 16.5 32 M4 x 0.7 21 18 M8 x 1.0 14.4 13.5 45 63 5 7 103 16 15 18.3 20 5 8 7.5 6.5 28 23 5.5 14 82 2.3 33 25 42 M5 x 0.8 21 18 M10 x 1.0 14.4 13.5 45 64 6 9 107 Rod Flange (F) Head cover port location Stroke CJ2ZF 10 16 Z Mounting nut WA WB Rod end nut WW GB

V

Wiring Specs 20 20 Applicable up to 20 Solenoid M A N I F O L D O P T I O N S PORT PLUGS Applicable Fitting Size d A L D Model 16 32 6 KQP-04 4mm 16 32 6 KQP-03 5/32 18 35 8 KQP-06 6mm 18 35 8 KQP-07 1/4 20.5 39 10 KQP-08 8mm 20.5 39 10 KQP-09 5/16 Inserts easily into an unused cylinder port and/or SUP/EXH Ports.

KJ

25.5 33 26 32 32.5 32 34 36 37.5 37 39 41 42 43 44.5 46.5 46.5 48 50 4 9 4 9 10 8 10 19 32 11 19 32 25 25 32 58 27 35 61 15 22.5 14.5 20.5 20.5 18 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 2.3 2.5 2.3 2.8 3.6 2.3 15.5 15.5 8 10 8 10 10 16.5 16.5 9.6 1 8 1 8 10-32 UNF 5 32 10.4 16 17 1 8 3 16 1 8 11.4 16.5 18 10-32 UNF 11.11 Connection thread 1 8 K 1 4 13.2 17 10 19 1 4 14.29

KR

(mm) <M5, M6> <M5, M6> A Weight (g) L2 M D1 D2 L1 Model Urethane 2-applicable tubing KAY23-M5 15 9.6 28.5 15.5 M5 x 0.8 M6 x 1 8 8 8 15.5 19.5 33 3.4 2.9 9 1 8 KAY23-M6 KAY23-U01 10 3.2 17.5 10 KAY04-M5 KAY04-M6 16 18 18.5 15.5 M5 x 0.8 M6 x 1 8 29.5 6 4.6 4.6 8 10.4 16 4 1 8 KAY04-U01 1 4 KAY04-U02 22 34 34.5 15 20 9 14 10 10 18 6.4 6.4 KAY06-M5 KAY06-M6 16.5 20 20.5 16 M5 x 0.8 M6 x 1 32

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

Valve Single Unit

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Table of Contents

Description Material Return spring Gasket Stainless steel NBR VFS5000-9 AXT627-10-1 AXT627-10-1 AXT627-18 AXT627-10-1 o !0 !1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

CJ5-S

6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38