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(800) 526-7661 M5 x 0.8 Series Fibre Gasket Supplied 1/4 Hex Typ 35/64 35/64 29/64 29/64 .085 29/64 83 M5-B2 1/2 M5-B1 M5-B2 M5-B3 M5-B4 15/32 1/2 11 32 11 32 11 32 9/32 13/64 9/32 13/64 13/64 3 5/16 Hex Typ 84 M5-LB4 M5-LB1 M5-LB2 M5-LB3 M5-LB2 1/2 1 15/16 11/16 11/16 11/16 3 3 1/4 Hex Typ 5/16 Hex Typ 85 M5-T1 M5-T2 M5-T3 M5-T4 M5-T2 1/2 See complete selection of adapters on pages

5 Port Solenoid Valve Series VQZ1000/2000/3000

C6: One-touch fitting for 6 VVQZ2000-10A-2 VV5QZ22-05C 926 Body Ported Series VQZ1000/2000/3000 Dimensions: VQZ1000 VV5QZ12C Stations Grommet (G) U side D side One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" L3 L4 46.2 (For M5) 4 L5 M5 x 0.8 [4(A), 2(B) port] 13 SJ 8.5 (8) (5.5) SY Approx. 300 (Lead wire length) 104.2 95.6 34.2 25.6 25.6 23.5 5 R1 3

SMC Pneumatic Clean Series

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4-FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A F FD 10.5 7.5 7.5 7.5 DL Bore size FT 22 17 17 13 B1 66 52 40 40 34 B FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 16 13 13 13 7 7 7 4 4 4 60 60 60 21 19.5 19.5 15.5 24 22 22 18 40 32 25 20 5 24 46.5 37.5 33.5 28 11 8 8 8 82 75 75 75 36

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4 x FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A 66 52 40 40 34 B 22 17 17 13 B1 10.5 7.5 7.5 7.5 DL Bore size FT F FD FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 7 7 7 4 4 4 60 60 60 16 13 13 13 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 5 24 46.5 37.5 33.5 28 47.3 37 37 30 36 50

Valve Single Unit

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122 132 176 201 13-/22-MXQ12L10 13-/22-MXQ12L20 13-/22-MXQ12L30 13-/22-MXQ12L40 13-/22-MXQ12L50 13

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

SYJ300/500/700

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

(mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 ZG 15 16 18 22 26 ZF 20 21 28 32 41 BG ZE 5 8 10 14 17 CC 9.5 13.5 17.5 20 25 VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 26 27 33 35 45 FX 22 26 32 40 50 AF 35 36 44 48 58 BE 30 38 48 58 68 ZJ 3.5 4.5

Table of Contents

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

0.4

Cylinder port NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Proposals for Energy Saving

Specifications other than above Bore size (mm) 20 25 32 40 d J HA ZZ 3 M5 x 0.8 32 135 3 M5 x 0.8 32 139 3 M5 x 0.8 32 141 4 Rc 1/8 36 174 Precision cylinder/MTS8-XC38 Specifications 8 Bore size (mm) Standard type, Top ported type Port direction Female thread Rod end configuration Dimensions Use 4 or 2.5 urethane tubing (TU0425), or soft nylon tubing (TS0425). 1 4 7 + Stroke 60 + 2 x

REA/REB

M5 x 0.8 26 68 8 80 14 19.5 20 15 39.5 9 38 4 REAR15 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 18 21 25 18 54.5 14 53 5 REAR20 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 17 20.5 40 22 64 11 62 5 REAR25 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 20 21.5 40 28 72 15 70 6 High Precision Guide Type REBH Order Made Auto Switches REAR32 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 26 24 50 35 79 13 76 7 REAR40 7 M6 x 1 11 Rc 1/

Sine Rodless Cylinder Series REA/REB

20 68 80 8 M3 x 0.5 4.5 3.5 26 M5 x 0.8 4 38 9 REAR15 21 18 54.5 18 25 98 84 7 M4 x 0.7 6 4.3 32 M5 x 0.8 5 53 14 REAR20 20.5 22 64 40 17 NPT 1/8 107 95 7 M4 x 0.7 7 5.6 38 Rc 1/8 5 62 11 REAR25 21.5 28 72 40 20 NPT 1/8 105 7 117 M5 x 0.8 6.5 5.6 43 Rc 1/8 G 1/8 6 70 15 REAR32 24 35 79 26 50 NPT 1/8 116 130 7 M6 x 1 8.5 7 54 Rc 1/8 G 1/8 7 76 13 REAR40 26 40 93 34 60 NPT 1/4 148 134

CG5-S

M10 x 1.25 M5 x 0.8 83 32 35.5 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 1/8 85 40 44 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 1/8 93 50 55 to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 1/4 109 63 69 to 1200 35 32 27 17 M10 x 1.5 19

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Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

CL

4 8 55 3.5 6 26 38 13 80 Up to 300 18 15.5 57.5 8 25 26 83.5 13 9 7 8 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 10 26 32 13 83.5 9 7 8 64.5 4 9 32 45 17 90 Up to 300 22 19.5 69 12 32 16 90.5 8 8 11 70 40 4 11 41 52 22 100.5 Up to 300 24 21 76 14 H GR H1 K PG P N NA PH PL PW S TD TT TY TX TZ Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 20 127 38 10 20 32 22 32 52 8 183 173 5 4 19.5 41 M20 x

C85

54) 56 (56) 6H9 12 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 14 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 6H9 16 M5 x 0.8 M16 x 1.5 M6 x 1 18.3 6.2 24 8 5 10 13 5.5 17 38 22 6 12 9 16 14 9.5 16 19.7 20 M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50

Electric Actuator

101 to 400 20 to 100 32 88.2 116.8 76.6 116.1 87 25 51 56.5 M8 x 1.25 13 101 to 500 Stroke range V U T S R PB PA NB NA M L K J (mm) Size 15 to 100 25 24 17 14.5 34 M5 x 0.8 8 15.6 9.3 40 45 46.5 1.5 15.3 101 to 400 20 to 100 32 31 22 18.5 40 M6 x 1.0 10 15.6 9.3 60 60 61 1 15.3 101 to 500 Note 1) Range within which the rod can move.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.