5 Port Solenoid Valve

3-port) 50.3 (Single solenoid) Plug Lead Manifold Bar Base 16.5 11 2n x V4, V3, V2, M3 (4(A), 2(B) port) V4: 4 x 2.5 V3: 3.2 x 2.0 V2: 2 x 1.2 M3: M3 thread 3.5 14.4 Indicator light With plug connector / light Plug Lead Single Unit Formula L1 = 7.5n + 8.9, L2 = 7.5n + 17.9 n: Station (Maximum 20 stations) Dimensions n L L1 L2 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23.9 31.4 38.9

CQS

6 8 7 12 M3 x 0.5 15.5 20 25.5 28 M4 x 0.7 32 38 47 52 6.5 6.5 9 9 3.5 3.5 5.4 5.4 6 8 10 12 5 6 8 10 7.5 7.5 9 11 30.5 40.5 22 27 35.5 45.5 27 27 34.5 37.5 32 32 39.5 42.5 8.5 8.5 9.5 10 13.5 13.5 14.5 15 25 29 36 40 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M4 x 0.7 M4 x 0.7 30.5 40.5 22 27 35.5 45.5 5, 10 M5 x 0.8 M6 x 1.0 34 44 24.5 29.5 44 54 M6 x 1.0 M6 x 1.0 37.5 47.5 27.5 32.5 47.5 57.5 Note

Made to Order

15 20 25 32 40 50 63 M3 x 0.5 9.5 3.4 6.5 3.3 5 7 5.5 10.5 26 23 34 15 7.5 M3 3.5 10 M3 x 0.5 11.5 3.4 6.5 3.3 5 7 7 13 33 30 38 15 7.5 M3 3.5 12 M4 x 0.7 18 4.5 8 4.4 4.5 6.5 7.5 14.5 38.5 35.5 53 17 8.5 M4 4.5 14 M4 x 0.7 16.5 6 4 45 14 62 29 14.5 M3 4.5 26 6.5 7 34 3 M5 x 0.8 20.5 7 4 51 17 70 29 14.5 M4 5.5 31 8 8 39 3 M6 x 1 21 7.5 4.5 62.5 22 76 34 17 M5 6.5 41 9.5 10 50 3 M6 x 1 25.5

ISO Cylinder

GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75

MXS Series Air Slide Table

Applicable model P(Hexagon socket head screw) Q(Hexagon socket head screw) Mounted to body J M I F B C D E H A MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 6 2.5 7 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 7 3 8 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 10 4 12 31 9.5

Smooth Cylinder/Low Speed Cylinder

MQ CUX20-PS Rod seal: 1 pc. 10 16 20, 25 32 0.54 10% M3 CUX25-PS Gasket: 1 pc. RHC 1.23 10% M4 Grease pack (10 g): 1 pc. CUX32-PS 2.55 10% M5 It is impossible to replace seals in bore size 10 mm. RZQ 4.02 10% M6 Operating Precautions Warning 2. Grease pack When maintenance requires only grease, use the following part numbers to order.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model Tightening torque Thread size 10-SY3000 M2 0.8Nm 0.16Nm 10-SY5000 10-SY7000 10-SY9000 M3 M4 M3 1.4Nm 0.8Nm 491

ZP

Weight(g) ZP3B-Y1J -B3 ZP3B-Y1K -B3 ZP3B-Y1J3-B3 ZP3B-Y1J6-B3 ZP3B-Y1K3-B3 ZP3B-Y1K6-B3 ZP3-015U ZP3-02U ZP3-035U 7.6 8.5 10.9 12.1 5 7 Width across flat 6 Width across flat 4 Width across flat 10 Width across flat 8 2 2 D 2 2 D A M6 x 0.75 B B M3 x 0.5 M8 x 0.75 A 10 0.4 4 3 M3 x 0.5 1.5 0.8 3 1.5 0.8 1.5 2 2 1.5 Dimensions (per stroke) Dimensions (per stroke) A 27 34 B 10 14 D A 31 37.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

70 100 300 500 1000 W Piston speed (mm/s) Graph (1) Moment M1, M3 M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25 CY1H25 64 56 (Nm) 50 40 30 50 40 30 20 28 26 M1 M2 M3 M2 M3 M1 Model Model 20 CY1H20 CY1H15 16 Moment (Nm) Moment (Nm) CY1H10 CY1H25 1.5 2.5 1.5 28 26 28 13 10 10 CY1H15 CY1HT25 10 16 10 56 85 56 2 2.5 3 4

Sine Rodless Cylinder Series REA/REB

(1)> Moment REA M1,M3 M2 (Static moment/Dynamic moment) Allowable Moment 100 100 85 96 REBHT32 REBHT32 REB 64 56 (Nm) REBHT25 REBH25 50 40 30 50 40 30 REBHT25 REBH25 M1 10 28 56 64 M2 16 26 85 96 M3 10 28 56 64 Model REBH15 REBH25 REBHT25 REBHT32 REC 28 26 20 20 16 REBH15 13 REBH15 CY 10 10 Moment (Nm) Moment (Nm) 2 2.5 3 4 5 3 4 5 CX M3 2 MQ 1.5 1 1 RHC 0.5 0.5 M1 M2 RZQ 70 100 300 500 600

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mount of single unit 24 or more 0 0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) ZSE ISE 31 0 0.4 0 0.4 31 ZSP PS ISA PSE IS ISG ZSM Vertical stacking mount of multiple units (n pcs.) 0 0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 851 Series PSE300 Dimensions PSE3T 38 8 x M3 3 x 7.2 (= 21.6) Front protective cover (Option) 2 x 3.4 mounting hole (Rotate 90 to mount) 6.4 2 x 6.4 1 2 3 4 35.5 28

Air Slide Table

For details, refer to the MXQR Operation Manual. 5.5 3 5.75 3 depth 2.5 +0.03 0 3 depth 2.5 +0.03 0 N x M3 x 0.5 thread depth 4 4 5.5 3 0.5 13.5 1 12 15 31 14 27 12 20 10 4 1.5 F 4 x M2.5 x 0.45 thread depth 3.5 9 -1 x F 2 N 11 3 x M3 x 0.5 thread depth 5 M 5 K 12.5 4 x M2.5 x 0.45 thread depth 2.5 3 6.5 Bottom view of MXQR6-30 18.2 0.3 20 16 13 3.5 20 Z ZZ (NN-1) x H G H 3H9 depth 2.5 +0.025

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Fluoropolymer Piping Equipment

6 6 LQ1R51-M 19 1/2" 30.5 29 10 10 LQ1R5B-M1/2" 9 LQ1R5C-M3/4" 3/4" 30 39 16 15 LQ1R5D-M1/2" 9 LQ1R5G-M3/4" 1/4" 27.5 33.5 6 6 LQ1R5H-M3/4" 3/8" 29 35 10 10 LQ1R6A-M 1" 3/4" 36 38 6 24 9 18 21 43 28 10 7 29 14 28 26 54 39 10 10 LQ1R52-M 12 9.4 LQ1R53-M 19 3/4" 30 39 16 15 LQ1R54-M 12 9.4 LQ1R58-M 19 1/4" 27.5 33.5 6 6 LQ1R59-M 19 3/8" 29 35 10 10 LQ1R61-M 25 3/4" 36 38 16 16 LQ1R6B-M3/4"

Vacuum Unit

1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

42

Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

Electric Actuators

31 G 28 58 5H9 depth 5 +0.030 0 2-M3 x 0.5 10.5 D-M4 x 0.7 (for work piece mounting) 12 2-M3 thread depth 5 Effective thread depth 4 (PE terminal) (3.5) 6 4-8 50 17.5 22 25 35 18.5 10 20 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 10 (39.5) E 25 (4) Motor wire (300mm) Stroke + 135 30.5 The dimension inside [ ] shows the location

Title not found

(800) 526-7661 Adapters 1/4 1/4 1/2 9/32 5/32 7/16 Ref 1/4 Hex 5/16 Hex 5/32 5/16 Hex 1/8 NPT M3 x 0.5 M6 x 1 Thd 3/8 M5 x 0.8 10-32 Thd 5 32 9 32 M3 0.5 Thd to 10-32 Thd 1/2 Hex M5 x 0.8 M3 to 10-32 (F) M5 to 1/8 (F) M5 to 10-32 (F) 91 M3 to M6 (F) 9/32 5 __ 32 1/4 1/2 M5 x 0.8 Thd 10-32 Thd 5/16 Hex 1/8 BSPT 1/2 Hex M6 x 1 3 16 1/2 1/2 1/4 9/32 Hex 5 32 5 32 1/8 NPT 1/8 NPT 3/8 3