AC Servo Motor Driver (Network card type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 A B C D E F -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41

Free Mount Cylinder Series CU

CUJ (g) Heat resistant (10 to 150C) -XB6 Stroke (mm) Cold resistant ( 40 to 700C) -XB7 Bore size (mm) CU 5 10 15 20 25 30 40 50 -XB9 Low speed (10 to 50 mm/s) -XB13 Low speed (5 to 50 mm/s) 28 (33) 31 (41) 34 (44) 37 (47) 40 (50) 43 (53) C(D)UK6-D CQS -XC19 Intermediate stroke (5 mm spacer) -XC22 Fluororubber seals 43 (48) 47 (57) 51 (61) 55 (65) 59 (69) 63 (73) C(D)UK10-D CQ2 Non-rotating

SYJ3000/5000/7000

Example: SS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

One-touch Fittings

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.

Table of Contents

-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F

4/5 Port Air Operated Valve Series SYJA3000

Example: SS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

0.55

04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) 1/8 12(PA) port NC 33 12 4.5 2A 31 41 107.1 (2) (9) 115.1 2 x 5.2 (For mounting) (1/8) 12(PA) port (Mounting groove for M6 thread) (6.4) 12 (63) 64 9.4 38.5 63 56.5 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1l (-F) 03 04 A B

AIR COMBINATION

-02-A Y410-03-A Y510-03-A VHS40-02A VHS40-03A VHS20-01A VHS30-02A Pressure relief 3 port valve Note5) VHS40-06A Attachment VHS20-02A VHS30-03A VHS40-04A E300-04-A E300-03-A E300-02-A E400-02-A E200-01-A E400-04-A E400-03-A Piping adapter Note5) E100-M5-A E200-02-A E500-06-A E200-03-A E400-06-A IS10E-4002-A IS10E-3002-A IS10E-2001-A IS10E-4003-A Pressure switch with Note5) IS10E-2002-A IS10E

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Series IDG

and 50HM are 03 only.

VQZ1000/2000/3000

PE port 18 18 Rc 1/4, 3/8 1(P) port (For Rc 1/4) (For Rc 1/4) 2-Rc 1/4, 3/8 3(R2), 5(R1) port 21 21 M5 x 0.8 external pilot port (Only external pilot type (R)) (For Rc 3/8) (For Rc 3/8) 33 L plug connector (L): VQZ3150 1(R)-L-02 03 DIN terminal (Y): VQZ3150 1(R)-Y-02 03 Indicator light 300 108.5 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 111.5 Max. 10 Applicable

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Compact Cylinder with Lock Series CLQ

Type A mounting bracket part numberYA-03 JointYU-03 2 x O depth of counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part no.

SYJ300/500/700

Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

LVQ

class 2 3 4 5 6 Type of part 5 Symbol U B N Type of part Nut & insert bushing Insert bushing Nut LQ1 LQ2 3 6 LQ1 LQ1 For pilot port Tubing size Body class LQ1 1 U 03 LQ1 Tubing O.D. 1/8" (3) 4 Body class Symbol 1 Body class 1 Symbol 03 04 Applicable fitting LQ1 1 Type of part Note) Cannot change to tubing of different diameter.

AC Servo Motor Driver (CC-Link Type ）

Home position return position data Parameter No.PC07 Set the current position at home position return completion. 5 43 5.

AC Servo Motor Driver (CC-Link Type ）

Home position return position data Parameter No.PC07 Set the current position at home position return completion. 5 43 5.

5 Port Solenoid Valve Series VQZ1000/2000/3000

72.8 + + 57 41.6 26.5 2 x PE port 20.5 20.5 14 X 12 Y 13.5 11.5 M5 x 0.8 (Not used) 21 (18) 21 (18) M5 x 0.8 (External pilot port) 33 1/4, 3/8 [1(P), 5(R1), 3(R2) port] 66 ( ): VQZ325-G1-02 L-type plug connector (L): VQZ325 (R)-L10 1 02 03 DIN terminal (Y): VQZ325 (R)-Y10 1 02 03 136.8 [141.2] Approx. 300 (Lead wire length) 57 [64] 152.6 Max. 10 Applicable cable O.D