One-touch Fittings Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.
-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F
Example: SS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) 1/8 12(PA) port NC 33 12 4.5 2A 31 41 107.1 (2) (9) 115.1 2 x 5.2 (For mounting) (1/8) 12(PA) port (Mounting groove for M6 thread) (6.4) 12 (63) 64 9.4 38.5 63 56.5 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1l (-F) 03 04 A B
-02-A Y410-03-A Y510-03-A VHS40-02A VHS40-03A VHS20-01A VHS30-02A Pressure relief 3 port valve Note5) VHS40-06A Attachment VHS20-02A VHS30-03A VHS40-04A E300-04-A E300-03-A E300-02-A E400-02-A E200-01-A E400-04-A E400-03-A Piping adapter Note5) E100-M5-A E200-02-A E500-06-A E200-03-A E400-06-A IS10E-4002-A IS10E-3002-A IS10E-2001-A IS10E-4003-A Pressure switch with Note5) IS10E-2002-A IS10E
Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.
PE port 18 18 Rc 1/4, 3/8 1(P) port (For Rc 1/4) (For Rc 1/4) 2-Rc 1/4, 3/8 3(R2), 5(R1) port 21 21 M5 x 0.8 external pilot port (Only external pilot type (R)) (For Rc 3/8) (For Rc 3/8) 33 L plug connector (L): VQZ3150 1(R)-L-02 03 DIN terminal (Y): VQZ3150 1(R)-Y-02 03 Indicator light 300 108.5 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 111.5 Max. 10 Applicable
SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.
Type A mounting bracket part numberYA-03 JointYU-03 2 x O depth of counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part no.
Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
class 2 3 4 5 6 Type of part 5 Symbol U B N Type of part Nut & insert bushing Insert bushing Nut LQ1 LQ2 3 6 LQ1 LQ1 For pilot port Tubing size Body class LQ1 1 U 03 LQ1 Tubing O.D. 1/8" (3) 4 Body class Symbol 1 Body class 1 Symbol 03 04 Applicable fitting LQ1 1 Type of part Note) Cannot change to tubing of different diameter.
Home position return position data Parameter No.PC07 Set the current position at home position return completion. 5 43 5.
Home position return position data Parameter No.PC07 Set the current position at home position return completion. 5 43 5.
72.8 + + 57 41.6 26.5 2 x PE port 20.5 20.5 14 X 12 Y 13.5 11.5 M5 x 0.8 (Not used) 21 (18) 21 (18) M5 x 0.8 (External pilot port)
FG FG 24 V 0 V 24 V 0 V 24 V 0 V 24 V 0 V Slave unit 75 Slave unit 03 Slave unit 01 Master unit ZW-31LM Type 3 ground Type 3 ground SHIELD SG L2 L1 SG L2 L1 SHIELD SG L2 L1 SHIELD SG L2 L1 Type 3 ground Type 3 ground SHIELD FG Twisted pair wire with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-2-46 43 Series SV Series EX120 Dedicated Output Serial Wiring Type F1 NKE Corporation
2-Rc 1/8 Connection port SET G SET Pad side VAC Vacuum pump side 43 IC 2-Rc 1/8 Pressure gauge connection port 2-Rc 1/8 Pressure gauge connection port 50 60 VBA 02 03 04 IRV30002-Rc 1/4 Connection port 70 VE 2.3 54 VY1 24 G 50 (R) PPA SMC 66 6 P K U C S O H L AL 42 Panel cut Panel thickness: Max. 4 10.5 x 8.5 2-Rc 1/8 Pressure gauge connection port G 43 74 130 22 SET Atmosphere VAC Vacuum
9 D-Side End Plate Assembly @0 U-Side End Plate Assembly MES80 D 03 2 MES80 U 03 2 Size 2 4 Size 18 mm Size 26 mm Option Size 2 4 Size 18 mm Size 26 mm Option Nil Nil None External pilot Built-in silencer External pilot + Built-in silencer -S None Built-in silencer -R -S Thread type -RS Nil Rc G NPTF F T Thread type Nil Rc G NPTF F T Port size Symbol 03 04 Port size 3/8" 1/2" Size 18 mm
25.6 24.5 23.4 22.5 21.6 20.8 20.1 19.4 18.8 18.2 Invalid 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 97 93 90 86 83 80 77 75 72 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 00 01 02 03 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 0 1 2 3 4 5
Bore size (mm) Z Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22