Stations: 5 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 3 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: R (External Pilot), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 7 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 12 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 7 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 8 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 2 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 8 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 4 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Stations: 6 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Table of Contents

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VS7-6

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 2 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: ZCN [ControlNet (IP40)], Input Block Stations: None, Input Block COM: +COM, Stations: 2 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: QW (DeviceNet), Input Block Stations: 13 (1 Station/M8: 4 Inputs 3 Pins), Input Block COM: +COM, Stations: 2 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 2 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)