LEC-OM02704CN

RY(n2)E () RY(n2)E RY(n2)D RY(n2)C 0 0 0 1 0 0 1 2 0 1 0 3 3 0 1 1 4 1 0 0 5 1 0 1 6 1 1 0 7 1 1 1 8 . 0OFF 1ON RY(n1)ARY(n3)A50ms (RY(n1)ARY(n3)A)(15.12.4(1)) RY(n1)ARY(n3)A PD20(D-1)0 RY(n1)A RY(n+3)A 15 10 15 (2) () CN6 CC-Link () 1 2 CN6-14ON RXn0ON RXn0 RXn0 RXn1PA10 ONRXn1 RXn1 RXn1 RXn2OFF ONRXn2 RXn2 RXn2 CN6-16RXn3ON RXn3ONOFF ON(RYn0) (EMG) (RY(n1)ARY(n3)A) (LSP)

Air Cylinder Series CM2

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

C85

B 24 A Hs 18.6 B 16 A 29 D-H7 D-H7W D-H7BAL D-H7NF Hs 8.5 1 7 23.5 A B D-A79W 14 Hs A 38.2 B 16 D-H7C Hs D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F 23 A B 1 8.5 Hs 11 13.3 13.3 10 A B 26 Auto Switch Mounting Position (mm) D-J79C 17 D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C D-F7BAL D-F79F/A72 D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A79W Hs Bore

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

High Vacuum Angle Valve

D-G

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

mounting reference n1 Stroke Model plane should be used as standards when mounting onto equipment.

7.5

L1 = M x 12.5 + 23 L2 = L1 10.5 L4 = (L1 L3)/2 15.6 30.6 3/5 3/5 2 2 2 2 2 1 1 4 4 4 4 4 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" D D D D D One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" n1: Piece of the SJ2000 n2: Piece of the SJ3000 U side D side

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

0.4

(D-sub connector) y u @0 i o !

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Table of Contents

C D E F Dimensions Part no.

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

CM2

/B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-C7/C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C D-B59W D-A3A D-G39A D-K39A D-A44A D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A3A D-G39A D-K39A D-A44A D-G5NTL

SZ3000

G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is

SZ3000

G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Purchasing order is available in units of 10 pieces. d D A Part no.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings for 1/4" M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw U side n Manual override 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations 6.5 D side 2.3 2-M5 x 0.8 External pilot port 21.6 (Only external pilot port type(R)) 34.5 53 5.5 (Lead wire length) 39.5 7.8 (N1, N3, N7) 300

Valve Single Unit

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

Valve Single Unit

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

G D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ G D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V Transmission line Transmission line Black White Brown Blue Crimped connector SL-J1A Main transmission line Transmission line 24V 0V Power supply{ 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power supply{ Special