Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

With light/surge voltage suppressor 0.47 4/25/3 (A/BEA/EB) L plug connector } P.515 + For AC 10-SYJ7000 2 position Single Double 2.4 4/25/3 (A/BEA/EB) M plug connector } 50 60 / AC 100V Hz AC 110V Hz AC 200V Hz AC 220V Hz 50 60 / + 50 60 / P.537 50 60 / Non-locking push type 10-SYJ3000 3 position Closed center Exhaust center Pressure center 0.46 4/25/3 (A/BEA/EB) } Push-turn locking

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { } Exhaust center 50 60 Note) For AC Pressure center With light/surge voltage suppressor Push-turn locking slotted type P. 283 DIN terminal 10-SYJ5000 0.83 4/2 5/3 (A/B EA/EB) Push-turn locking lever type { } (10-SYJ5000, 7000 only) P. 311 10-SYJ7000 M8 connector 2.9 4/2 5/3 (A/B EA/EB) { } P. 342 Note) All AC voltage

SYJ3000/5000/7000

) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com P . 1-5-4 + SYJ5000 Body Ported Base Mounted 0.47 4/2 5/3 (A/B EA/EB) With light/surge voltage suppressor L plug connector { } P . 1-5-26 + SYJ7000 2 position Single 2.4 4/2 5/3 (A/B EA/EB) Double { } M plug

REA/REB

B FB EB H 4-counterbore depth C 4-J depth JK HI S + Stroke HO TT T HP HG MM thread depth M PA H 2-P Hollow shaft for piping HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A N N (mm) HP HO HI HG HB HA H GP G FB FA EB EA d D C B Model A REAL15 REAL20 REAL25 REAL32 REAL40 39 38 14 16 4 6.5 40 65 6.5 6 3 13 6 12 16.6 5 9.5

ZQ-OM01401

ZQ1UA-5L-Q1 K2 Q2 K2 EA EB FA FB EC EE FC FE EA EB FA FB ZQ000UA-5L-PD ZZQ1A-BSB *ZQ3MA-K15L-*ZQ3MA-K25L-K*ZQ3MA-J15L-FVA VB ZQ1UAJ1 5LF ZQ1UAK1 5LZQ1UAK1 5LQ1 K2 Q2 K2 EC EE FC FE EA EB FA FB EA EB FA FB ZQ000UAK1 5LZQ000UAJ1 5LF EC EE FC FE EA EB FA FB *ZQ3MAK1 5L*ZQ3MAK2 5LK*ZQ3MAJ1 5LF 35 - No.ZQ-OM01401-B PD ZZQ1A-BSC *ZQ3MA-K15L---S *ZQ3MA-K25L-K--S PD ZZQ1AROB *ZQ000MA-K15L

Electric Actuator/Slider Type

Support Block Model LEYG S 025 Size 025 For size 25 032 For size 32 Support block Support block Body mounting bolt EB X 2 x OA thread depth OB 2 x G through ST (0.5) GA WC + Stroke Caution Do not install the body using only a support block. The support block should be used only for support.

Bag Filter

FGF3-40 1 unit FN EB ES Step 3 Selecting the filter model Selecting the filter model Checking each item Select vessel and seal materials based on compatibility with the fluid.

VSA4

, , 1 8 1 4 3 8 , 3 8 1 2 EA, EB 3 8 1 2 3 8 1 2 1 4 3 8 VSA420 VSA430 Common EXH Common EXH standard standard Piping specifications/Side ported is only available.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

port Number of stations D U Bottom Top 1 1 station 10 10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom 3/8 Bottom 1/2 Option Nil TBU SU W None With terminal box With SI unit Splash proof 3-11-18

VQ7-6/7-8

VS4 VQ7 Throttle valve spacer AXT510-32A Double check spacer VV72-FPG EVS VFN Throttle valve spacer (AXT510-32A) Double check spacer VV72-FPG SMC SMC 222.5(192) 205 243(212.5) 225.5 210.5(180) 193 231(200.5) 213.5 RIEA 140(109.5) 122.5 S L O W 119.5(89) 102 PA 80.5(50) 63 B PE PE PA 80.5(50) 63 B P PE PE P R1 R2 R1 R2 EA EB EB EA A A Dimensions inside ( ) are for sub-plate aperture Rc 3/8

5 Port Solenoid Valve, Series VQC

2 2-position double (rubber) 5 24VDC A B P EA EB 3-position closed center Function A B 3 Nil R Y Standard type (1W) External pilot Low wattage type (0.5W) EAPEB 3-position exhaust center A B 4 P EA EB Note) When specifying more than one option, enter symbols in alphabetical order. 3-position pressure center A B 5 EB P EA 3-position perfect A B Seal type 6 0 1 Metal seal Rubber seal EB P

17

Technical Data 47 6 1193 MY1B Series Stroke Adjustment Units With adjustment bolt MY1B AZ Stroke Bore size E EA EB W TT h Stroke adjustment unit FC EC EY (mm) FC Applicable cylinder E EA EB EC EY h TT MY1B25 MY1B32 MY1B40 W 60 5 (Max. 16.5) 3.5 13 53.5 6.5 49 10 20 8 (Max. 20) 4.5 17 67 8.5 61 12 25 74 9 (Max. 25) 4.5 17 81.5 9.5 76 15 31 94 With high load shock absorber + adjustment bolt

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x

Secondary Batteries

length (mm) 300 500 1000 2000 5000 Symbol W1 W2 W3 W4 W7 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

CY1

Nickel plated Chrome molybdenum steel Hexagon socket head screw 21 Aluminum alloy Switch mounting rail 22 Note) Brass for 6, 10, 15 28 Series CY1S Magnetic Rodless Cylinder Slider Type/Slide Bearing Dimensions Slider type/Slide bearing CY1S6, 10 (mm) FB FA d EA EB G GP H HB HG HP A HS HT HA D B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

) P. 1 + SYJ5000 Body ported Base mounted 0.47 4/2 5/3 (A/B EA/EB) With light/ surge voltage suppressor L plug connector { } P. 23 + SYJ7000 2 Position Single 2.4 4/2 5/3 (A/B EA/EB) Double { } M plug connector + For AC P. 47 Non-locking push type SYJ3000 3 Position 100 VAC / Hz 110 VAC / Hz 200 VAC / Hz 220 VAC / Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { }

VFRA3000

: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03 3 position pressure center 1.2 1 8 VFRA4511-04 1 2 67 (3.7) [PA, B: 30.6 (1.7)] ( ): in case of normal position.

Direct Solenoid

Normally this manilold arangeme is usd for Single prossurQ four way vaMs circuilry where pres$re is applied to the (P) common gallery and exhausts through th dual (EA & EB) common galleris.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer