OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

7ND9071en

T6 T5 T4 ND91_X_ -40 to +50 C -40 to +65 C -40 to +80 C ND91_X/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_X/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_X/I45 -25 to +50 C -25 to +64 C -25 to +80 C Number of switches: 2 Protection class of housing: IP66 (DIN 40050, IEC 60529) Conduit entry: M20 x 1.5 (ND9100U and ND9200E2, ND9300E2: 1/2 NPT) Table 12 Ambient temperatures, ND9_X Variant

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40 0 0 2 4 6 8 10 12 14 60 50 40 30 20 10 0 0 2 4 6 8 10 12 14 750 kPa 350 kPa 150 kPa 350 kPa 150 kPa 350 kPa Flow [L/min] Flow [L/min] Flow [L/min] 150 kPa 750

SV

50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-

0.4

2 Gasket Seal Clamp screw Clip HNBR HNBR Carbon steel Stainless steel 12 12 12 12 Pilot valve assembly V112 A Function Coil voltage Note) A set of parts containing 12 pcs. each is enclosed. 1 2 3 4 5 6 Symbol Specifications DC AC 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC (0.4 W) Note 1) Nil Standard (0.95 W) High-speed response type B (0.95

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

35 39 43 3.2 6 8 10 12 Color: White EXH port silencer Silencer is installed in the EXH port. 63 38 22 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 1.12-52 VQZ1000/2000/3000 Base Mounted Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPG Check Valve Operational PrinciplesL l ll Using a 3 position exhaust

REC

H2 I K LD LH LS LX LZ MM N NA Bore size Stroke range 20 M8 X 1.25 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 150 to 700 M10 X 1.25 25 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 150 to 1000 M14 X 1.5 40 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

0.4

) 13 Indicator light A B A B A B A B A B A A 93.5 116 42 (35) 66 75 80 (54) 36 (40) (5.5) 2 11 2 x M5 mounting hole 4 x M4 mounting hole 8 7 6 5 4 3 2 1 n D side Stations U side 4 x G 1/2 Conduit port 90.7 2.6 C8: 8 One-touch fitting 2 x C8: [3(R) EXH port] DIN rail clamp screw R R 62.5 X 3 X 3 55.5 7.7 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.7 9.5 (12) 33.5 (7.5) C8: 8

Vacuum Pad: Ball Joint Type

flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke (mm) B A C D F H I J Y Model ZPT40F10-01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30 +20 +15.5 +40 50 +25 +60.5 716 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry: With Buffer ZPT

JXCx-OMT0061CN

) 70 L 4 Address F8 H H= L= 44 - (1) [IN]() PLC RWr RWr bit 0 10.1.2 (1)[ ](P.40) Address 5 F0 L (0) 10.1.2 (1)[ ](P.40) 6 F0 H DATA(H) 00h*3 10.1.2 (1)[ ](P.40) 70 1 7 DATA(L) F8 2 70 3 10.1.2 (1)[ ](P.40) F8 4 8 9.5.1 (P.30)RWw1 Sub Function 80h OR() 9 F0 Sub Function *3 10 F0 Address 9.5.1 (P.30)00h*3 11 F0 Address (0) 0 12 F0 DATA(H) *3 13 F0 DATA(L) 00h *3 14 F0 15

HRX-OM-Q026

/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity