Air Slide Table Series MXP

3 o r !4 u Component Parts Component Parts Note No. Description Note No.

Card Motor

Amount of Overhang: Ln [mm], Correction Value for the Distances to the Moment Center: An [mm] Correction Value for the Distances to the Moment Center: An [mm] Fig. 1 Table 1 Mp: Pitching Mounting orientation My: Yawing Mr: Rolling Model A1 A2 22.5 L2 A2 LAT3m-10 LAT3m-20 LAT3m-30 2.2 L1 A1 32.5 2.2 42.5 2.2 Mr L1 A1 Horizontal W Mp My L3 W W Mr W L2 A2 L3 Vertical Mp My W W Allowable Load

ZSE F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and

Air Slide Table/Long Stroke Type Series MXY

MXY6 MXY8 MXY12 Model A1 0.6 A2 A3 1 MXY6 MXY8 MXY12 2 580 16 15 MXY6 MXY8 MXY12 14 980 20 19 15.5 The above value represents the maximum value for each allowable load mass.

CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

Air Slide Table Series MXS

2) Option R is not available with the MXS6 series.

Rotary Table/

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

LEC-OM069xx

For details, refer to 6.13 P r o d u c t I n f o r m a t i o n Display. (2) Related Parameter Set the following parameter to use backlash compensation. Backlash Compensation Direction Set the direction in which to apply backlash compensation. Parameter Function When Enabled Classification n. 0 [Factory setting] Compensates with a reference in the forward direction.

LEC-OM071xx

For details, refer to 6.13 P r o d u c t I n f o r m a t i o n Display. (2) Related Parameter Set the following parameter to use backlash compensation. Backlash Compensation Direction Set the direction in which to apply backlash compensation. Parameter Function When Enabled Classification n. 0 [Factory setting] Compensates with a reference in the forward direction.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

Rotary Cylinder Series MRQ Size: 32, 40 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F1 = x A1 x P (1) F2 = x A2 x P (2) A1 = D2 (3) 4 A2 = (D2 d2) (4) 4 F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area

LEF-OM007xx

Apllicable controller Applicable controller Applicable controller TYPE TYPE size size Without controller Nil Without controller Nil Left side Nil Left side Nil 25 100 AC servo motor (Inclemental encoder 25 100 AC servo motor (Inclemental encoder S2 S2 100 to 120VAC LECSA1 A1 100 to 120VAC LECSA1 A1 Right side R Right side R A1,A2 A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC

V

D E R (N)VM400 A C T U AT O R O N LY P A R T N O.

1

Compact cylinder -XC6B Single acting (Spring return/extend) Double acting, Double rod Double acting, Single rod r, !0, !5, !8, !9, @0, @1, @9, #3 63, 80, 100 @9 is rod side only. -X CQ2W r, !1, @0 20, 25, 32, 40, 50 Axial piping type (Centralized piping type) 7 CQ2 -XC6C CQP2 r, !0, !

Basic type / Direct mount type Series CY3B/CY3R

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

•

NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

KB

D L2 L1 A2 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 13.6 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 18 38.0 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT) 3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT) 1 2 17 17.6 15.5 19 19 25.2 22 18.0 51.5 22 61.5 57.5 19.5 36.0 24 27.0 24 Reference dimensions after R