CG5-S

t l m L H1 B1 Metric (mm) (mm) Part no.

LECA6_C

RLS BK RLS 19 - 5.4 1 (3m) CN4 CN1 EMG C24V M24V 24V 0V 0V 20 - 2 DC24V EMG () DC24V 0V Ry Ry U (1 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (2 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (3 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V OFF 21 - (3) () DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) RG+ RG0V M 24V C 24V EMG BK RLS Ry 24V 0V (2 ) RG+ RG0V M 24V C 24V EMG

Servo Motor Controller (24 VDC)

(Circuit example) * The figure below shows the stopped state. 0V 24VDC Reset switch for stop Ry stop switch Ry Surge suppressor Power supply plug (the 1st controller) 24V 0V 0V M 24V C 24V EMG BK RLS RG+ RGRy Controller power supply Power supply plug (the 2nd controller) 0V M 24V C 24V EMG BK RLS RG+ RGRy Controller power supply 24V 0V Power supply plug (the 3rd controller) RGRG+ 0V M 24V

Pin Cylinders Series CJP2/CJP

t L d m t D d9 D d9 l l Part no.

F/ISE

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(Circuit example: The figure below shows the stopped state.) 24 VDC 0V Reset switch for stop Ry stop switch Surge suppressor Ry U Power supply plug (the 1st controller) LK RLS (6) Ry (3) EMG (2) M 24V Controller power supply (1) C 24V 0V (4) 24VDC 0V Power supply plug (the 2nd controller) LK RLS (6) Ry (3) EMG (2) M 24V Controller power supply (1) C 24V 0V (4) 24VDC 0V Power supply plug (

PSE540/560

Do not drop, bump, or apply excessive impact (PSE540: 980 m/s2, PSE560: 500 m/s2) while handling. Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to malfunction. 2. The tensile strength of the cord is 50 N. Applying a greater pulling force to it can cause malfunction.

LECP6_C

, 1 (3m) CN4 CN1 EMG C24V M24V 24V 0V 0V 20 - 2 DC24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG Ry C 24V 24V 0V 0V M 24V (2 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V (3 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V OFF 21 - 3() DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (2 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (3 ) BK RLS EMG C 24V Ry 24V

Step Motor Controller (Servo / 24 VDC)

NPN type PNP type I/O signal power I/O signal power A1 COM CN5 24 VDC A1 COM CN5 24 VDC A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 B2 OUT1 Load B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 Load B4 OUT3 B5 OUT4

LEF-OM007xx

200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length With lock B With lock B Without cable Without cable Nil Nil Ball screw lead Stroke 2m 2 2m 2 Size Size 100mm 100 100mm 100 5m 5 5m 5 40 32 25 40 32 25 10m 10m A A 1000 1000mm 1000mm 1000 12mm 12mm 16mm 16mm 20mm 20mm A A The length of motor, encoder and lock cables are same.

PSxx-OMG0005CN

IP65 -1060 -2070 () 3585RH() AC250 V1 50 M(DC50 V) 2F.S.(050 25)3F.S.(-1060 25) CEUL/CSARoHS 01 02 C01 N01 N02 A2 B2 R1/8 M50.8 Rc1/8 NPT1/8 R1/4 NPT1/4 M50.8 URJ1/4 TSJ1/4 M50.8 M50.8 C3604SUS316L PSE563 5.1 3 m 2 0.2 mm 1.12 mm PSE56--28: 2 5.1 3 m 2 0.2 mm 1.12 mm 193 g 200 g 194 g 201 g 187 g 203 g 193 g 101 g 108 g 102 g 109 g 95 g 111 g 101 g -12No.PS-OMG0005CN-E [mA]

IZx-OMV0005

Do not receive a moment force on the nozzle (Page 6). 9 Doc. no.IZ-OMV0005 1-2.Accessories Power supply cable IZN10E CP Z Symbol Type Nil 3m Z 10m Made-to-Order power supply cable Available from 1 to 20 m in 1 m increment (use standard for 3 m and 10 m).

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

M If using the JXCm1m-BC, please use the latest version of the JXC-BCW (parameter writing tool). M There are currently 3 versions available: version 1 products (V1.m or S1.m), version 2 products (V2.m or S2.m), and version 3 products (V3.m or S3.m).

Basic type / Direct mount type Series CY3B/CY3R

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236

Electric Slide Tables

DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes Input 200 bytes Output 200

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m For the applicable auto switch model, refer to the table below. Applicabie Auto Switch/Refer to page 11-1-1 for further information on auto switches.

Table of Contents

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m For the applicable auto switch model, refer to the table below. Applicabie Auto Switch/Refer to page 11-1-1 for further information on auto switches.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m For the applicable auto switch model, refer to the table below. Applicabie Auto Switch/Refer to page 11-1-1 for further information on auto switches.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 Component parts 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.