2–4

D-F9PW D-F9PWV D-F9BW D-F9BWV D-F9NW D-F9NWV Electrical entry direction Perpendicular In-line Perpendicular In-line Perpendicular In-line 2-wire Wiring type 3-wire Output type NPN PNP 24 VDC relay, PLC Applicable load IC circuit, Relay IC, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less Caution

V

Base Mounted Without Subplate M3 With Subplate V O LTA G E 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 115 VAC 50/60 Hz 2 200 VAC 50/60 Hz 4 220 VAC 50/60 Hz 230 VAC 50/60 Hz E L E C T R I C A L E N T R Y M A N U A L O V E R R I D E G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LN L Type Plug without

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

6 12 VDC 1 100 VAC 2 200 VAC V 6 VDC 3 110 VAC [115 VAC] CEcompliant DC AC S 5 VDC R 3 VDC 4 220 VAC [230 VAC] LN, MN type: With 2 sockets.

7

3/8 Stainless steel E 230 VAC B N.O. 1/2 F 24 VDC L M 5 20A C37 N.C.

Series PF2W Digital Flow Switch For Water

(Fixed SI unit [L/min, or L, m3 or m3 x 103] will be set for switch types without an unit switching function.)

VFS

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

VFR

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

PSE540/560

) 100 or less (at 12 VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main circuit (Analog output) 1 k Black OUT 12 to 24 VDC + 12 to 24 VDC + Load Blue LINE() Blue DC() Load Install the load either on the LINE (+) or LINE () side.

Slider Type Ball Screw Drive/11-LEFS Series

) Servo motor (24 VDC) Step motor (Servo/24 VDC) Max. number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 560 Page 560 Page 600 Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50

Digital Flow Switches Series PF2A

OUT2 41.8 40.3 NC 8 Load 4 Sensor 40 4.3 OUT1 Black Main circuit Main circuit 7 3 Load Brown 6 2 Blue + SMC FLOW SWITCH 5 1 12 to 24 VDC Series PF2A5 35.8 A 40 UNIT PF2A30-A RESET SET OUT2 NC 8 Load 4 Sensor OUT1 Panel fitting dimensions Black 3 x 7.2 (=21.6) 7 3 Load 8-M3 36 +0.5 0 6.4 Brown 6 2 + Blue 5 1 12 to 24 VDC 1 2 3 4 Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white

Nozzle Type Ionizer

Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

How to Order Relay output module SV 000 60 A 5 1A Light window No. of output points Series A B 1 output 2 outputs 1 2 3 4 10-SV1000 10-SV2000 10-SV3000 10-SV4000 Rated voltage 5 6 24 VDC 12 VDC Note that serial wiring manifolds (EX500, EX250 and EX120) are available with 24 VDC only.

Ionizer Nozzle type IZN10 Series IZS

Metal ( shaded) part Metal ( shaded) part Tap for ground wiring Resin part ( shaded) 454 Ionizer IZN10 Series Power Supply Cable Connection Circuit NPN PNP Ionizer Ionizer IZS Brown +24 VDC Brown +24 VDC +24 V +24 V Power supply 24 VDC 10% 0 V +24 V Power supply 24 VDC 10% 0 V +24 V Blue 0 V Blue 0 V IZN IZN INPUT PLC OUTPUT OUTPUT PLC INPUT IZF Orange Discharge stop signal Orange Discharge

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60

CV/MVGQ

DC specifications 5 6 V S R Magnet installed even without auto switch Symbol A B 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Auto switch mounting Rail mounting style Band mounting style Example Rail mounting style Band mounting style CDVJ5B15-60-A CDVJ5B10-45-B For the applicable auto switch model, refer to the table below.

CV/MVGQ

DC specifications 5 6 V S R Magnet installed even without auto switch Symbol A B 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Auto switch mounting Rail mounting style Band mounting style Example Rail mounting style Band mounting style CDVJ5B15-60-A CDVJ5B10-45-B For the applicable auto switch model, refer to the table below.

Support Guide/11-LEFG Series

Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF

3 Port Solenoid Valve Series VQ100 1

12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

Table of Contents

Voltage AC and 100 VDC 24 VDC or less Terminal no. 1 + () With indicator light With indicator light Terminal no. 1 (+) F.R.L.

ITV

10%, 12 to 15 VDC Voltage Power supply Current consumption Power supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less Voltage type 0 to 5 VDC, 0 to 10 VDC Input signal Current type 4 to 20 mADC, 0 to 20 mADC Approximately 10 k Voltage type Input impedance Approximately 250 Current type 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: