Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Smooth Cylinder

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) IN 841 1402 1962 63 OUT 935 1559 2182 IN 1361 2268 3175 80 OUT 1508 2513 3519 IN 2144 3574 5003 100 OUT 2356 3927 5498 Intermediate Strokes Installation of spacer on standard stroke body. Method Model no. Refer to page 4 for standard model no.

Hydraulic Filters

150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120

AC Servo Motor Driver (CC-Link Type ）

Igm: Leakage current of the servo motor (Found from Table 13.4.) 120 120 100 100 Leakage current Leakage current 80 80 60 60 40 40 [mA] [mA] 20 20 0 2 0 14 100 5.5 38 2 3.5 8 1422 38 80 150 5.5 30 60 100 3.5 8 22 60 150 30 80 Cable size[mm2] Cable size[mm2] a. 200V class b. 400V class Fig. 13.4 Leakage current example (lg1, lg2) for CV cable run in metal conduit 13 26 13.

Series AP500

psig (1.0 MPa) 100 0.69 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 40 0.28 20 0.14 0 0.00 0 50 100 150 200 250 300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Table of Contents

124 AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B S V T SV TV L3 57 74 74 95 102 Attachment Model L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 61 76 76 99 104 AC20C AC25C AC30C AC40C AC40C-06

0.4

112.5 375 375 362.5 350 337.5 325 312.5 300 300 287.5 275 262.5 250 237.5 237.5 225 212.5 200 187.5 175 175 162.5 150 137.5 VFR 385.5 385.5 373 360.5 348 335.5 323 310.5 310.5 298 285.5 273 260.5 248 248 235.5 223 210.5 198 185.5 185.5 173 160.5 148 VV5QC21 VQ7 (L4) (L3) (5.25) L2 L1 34.5 P = 16 38.5 1 1 47 In case of branch type 10.5 5.5 105.5 80 (35) (5.5) 74 Indicator light (12) 13

Metal Seal/Rubber Seal Series VQ Body Ported

170 225 235.5 10 139.5 159.5 225 232.5 9 129 149 212.5 223 8 118.5 138.5 200 210.5 7 108 128 187.5 198 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 160.5 3 66 86 150 160.5 2 55.5 75.5 137.5 148 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-FS] n L 1 137.5 148 2 150 160.5 3 162.5 173 4 175 185.5 5 187.5 198 6 200 210.5 7 200 210.5 8 212.5 223 9 225 235.5

17

100 100 80 80 80 100 80 22 (10) 22 (10) 80 11 (5) 10 20 29 30 51 50 300 200 100 11 (5) 10 20 29 30 51 50 300 200 100 Stroke (mm) Stroke (mm) 13 Model Selection Series MGP L L m m Ball Bushing Horizontal Mounting (19) L = 50 mm, V = 400 mm/s (20) L =100 mm, V = 400 mm/s MGPL12 to 25, MGPA12 to 25 MGPL12 to 25, MGPA12 to 25 11 (5) 11 (5) 25 25 25 25 25 25 Load mass m lbs (kg) Load mass m lbs

CJ2

Bore Bore B C d H 10 16 NTJ-015A 10 16 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A Dimensions by stroke (mm) Symbol S Z ZZ Stroke Bore 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92

Environment

200 40 70 80 Vertical Note 9) 19 38 72 115 19 38 72 Force [N]/Set value Note 3) : 15 to 50% Note 4) 156 to 521 304 to 1012 573 to 1910 1003 to 3343 156 to 521 304 to 1012 573 to 1910 LEF Up to 500 1000 500 250 1000 500 250 505 to 600 800 400 200 800 400 200 605 to 700 600 300 150 600 300 150 705 to 800 500 250 125 500 250 125 Pushing speed [mm/s] Note 6) 30 or less Max. acceleration/deceleration

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Data 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Bore size (mm) 25 20 32 40 Intermediate strokes and strokes shorter than 75mm are also available.

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Valves to drive cylinders of sizes 6 to 200 Pressure: 0.5MPa, Load factor: 50% Cylinder bore size mm Series CJ2 Series CM2 Series MB/CA1 6 10 16 20 25 32 40 40 50 63 80 100 Series CS1 Cylinder speed mm/s Base mounted (sub-plate) Nl/min 125 140 160 180 200 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 294.5 SY3000 687 SY5000 1177.8 SY7000 150 300 450 600 750 SY9000 2748.2 The