LJ1H

Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 60 61 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Free Mount Cylinder

65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog. 1011-CDU Clean Series Compliant with clean environment Specifications 10-CDU (Relief type) 11-CDU

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

Table of Contents

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 16-2-30 7 Series ZSE50F/ISE50 High Precision, Digital Pressure Switch for General Fluids Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog

CQM

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR 50-01-A18 75-01-A18 289 147 ZCUK 75-01-A18 ZPT100HBNJ25-01-A22 535 168 40 50 63 80 100 125 1 0 ZPT50HBNJ25-01-A18 50-01-A22 575 143 AMJ 2 0 50-01-A18 75-01-A22 620 163 3 0 75-01-A18 100-01-A22 659 201 AMV 6 0 ZPT63HBNJ25-01-A18 ZPT125HBNJ25-01-A22 719 208 12 1 50-01-A18 50-01-A22 228 759 AEP 22 3 75-01-A18 75-01-A22 249 804 ZPT80HBNJ25-01-A18

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9 10 19 500 300 300 30 134 3.2 171 500 300 52 45 143 39 18 177 188 11 53 53 77 154 154 7 10 47.3 11 10 44.5 143.5 82

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

75 6.8 25 102 3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 500 300 300 500 300 10 15 30 54 4 55

Compact Cylinder/Guide Rod Type Series CQM

25 30 35 40 45 50 75 -100 CQMB6310 15 20 25 30 35 40 45 50 75 -100 CQMB8010 15 20 25 30 35 40 45 50 75 -100 CQMB10010 15 20 25 30 35 40 45 50 75 -100 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 M8 x 50L x 55L x 60L x

CS1

Stroke to 1400 106 106 120 204 322 206 40 141 301 75 25 50 322 301 0.2 Stroke to 1500 111 135 115 228 354 235 153 45 85 30 336 60 358 340 Lube Non-lube 0.2 Stroke to 998 111 120 135 257 354 240 153 90 45 60 30 336 363 345 Lube Non-lube 0.2 Stroke Other dimensions are the same as standard style.

4/5 Port Solenoid Valve

Hz 25 2500 mm 2 200 VAC 50/60 Hz 30 3000 mm 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 50 5000 mm 3 M plug connector 220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 M8 connector For type W, DC voltage is only available.

Secondary Batteries

mounting style Mounting style B L F D Basic style Cylinder standard stroke (mm) Axial foot style 10 16 15, 30, 45, 60, 75, 100, 125, 150 Rod side flange style 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Double clevis style (Except 6) *Manufacture of intermediate strokes at 1 mm intervals is possible.

Air Slide Table Series MXQ

MXQ8-10 MXQ8-20 MXQ8-10 MXQ8-20 MXQ8-30 0.03 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXQ8-50 MXQ8-40 MXQ8-50 MXQ8-40 MXQ8-20 0.010 MXQ8-30 MXQ8-40 MXQ8-75 MXQ8-75 0.02 MXQ8-75 0.04 MXQ8-20 MXQ8-40 MXQ8-10 0.005 MXQ8-30 MXQ8-50 0.01 MXQ8-50 0.02 MXQ8-10 0 0 40 80 120 0 20 40 60 20 40 60 Load (N) Load (N) Load (N) 12 12 12 Lr=90 mm

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

60 44 18 25 14 17.5 9.5 18 9 47 160 8 44 77 10 20 M14 x 1.5 30 22 50 9 19 50 25 73 73 53 20 28 17 17 13 M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19

CNA

Bore (mm) 40 50 63 80 100 TL TD TA TU TC TX TE TO TR TT TS TH TF TY W1 Z Part No. +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 15 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 CA1-S06 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 120 90 15 188 162 214 26 13.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Power consumption (W) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

Guide Cylinder/Compact Type Series MGC

Cutout window AM MGQ View A-A MGG Mounting dimensions MGC (mm) Bore size (mm) Stroke range (mm) MGF A AA AB AG AH AI AJ AK AL AM AN AO AP B I J K M N L 20 25 32 40 50 80 84 75 90 6.6 9 60 75, 100, 125, 150, 200 12 13 105 120 55 110 M6 22 106 25 44 38 25 MGZ 95 89 16 13 120 136 84 100 9 9 65 125 M8 27 120 30 52 70 46 32 105 94 16 13 134 150 92 108 9 9 75 140 M8 32 135 35 60 80 50 32 75, 100