CQ2

Bore size 12, 16 Bore size Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 50, 75, 100 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Auto Switch Mounting Bracket Part No.

Table of Contents

30 30 40 40 50 50 Gripping point L (mm) Gripping point L (mm) Misc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Model C D 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 Model C D 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 Mounting bolt Mounting bolt Mounting

Smooth Cylinder/Low Speed Cylinder

Bolt for CQSYB without Auto Switch Cylinder model C Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

ZP

25 27 29 30 25 27 30 31 26 10 ZPT 20 25 29 31 33 27 30 32 33 28 31 34 35 30 ZPT 32 40 50 ZPT ZPT 10 57 129 135 132 138 133 139 33 34 30 129 131 134 134 143 129 133 34 140 147 153 160 144 151 141 147 36 38 141 148 39 145 152 Weight by Stroke (g) 15 20 25 30 40 50 Stroke (mm) Model 10 ZPT2004 3507 4010 ZPT02 to 08 thin section series 10 to 16 +6 +7 +8 ZPT10 to 25 ZPT40 to 50 +11 +38 +13 +

5

30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56

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Dimensions CP95 Cushion Rubber bumper (Standard equipment) NCM Stroke NCA Model, Bore size (mm) Applicable stroke 12, 16 5, 10, 15, 20, 25, 30 DCQS 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 -X 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CQ2 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20Data 6-17-37 32 Made to Order Common Specifications: Special Port Location

CATALOG VC10

50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model ELW53 3 Way Normally Closed Piped

TABLE OF CONTENTS

50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model ELW53 3 Way Normally Closed Piped

Air Cylinder Series MB

L RR U Z ZZ 32 40 50 63 80 100 125 32 40 50, 63 80, 100 125 to 500 to 500 to 600 to 600 to 800 to 800 to 1000 23 23 30 30 42 42 50 10.5 11 15 15 23 23 28 13 13 17 17 26 26 30 28 28 40 40 60 60 64 154 158 182 182 228 228 267 164.5 169 197 197 251 251 295 10 10 14 14 22 22 25 14 14 20 20 30 30 32 160 164 190 238 279 170.5 175 205 261 307 Double clevis Model without air cushion is designed

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

ZP

) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Electric Actuator/Slider Type

LEY25 (Top/Parallel)/LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Pushing force lbf [N] Note 3) (Set value: 45 to 90%)

Made to Order

Dust resistant actuator Bore size (mm) Standard stroke Minimum operating pressure 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 0.1 MPa 50 to 100 0.1 MPa MGPM Bore size Stroke XC92 Auto switch Suffix Dust resistant actuator Suffix Standard stroke 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 25, 50, 75, 100, 125

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 D 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 Model C Model C Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 Mounting bolt Mounting bolt Mounting

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

High Vacuum Angle Valve

-1 XLG63-30-1H-1 XLGV63-30-1 50 XLA50-30-1 XLA50A-30-1 XLA50-30-1H XLA50A-30-1H XLAV50-30-1 XLAV50A-30-1 XLC50-30-1-1 XLC50-30-1H-1 XLCV50-30-1-1 XLF50-30-1 XLF50A-30-1 XLF50-30-1H XLF50A-30-1H XLFV50-30-1 XLFV50A-30-1 XLD50-30-1 XLD50-30-1H XLDV50-30-1 XLG50-30-1-1 XLG50-30-1H-1 XLGV50-30-1 XLH50-30-1 40 XLA40-30-1 XLA40A-30-1 XLA40-30-1H XLA40A-30-1H XLAV40-30-1 XLAV40A-30-1 XLC40-30-1

Table of Contents

65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

Battery-less

50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 1 1.14 1.37 1.66 1.83 1.7 1.89 2.21 2.63 2.97 3.31 3.57 2.95 3.21 3.76 4.32 4.99 5.48 5.92 Series LEYG16LmE LEYG25LmE LEYG32LmE Stroke [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 1.01 1.14 1.31 1.6 1.75 1.71 1.92 2.16 2.59 2.85 3.17 3.41 2.95 3.22 3.61

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20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] 2000 LEPY LEPS 1000 800 1500 Horizontal L2 [mm] L2 [mm] LER L2 600 1000 Y m Me 400 LEH 500 200 LEY -X5 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 11LEFS 2000 1000 11LEJS 800 m Me 1500 L3 [mm] L3 [mm] 600 25AL3 1000 Z 400 500 LEC 200 0 0 LEC S 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work