Compact

load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 L6 200 200 200 200 L6 [mm] L6 [mm] L6 [mm] L6 [mm] m Z 100 100 100

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

275 51 75 112 250 64 12.5 25 37.5 50 100 103 250 225 86 200 241 175 216 30 150 191 341 125 166 316 30 100 141 291 56 75 128 266 68 12.5 25 37.5 50 116 103 250 225 91 200 241 175 216 32 150 191 341 125 166 316 32 100 141 291 56 75 128 266 76 12.5 25 37.5 50 116 130 200 180 119 160 140 220 40 120 200 320 100 180 300 40 80 160 280 75 60 150 260 82 10 20 30 40 140 240 60 ISO Standards Air

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

voltage Q CE-compliant Nil Symbol Rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 1313 Series VFR6000 Use as a guide for selection.

Membrane Air Dryer

H L S 15 25 50 100 200 600 750 1000 40 Select from Series IDG60 Port size Size Symbol Port Thread type size 1 3 5 10 20 60 75 100 Symbol Type 01 02 03 04 $ $ 1/8 Nil Rc JIS Symbol $ $ $ $ $ 1/4 N F NPT $ $ $ 3/8 G $ $ $ 1/2 Option Symbol Contents Size 1 5 10 20 3 60 75 100 Bracket Assembly (Accessory) Part No. $ $ $ $ $ $ $ $ Nil None (Standard) P R S $ $ $ $ $ $ $ $ With fitting for

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

energy saving effect

VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability

HRS100/150

conductivity control set Bypass piping set Relief valve set Snow protection hood (Air-cooled only) Particle filter set Wired remote controller refrigeration HRS150 13.0/14.5 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) 3-phase 380 to 415 VAC (50 Hz/60 Hz) HRS100 Water-cooled 10.0/11.0 refrigeration HRS150 14.5/16.5 94 A Thermo-chiller Standard Type HRS100/150 Series Circulating

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

10

100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 120 130 140 150 170 190 210 230 250 270 290 310 Note) ZZ indicates dimensions for double side rod boot.

CM2

201 to 300 301 to 400 401 to 500 20 52 32 32 10 8 62 118 108 Data 20 17 36 30 68 81 93 106 131 156 181 25 60 40 40 10 9 62 122 112 25 17 36 32 72 85 97 110 135 160 185 32 60 40 40 10 9 64 124 114 32 17 36 32 72 85 97 110 135 160 185 40 77 53 53 11 10 88 154 143.5 40 19 46 41 77 90 102 115 140 165 190 With Rod Boot l ZZ Symbol Z Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200

Table of Contents

Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note

High Vacuum Angle Valve

plug connector M type plug connector 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz XLA U 5 24 VDC 6 12 VDC S type: Not available for AC.

Electric Grippers

Pushing force 100% Gripping force F [N] 120 Basic 70% 110 100 90 80 70 60 50 40 30 0 20 10 30 40 50 60 Pushing force/Trigger level [%] 80 Pushing force and trigger level range 40% 40 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 Pushing speed [mm/sec] Gripping force accuracy: 20% (F.S.) 250 Compact Pushing force 100% Gripping force F [N] 200 110 100 90 80 70 60 50 40 30 0 20 10 30 40

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Guide Cylinder Series MGG

(mm) Bore size (mm) 63 80 100 Stroke range (mm) B C D E F G H I J K L M N A AA AB AC AD AE AF AP 200 228 30 140 200 13.5 65 117 135 180 66 100 25 25 15 170 50 60 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 75, 100, 125 150, 200 250, 300 230 262 30 170 234 13.5 75 138 160 214 76 115 30 27 15 200 55 70 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 280 304 35 210 274 15 85 153 190

Basic type / Direct mount type Series CY3B/CY3R

Inclined Operation (At a right angle to operating direction) 25 32 40 Bore size (mm) 3.4 + Lo 105 60 4.2 + Lo 200 Allowable drive resisting force (FA) (kg) 5.1 + Lo 8.

MGP

-50 MGPA80-50 0.1 0.05 0 0 0 20 40 60 0 50 100 150 200 Horizontal load N Horizontal load N MGPA25 MGPA100 0.6 0.7 0.5 0.6 MGPA25-400 MGPA25-400 MGPA100-400 MGPA100-400 Plate displacement mm Plate displacement mm 0.5 0.4 MGPA100-300 MGPA100-250 MGPA100-200 MGPA100-150 MGPA100-300 MGPA100-250 MGPA100-200 MGPA100-150 MGPA25-300 MGPA25-300 0.4 0.3 MGPA25-200 MGPA25-200 MGPA25-150 0.3 MGPA25-150

CS1

20 46 35 18.5 17 48 115 74 50 60 226 182 63 111 39 Lube Non-lube to 1200 M24 X 1.5 41.5 M56 X 2 25 56 23 60 20 60 140 86 225 71 67 277 49 141 1 to 1200 M30 X 1.5 M64 X 2 51.5 65 30 23 20 60 96 270 70 140 330 80 76 146 49 With auto switch/125 to 200 only (mm) (mm) W/o rod boot W/ rod boot W/o rod boot W/ rod boot Bore (mm) Style Bore (mm) Stroke range (mm) S Style h H ZZ e f ZZ1 ZZ1 ZZ l

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

MB

102 114 75 100 125 152 177 202 150 227 50 139 56 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 50 139 61 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 125 10 75 27 30 120 130 140 20 40 60 80 100 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket Refer to Basic (B) for other dimensions and with rod boot.