ChemicalThermo-con

Signal cable 16.4 ft (5 m) Circulating fluid outlet 5.9 (150) 4.8 (122) 1.1 (29) 3.0 (75) 1.2 (30) 13.8 (350) 0.8 (20) DC cable 16.4 ft (5 m) Model no. label (Controller) Alarm output connector 5.5 (140) Terminal block Display panel 8.7 (222) 7.4 (187) SI AL OUT 7.0 (177) Purge inlet (M5) 3.0 (75) 8.5 (215) FG B B A FG + EXT.SENSOR REMOTE ON/OFF CHEMICAL Fluid leak sensor 3.1 (79) PURGE OUT

LG1H

) 95(140) 30 30 A A A A Stroke Stroke Stroke Stroke 700 550 700 560 100 100 800 650 800 660 200 60 200 50 900 750 900 760 300 160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

Basic type / Direct mount type Series CY3B/CY3R

, 200 300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate

Air Slide Table

125 MXQR20-150 MXQR20-40 MXQR20-100 MXQR20-125 MXQR20-150 0.06 MXQR20-50 MXQR20-150 MXQR20-100 0.08 MXQR20-125 MXQR20-30 0.04 MXQR20-20 MXQR20-100 0.04 MXQR20-20 MXQR20-10 0.04 0.02 MXQR20-10 0.02 0 0 0 100 200 300 100 200 300 400 500 600 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQR25-150 MXQR2550 MXQR2575 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR2510 MXQR2520 MXQR2530

DOC1023125

(Unit: %) H 140 80 80 Sets the position loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Position loop P constant A 140 110 110 1 to 200 B 100 80 80 C 110 80 80 H 80 140 140 Sets the speed loop P constant.

CNA

Standard Strokes/ MXW Bore size (mm) 40 50, 63 80, 100 Standard stroke (mm) MXP 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 MG 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 MGP Stopping Accuracy MGQ Unit: mm MGG Operating piston speed (mm/s) Style of locking MGC 100 300

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

N.O. 10-SYJ722M 10-SYJ714M 140(80) 1/8 Base mounted (With sub-plate) 10-SYJ724M 135(75) 136(76) 157(97) 10-SYJ714M 1/4 10-SYJ724M Note) Value for DC.

Table of Contents

1 1/2 Short 0.63 to 1.95 26 52 140 125 2 Middle 0.34 to 1.06 23 45 IF IF31-10 280 250 2 1/2 Middle 0.41 to 1.29 45 90 Data 250 220 3 Middle 0.26 to 0.81 40 80 550 480 4 Long 0.33 to 1.05 85 170 Long 1,000 870 5 0.37 to 1.24 150 300 Long 1,500 1,300 6 0.40 to 1.32 230 460 110 100 1 Short 1.00 to 3.05 18 36 160 140 1 1/4 Short 0.90 to 2.67 27 54 270 230 1 1/2 Short 1.10 to 3.29 45 90 270 230

e

(Wn) Mass (mn) Y-axis Yn Z-axis Zn X-axis Xn LXS LXS Z X Wa 5 mm 0 mm 0.88 kg 65 mm LC6m LC6m 111 Wb 42.5 mm 0 mm 4.35 kg 150 mm Y 210 Y Wc LZm LZm 42.5 mm 111 mm 0.795 kg 150 mm Wd 42.5 mm 210 mm 1.0 kg 150 mm LC3F2 LC3F2 n = a, b, c, d 3 Calculation of Composite Center of Gravity Xm Xm m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg D-m D-m E-MY E-MY 1 m3 X = x (mn x xn) 1 7.025 = (0.88

Dual Rod Cylinder Series CXSJ/CXS

CXSW20-175 CXSW20-200 120 178 60 10 130 198 70 20 44.5 44.5 Standard stroke Long stroke (-XB11) 140 30 218 80 2 x 2 x M5 x 0.8 thread depth 4.5 (Piping port) 150 238 40 90 (Opposite side: Same) 160 258 100 50 (Z) (30) 6 (30) 4 x M4 x 0.7 thread depth 6 2 x M6 x 1 thread depth 10 185 308 75 125 210 358 150 100 235 408 125 175 260 458 150 200 50 0.2 285 508 225 175 310 558 200 250 Only the

Air Slide Table Series MXQ

150 50 100 200 50 100 200 0 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 20 20 20 Lr = 160mm MXQ20-150 MXQ20-125 0.08 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-40 MXQ20-50 0.12 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 0.06 Table displacement mm Table displacement mm Table displacement mm 0.06 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-50 MXQ20

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

MXW Series Long Stroke Slide Table

150 150 Long Stroke Slide Table MXW Series Dimensions MXW 20 Stoke: 150, 175, 200, 225, 250 (mm) Operating port 2-Rc (PT) 1/8 Width across hexagon socket hole 4 J 20 Scale: 20% 10 Width across flats 13 8-M5 x 0.8 thread depth 13 (Helisert) 6H9 +0.03 depth 5.5 6H9 +0.03 depth 5.5 0 0 7 72 98 48 Y Y 25 160 40 40 40 L 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread depth 12 (N-1) x H G Bottom

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

or less 4.72 (4.55) VFR630 VFR631 0.15 9.3 0.17 9.3 39 39 3 4 42 [40] 0.12 [0.15] 9.6 [9.4] Exhaust center 4.72 (4.55) (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 VFR640 VFR641 1 0.14 8.9 38 3 4 150 or less 0.10 [0.44] 8.7 [5.7] 38 [20] Pressure center 9.3 150 or less 4.72 (4.55) VFR650 VFR651 3 4 Pressure center 1 0.16 40 (B) (A) 4 2 Model Type of actuation Effective area (mm2) Plug-in Non plug-in

Air Catch Sensor Series ISA

1 n 69.3 (Max. 78.4) 60 OUT OUT OUT OUT OUT OUT 19.5 4 11.6 Detection port Rc 1/8 Dimensions: With DIN rail 3 105 140 175 4 140 175 210 5 175 210 245 6 210 245 280 2 70 105 140 Station L1 L2 L3 819 Series ISA Operation guideline: Design data When you design the pneumatic circuit using the air catch sensor, please refer to the data below.

7ND9071en

Ensure the O-ring (140) slots inside the groove fully. Mount the prestage unit directly on the spool valve unit as in 6.1. 195 194 140 160 174 175 6.5.1 Removal NOTE: Ground yourself on the body of the device before touching the circuit board. Assembly direction of spool NOTE: Do not remove the Valve Controller Board (210)!

Electric Actuator/Slider Type

communication 50 100 150 SSCNET#/H and SSCNET#products are compatible.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Series IDG

600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88) 170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150