Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 12.5 12.7 12.8 12.9 13.0 14.5 14.7 14.8

Integrated Controller

200 300 400 500 600 700 800 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 EQFS32HB/Ball Screw Drive Horizontal/Lead 8 Vertical/Lead 8 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal

CXS

, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35 45 CXS15 55 45 100 105 110 120 130 135 140 150 160 70 75 80 85 90 95 16 Standard Type Dual-Rod Cylinder Series

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Cylinder with Lock

2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)*1 95 + 100 (n 2) (n = 2, 4, 6, 8)*1 100 + 100 (n 2) (n = 2, 4, 6, 8)*1 105 + 100 (n 2) (n = 2, 4, 6, 8)*1 110 + 100 (n 2) (n = 2, 4, 6, 8)*1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface) MWB-UT CP96N C96N Lock Unit Accessories

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

100 D-A3lC D-G39C D-K39C Different surfaces 20 + 35 (n 2) (n = 2, 3, 4, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) n Same surface 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 10

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

n = 2, 4, 6, 8 n (Same surface) 90 + 100 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 125 + 100 (n 2) n = 2, 4, 6, 8 1 70 75 80 85 90 2 (Different surfaces) 70 75 80 85 90 2 (Same surface) 70 75 80 85 90 D-A44 n (Different surfaces) 70 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2,

Basic type / Direct mount type Series CY3B/CY3R

, 200, 300 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500 15 750 1 axis 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600 20 1000 15 35 52 176 70 88 123 105 100, 200, 300, 400, 500, 600, 800 25 1200 CY3B CY3R 20 62 94 314 125 157 219 188 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 98 147 25 490 196 245 343 294 1500 32 CY1S 161 241 804 322 402 563 32 483 Note) Strokes

Modular Design with Uniform Body Style

50 70 11 20 8 60 80 AC60A-D 1 1/8 196.2 234.1 155 98.1 110 45 70 50 70 11 20 8 60 80 Model Optional specifications Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level gauge Square embedded type pressure gauge Round type pressure gauge (Semistandard: Z) Round type pressure gauge (with color zone) Round type pressure gauge With auto drain Digital pressure switch Model

Refrigerated Air Dryers Series IDF/IDU

Applicable dryer Mass (g) A B IDF-FL200 IDF-FL201 IDF-FL202 IDF-FL203 IDF-FL204 IDF-FL205 IDF-FL206 IDF-FL207 IDF-FL208 IDF-FL213 IDF-FL214 75 75 75 90 70 120 100 170 140 230 175 265 190 265 20 30 45 55 70 75 70 100 140 175 190 265 265 265 320 270 375 315 415 365 540 400 515 560 515 150 200 375 375 375 360 310 440 420 555 550 580 720 735 610 735 IDF1E, 2E IDF3E IDF4E IDF6E, IDU3E IDF8E, IDU4E

Rotary Table/

type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

CY1

CY1H25 (Nm) 64 56 50 40 30 20 50 40 30 20 Model CY1H10 CY1H15 CY1H20 M2 2.5 16 16 M3 1.5 10 13 Model CY1H25 CY1HT25 CY1HT32 M2 26 85 96 M3 28 56 64 M1 1.5 10 13 M1 28 56 64 28 16 26 CY1H20 CY1H15 13 10 10 Moment Nm Moment Nm 2 3 4 5 22.5 3 4 5 CY1H10 M3 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s Static moment

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

46 63.5 53 55 21 M36 x 1.5 Y-18 +0.1 0 +0.3 +0.1 0.1 0.3 50 40 100 8 70 125 M40 x 1.5 42.5 54 69.3 57 60 23 M40 x 1.5 CP95 Y-20 +0.1 0 +0.3 +0.1 0.1 0.3 8 70 125 M45 x 1.5 42.5 54 50 40 100 80.8 67 70 27 M45 x 1.5 Y-25 +0.1 0 +0.3 +0.1 0.1 0.3 9 86 160 M56 x 2 53 81 63 50 126 98.1 82 85 34 M56 x 2 NCM Y-30 +0.12 0 +0.3 +0.1 0.1 0.3 9 105 175 M64 x 2 66 87 80 63 160 110.0 92 95 38 M64 x 2

Free Mount Cylinder

, 80, 90, 100 Weight/( ): Denotes the values with D-A93.

ISO Cylinder

40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1

Rotary Table/Rack & Pinion Style Series MSQ

, 100, 200 How to Order CRB2 CRBU2 Size 10 20 30 50 CRB1 MSU CRJ MSQ A 10 A M9BW High Precision Type CRA1 MSQ B 10 A M9BW Basic Type CRQ2 Thread type MSQ Size End port type Size 10, 20 30, 50, 70, 100, 200 10 20 30 50 70 100 200 Nil Nil -XF -XN M 5 Rc 1/8 G 1/8 NPT 1/8 MSZ CRQ2X MSQX Side ports are all M5.

LEC-OM07605CN

[r/min] 100% [0.1%] [0.1%] (1 pulse) 1 [pulse] (100 pulses) 100 [100 pulses] [r/min] [V] 15 [0.1%] ABS [rev] 1 1 [16 pulses] 1 [] 2 1 [] UF/B U VF/B V % [0.1%] [1.125 kpps] () [r/min] (100 pulses) [100 pulses] [r/min] (100 pulses) [100 pulses] [] [] %[AL. 50 1][AL. 51 2]0% [0.1%] 0 pulse [pulse] 1 1INCZ 0ABS [pulse] 2 [pulse] 1 [] 2 1 [] 8 69 8.

Electric Actuators

10 (LEPS10J) 1.1 1.1 0 350 300 0 50 100 150 Speed [mm/s] 0 350 300 0 50 100 150 Speed [mm/s] 200 250 200 250 Force Conversion Graph (Guide) LEPS6 (Basic) 5.6 Lead 4 (LEPS6K) 4.5 Force [lbf] 3.4 Lead 8 (LEPS6J) 2.2 1.1 0 70 80 90 100 Set value of pushing force [%] Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 70 10 80 100 50 5 LEPS10 (Basic) LEPS10L

10

22 55 58 50 70 9 2 12 90 45 110 35.5 22 68 71 63 80 9 2 12 100 50 120 38.5 28 81 81 80 100 12 4 16 126 63 153 41 34 102 102 100 120 14 4 16 150 75 178 46 40 124 124 125 138 14 7 20 180 102 216 57 50 148 148 DModel without air cushion is designed to include rubber bumpers.