Environment

Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

0.4

Flow characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

Series VQ Metal Seal/Rubber Seal Body Ported

Turn the manual override clockwise by 180 to set the mark to A and press it in the direction indecated by the arrow. It will be locked set in a (Passage: P A) state. Turn the manual override counterclockwise by 180 to set the mark to B and press it in the direction indicated by the arrow. It will be reset in a (Passage: P B) state. (It is reset when shipped.)

VFS

Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) System VK 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 VZ A VF VFR 0 1000 VP4 900 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

ZP

to 250 X 50 EPR 20 to 150 X X X The above table covers only general characteristics of subject rubber materials.

LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

IDU/IDF

IDF-FL1C IDF-FL2C IDF-FL3C IDF-FL4C IDF-FL6C IDF-FL8C IDF-FL11C IDF-FL15C IDF-FL22C IDF-FL37C IDF-FL55C IDF-FL75C A 180 180 225 225 345 345 365 385 430 555 600 640 360 440 360 440 250 750 440 600 B 145 145 180 180 270 270 270 310 310 380 410 510 420 420 420 420 480 480 670 670 Dryer IDF-FL1C, 2C, 3C, 4C, IDU-FL3C, 4C IDF1D IDF2D IDF3D IDF4D IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C

High Vacuum Angle Valve

190 180 153 124 62 12.5 Note 1) Dimension E applies when heater option is included.

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Integrated Controller

Lx = 350 mm, Ly = 250 mm, Lz = 1000 mm 4.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

195 197 198 199 200 245 247 248 249 250 For 30 29.5 29.7 29.8 29.9 30.0 295 297 298 299 300 Guide pin diameter 1268 Pin Clamp Cylinder Series CKQ D/CLKQ D G P G P Table 2.

SX

A: Orange B: Green (Rail mounting hole pitch 12.5) (Station n) (Station 1) Light/Surge voltage suppressor Block separation lever (mm) (DIN rail dimension) (Push type) 2 stations 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 298 285.5 260.5 248 235.5 210.5 198 185.5 173 287.5 275 250 237.5 225 200 187.5 175 162.5 228 212 196 180 164 148 132 116 100 16 17.5 13 15 16.5 12 14 15.5 17.5 Note

Rotary Table/Rack & Pinion Style Series MSQ

Port location/Rotation 2 3 4 5 Standard type 180 90 180 90 Port location/Rotation Symmetric type Rotation 180 90 2: Standard type, 180 Refer to the table to the right. 3: Standard type, 90 Standard type Connecting port Connecting port Connecting port position 4: Symmetric type, 180 5:Symmetric type, 90 Symmetric type Connecting port Connecting port Applicable Auto Switch/Refer to pages 761

NCG/CG1

181 205 206 230 231 255 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to Best Pneumatics.

Shock Absorbers and Rate Controls

8 150 5 In0tilI.5(B) .44 0.50 3-50 250 ?84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

181 205 206 230 231 255 56 30 30 71.4 175 200 200 228 225 253 250 278 For dimensions of pivot bracket, refer to page 6-5-12.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

CRQ2 L H Shock absorber for low energy Shock absorber for high energy MSQ Port location/Rotation MRQ Standard type 180 2 3 4 5 Rotation 180 90 90 180 D3: Standard type, 90 2: Standard type, 180 Symmetric type 90 Standard type Connecting port Connecting port Refer to the table to the right. 20Connecting port position 5: Symmetric type, 90 4: Symmetric type, 180 Symmetric type Connecting port

Rotary Table/

L H Low energy shock absorber High energy shock absorber Connecting port position and rotation Port location/Rotation Standard type 180 2 3 4 5 Rotation 180 90 90 180 3: Standard type, 90 2: Standard type, 180 Symmetric type 90 Standard type Connecting port Connecting port Refer to the table to the right.

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69