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mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50

MY1

20 50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.

MG

63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Mount Series CG1R Rubber 20 to 63 NCM Double acting Single rod 6-5-40 NCA Air DDirect Mount, Non-rotating Rod Series CG1KR -X 20 to 63 Double acting Single rod Rubber 6-5-46 20Data Low Friction Series CG1Q Without (20 to 32) Rubber (40 to 100) 20 to 100 Double acting Single rod 6-5-49 With End Lock Series CBG1 20 to 100 6-5-55 Double acting Single rod 6-5-1 2 Air Cylinder: Standard Type Double

ISO Cylinder

to 50 st 51 to 100 st 101 to 150 st Auto switch model Bore size A dimensions B 5 to 50 st 51 to 100 st 101 to 150 st 8 18.5 18.5 18.5 6.5 10 16.5 16.5 16.5 6.5 12 18 18 18 7.5 8 17 17 17 5 10 15 15 15 5 12 16.5 16.5 16.5 6 D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 16 18 33.5 49 13.5 [7.5] 16 16.5 32 47.5 12 [6] 16 12.5 28 43.5 8 [2] 20 10.5 (35.5

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

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4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 * The mounting hole position varies depending on the motor capacity. w 40 4 766 AC Servo Motor Driver LECY M U Series Specifications -@ Type Model LECYM2-V5 LECYM2-V7 LECYM2-V8 Compatible motor capacity [W] 100 200 400 Compatible encoder

Applicable Auto Switch Model

Internal Circuit RB Dimensions J Switch main circuit OUT() Brown D OUT( ) Blue -X 20Indicator light/Operation Technical Data Operation Range( l Dimension) (mm) Bore size 40 Actuator series 80 100 5 5 5 5 5.5 4 4 4.5 4 4.5 5 5 5 50 63 CDQ2 CDA1 MDL MK, MK2 5 5 5 5.3-64 2 Color lndication Style with Diagnostic Output Solid State Switch/Tie-rod Mounting D-F5LF (Latching Style) Applicable Actuator

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8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5 Super Mist Separator Series AME AME450 to AME850 Dimensions Courtesy

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

1

100 89 153 5 69 21 105 Dimensions except mentioned above are the same as standard type.

Air Cylinder

10 40 67 4.5 66 86 5 17.5 22 11 75.5 63 Up to 1500 82.5 5 12 45 67 4.5 82 106 5 17.5 22 13 75.5 80 Up to 1500 101 6 11 55 74 4.5 100 125 5 20 28.5 14 95 100 Up to 1500 121 6 14 65 74 6 120 150 7 20 30 16 95 * Other dimensions are the same as basic type.

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Applicable shaft type: W d1 = (mm) (mm) Size d1 Q1 = M Size 63 80 100 50 50 4 to 5 Thread 63 4 to 6 M5 x 0.8 L1 = L1 4.2 4.2 4.2 80 4 to 6.5 M6 x 1 5 5 5 100 5 to 8 M8 x 1.25 6.8 Q1 11-4-14 80 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequecing II Shaft shape pattern is dealt with simple made-to-order system.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W d1 = (mm) (mm) Size d1 Q1 = M Size 63 80 100 50 50 4 to 5 Thread 63 4 to 6 M5 x 0.8 L1 = L1 4.2 4.2 4.2 80 4 to 6.5 M6 x 1 5 5 5 100 5 to 8 M8 x 1.25 6.8 Q1 11-4-14 80 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequecing II Shaft shape pattern is dealt with simple made-to-order system.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W d1 = (mm) (mm) Size d1 Q1 = M Size 63 80 100 50 50 4 to 5 Thread 63 4 to 6 M5 x 0.8 L1 = L1 4.2 4.2 4.2 80 4 to 6.5 M6 x 1 5 5 5 100 5 to 8 M8 x 1.25 6.8 Q1 11-4-14 80 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequecing II Shaft shape pattern is dealt with simple made-to-order system.

CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting Position of the Heater Heater symbol XLm-100(-1)-X152 XLm-160(-1)-X152 H4 (100C) (b), (c) (a), (b), (c) H5 (120C) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 5 XLm-100/160(-1)-X152 Specific Product Precautions Be sure to read this before handling the products.