Electric Actuator

5 #0@9 @8 !9 !1 !2 @5 @1 $2$3 @2 !8 !6 @4 @7 o @0 $4$5 !0 !0 !3 u @3 !2 i e !7 r t w q y @6 When selecting the grease holding function LEYG Mll -llF: 50st or less 25 32 A B C LEYG M: 50st or less 16 25 32 LEYGlM #3 #4 #5 #6 #1 #8 #7 #2 LEYG Mll -llF: Over 50st 25 32 A B C LEYG M: Over 50st 16 25 32 Note) Felt material is inserted to hold grease at the sliding part of the slide bearing.

Basic type / Direct mount type Series CY3B/CY3R

31 38 43 54 66 84 96 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8

1

Dimensions CP95 Cushion Rubber bumper (Standard equipment) NCM Stroke NCA Model, Bore size (mm) Applicable stroke 12, 16 5, 10, 15, 20, 25, 30 DCQS 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 -X 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CQ2 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20Data 6-17-37 32 Made to Order Common Specifications: Special Port Location

MG

10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16 16 16 16 CY 1 1 MG Courtesy

MY1

63 50 40 32 25 Mounting position A 278.5 323.5 184.5 229.5 139.5 B 121.5 136.5 95.5 110.5 80.5 Operating range l Note) 5.5 5.5 5 5 5 B A MY1C (Cam follower guide type) (mm) 63 50 40 32 25 Mounting position A 97.5 157.5 127.5 278.5 323.5 B 122.5 182.5 152.5 121.5 136.5 Operating range l Note) 5 5 5 5.5 5.5 B A MY1H (High precision guide type) (mm) 40 32 25 Mounting position A 180 216 131.5

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

Table of Contents

3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

0.4

@ $4% $5% 6 . + $4% $5% 7 6 . % # A * # # ! ! $4% $5% . ! $4% $5% ;6 6 $4% $5% ) . $4% $5% 0 + $4% $5% . + 8 $4% $5% ; . $4% $5% 7 . 9 $4% $5% <' . $4% $5% ;6 . : $4% $5% 6 8 $4% $5% . ! $4% $5% ) 0 9 $4% $5% ; 0 8 9 ! $4% $5% 0 : $4% $5% <' 6 !! $4% $5% ;6 ) : $4% $5% 0 6 ! $4% $5% <' ) $4% $5% 0 ) !+ $4% $5% 6 0 ! $4% $5% 7 ) ! !

MGP

50 100 100 100 80 100 Load weight m (kg) 100 Load weight m (kg) 80 80 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 8 Compact Guide Cylinder Series MGP Horizontal Mounting Ball Bushing 1 7 l = 50mm V = 200m/s 1 8 l = 100mm V = 200m/s MGPL12 to 25 MGPL12 to 25 10 10 25 20 25 5 5 25 25 25 20

Air Cylinder

D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) CM2 CM3 D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) CG1 CG1 D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) CG3 D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) JMB D-C7 D-C80 5 15

C85

3.2 16 12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54 5 8 6-11-17 17 Series C85

C85

4 4.5 11 26 16 23.8 12.8 13 3.2 26 22 30 40 6 20 38 12.8 4.5 35 5 10 3.2 25 4 4.5 11 26 16 23.8 12.8 13 3.2 26 22 30 40 6 20 38 12.8 4.5 35 5 12 4 32 6 5.5 14 38 20 32 18 18 4 33 30 40 52 8 25 58 18 5.5 42 6 16 4 32 6 5.5 14 38 20 32 18 18 4 33 30 40 52 8 25 58 18 5.5 42 6 20 5 40 6 6.6 17 46 25 36 19 20 5 42 40 50 66 8 32 66 19 6.6 54 8 25 5 40 6 6.6 17 46 25 40 23 24 5 42 40 50 66 8 32

CV/MVGQ

18 4 x 30l CVD-08 CDP-6A 5 x 30 4 94 5 79 7.5 83 73 M22 x 1.5 5 13 32 37 31 0.065 0.117 0.065 0.117 20 20 CVD-10 5 x 35 105 5 90 7.5 M26 x 1.5 16 41 47.3 39 0.065 0.117 25 10-15-59 60 Series CV3 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-B5/B64/B59W D-A5, D-A6 D-A59W Auto switch Ht Ht Auto switch

CV/MVGQ

Type C 5 16.6 + 0.048 0 5 8 25 M5 x 0.8 6.4 12 14 RHC Double Knuckle Joint Mounting Nut Rod End Nut MK(2) Knuckle pin and set ring are shipped together.

Electric Actuators

25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140

Air Cylinder Series MB

9 5 M18 x 1.5 1/4 47.5 58 20 10.5 63 55.5 259 123.5 20.7 M8 x 1.25 5 7 31.5 197 8.5 9 M18 x 1.5 3/8 55 58 23 12 80 61.5 321 157 26 M10 x 1.5 5 10 38 245 10.5 11.5 M22 x 1.5 3/8 61 72 33 14 100 69.5 341 177 26 M10 x 1.5 5 10 38 265 10.5 17 M26 x 1.5 1/2 68 72 37.5 15 With Rod Boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000

High Vacuum Angle Valve

temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Plug-in: For SS5Y -45 3 5 VQC VQZ SQ 5 5 SY 5 1 FU Single solenoid: VFS 5 SY 5 1 5C FU Double solenoid: VFR Series CE-compliant VQ7 3 SY300 5 SY500 Nil Q CE-compliant Type of actuation Manual override 1 Normally closed (N.C.) 2 Normally open (N.C.)

15

500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load [kg] Work load [kg] Work load [kg] 807 A LEFB Series Motorless Type Calculation of Guide Load Factor Mounting Orientation 1.