JIS Standard Hydraulic Cylinder

21 Proof pressure (MPa) Related Products Symbol Specifications -XA -XC14 Change of rod end shape Minimum operating pressure (MPa) Head: 0.15 Rod: 0.2 Change of trunnion bracket mounting position DWithout auto switch: 10 to 80C With auto switch: 10 to 60C Ambient and fluid temperature Piston speed 8 to 300 mm/s Cushion Cushion seal type Rod Sizes Stroke length tolerance to 100 st , 101 to 250

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Shock Absorbers and Rate Controls

8 150 5 In0tilI.5(B) .44 0.50 3-50 250 ?84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

Air Cylinder

Double end lock: CBG1BN Bore size Stroke Wl (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 80 146 220 100 146 220 ZZ + Stroke S + Stroke With rod boot 8 l 8 l 8 l IJ IJ e e JH f h + l f JW h + l ZZ + l + Stroke ZZ + l + Stroke 20 to 63 80, 100 (mm) (Reference) l Head end lock: -Hl Rod end lock: -Rl Double end lock: -Wl ZZ ZZ ZZ 20 30 18 55 27 15.5

Stability of suction position,

220 223 Model Weight [g]/Pad material N/U/CL S F ZP3E-T40UMlJB10 195 195 198 ZP3E-T40UMlJB30 210 209 213 ZP3E-T40UMlJB50 221 221 224 Model Weight [g]/Pad material N/U/CL S F ZP3E-T50UMlJB10 206 205 211 ZP3E-T50UMlJB30 220 220 226 ZP3E-T50UMlJB50 232 231 237 428 A With Buffer: Vacuum Inlet Vertical ZP3E Series Pad diameter 63 to 125 Dimensions/With Buffer: Vacuum Inlet Vertical Pad form Flat

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

5 Port Solenoid Valve

228.5 237 245.5 254 262.5 271 279.5 288 296.5 305 212.5 225 225 237.5 250 250 262.5 275 275 287.5 300 300 312.5 325 325 223 235.5 235.5 248 260.5 260.5 273 285.5 285.5 298 310.5 310.5 323 335.5 335.5 n L L1 L2 L3 L4 17 18 19 20 21 22 23 24 175.5 184 192.5 201 209.5 218 226.5 235 313.5 322 330.5 339 347.5 356 364.5 373 337.5 350 350 362.5 375 387.5 387.5 400 348 360.5 360.5 373 385.5 398

LX

LJ1 LG1 LC1 LX LC6D/LC6C Switches Series LXS Lead screw lead mm Series Brake Page Model Motor type Ball screw Slide screw Guide type LXF 2 5 6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250

VZS

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Combination Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

VCL

Note 3) Vibration resistance Conditions when tested with one sweep 10 to 250 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states. No malfunction occurred when tested.

100

Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 30 (Operating hours: 10 hours/day, Operating days: 250 days/year, 120 cycles/h, when 1 unit is used) Cost conditions *1 Air consumption 100 Peak vacuum pressure 10% reduction -84 Air consumption [L/min (ANR)] Existing model ZL112 ZL1 63 L/min (ANR) Vacuum pressure [kPa] 57 63 Approx.10% reduction Air consumption Existing model (ZL112) ZL1

Table of Contents

250 Internal grip 300 200 Pressure 0.6 MPa Gripping force (N) Gripping force (N) Pressure 0.6 MPa 250 0.5 MPa 0.5 MPa 150 200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 100 0.2 MPa 0.2 MPa 100 50 50 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHSJ3-63D MHSJ3-63D 400 500 Pressure 0.6 MPa Pressure 0.6 MPa 400 Gripping force (N) Gripping

Environment

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Electric Actuator with Integrated Guide

CN I/F is approx. 10mA GND 1 4 AM26LS31 equivalent Shielding wires 3.9k 1 2 22 23 24 25 COM+ CW+ CW CCW+ CW pulse input Servo ON input Switch ON turns servo ON 220 SRV-ON GAIN Switch ON selects secondary gain 5 Gain switching input CCW pulse input 220 CL CCW 4 Deviation counter clear input Command divider multiplication switching input 3.9k Switch ON selects secondary multiplication 6 3

Compact Manifold Regulator Series ARM5

, OUT 6) ARM5AA1-310-1 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 Outlet pressure (MPa) Outlet pressure (MPa) 0.30 0.6 0.25 0.5 0.20 0.4 0.15 0.3 0.10 0.2 0.05 0.1 0 0 50 100 150 250 200 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics (Representative Value) Outlet pressure 0.2 MPa Flow rate 20 l/min (ANR) Condition: Inlet pressure 0.7 MPa Outlet

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

5

, 300, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200