4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

) Manual override 42 [48.5] 29.6 23 13.5 [ ] for AC L type plug connector (L) M type plug connector (M) (Lead wire length) 42 About 300 About 300 53.1 [59.6] (Lead wire length) 42 [48.5] 92.3 [94.9] 79.4 [82] 1 111.6 53.2 [54.5] 98.6 1 62.8 [ ] for AC Other dimensions are the same as the grommet type.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PB53] Gain characteristics 1 Hz 300 Hz Resonance of more than 300 Hz is not the target of control. Vibration suppression control 1 Vibration frequency Vibration suppression control 1 (anti-resonance frequency) Resonance frequency [Pr. PB19] [Pr. PB20] Phase -90 deg.

MY1

400 500 1000 1500 0.05 0.5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 1349 Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1W Series 16, 20, 25, 32, 40, 50, 63 How to Order MY1 M W K 300

CP95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 8 5 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 11 6 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 14 7.5 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 MB MB1 CA2 Rod Clevis GKM (ISO 8140)

Auto Switch Guide

RZQ Reed switch LED Weight OUT () Terminal no. 2 OUT (+) Terminal no. 1 Resistor MI W S (g) Zener diode Auto switch model D-A33C D-A34C D-A44C CEP1 40 162 162 160 CE1 50 166 166 164 D-A34C, D-A44C Applicable bore size (mm) 63 184 184 182 CE2 80 210 210 208 Choke coil Reed switch LED 100 232 232 230 ML2B OUT (+) Terminal no. 1 OUT () Terminal no. 2 Resistor Dimensions Zener diode C J G5-

Auto Switch Guide

CA2 Weight CS1 (g) C76 D-G39C D-K39C Auto switch model 40 162 162 C85 Auto Switch Internal Circuit D-G39C 50 166 166 Applicable bore size 63 184 184 C95 (mm) 80 210 210 DC (+) Terminal no. 1 100 232 232 CP95 Dimensions Main circuit of switch Main circuit of switch NCM OUT Terminal no. 2 2-M5 x 0.8 x 12 Hexagon socket head cap bolt NCA DC () Terminal no. 3 DD-K39C -X Tightening gland OUT (

CP95

3574 2859 2144 7147 1429 IN CM2 Note) Theoretical out put (N) = Pressure (MPa) x Piston area (mm2) 5 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Weight/Aluminum Tube (kg) MB 100 80 63 50 32 40 Bore size (mm) 4.45 3.37 2.00 1.44 0.59 Basic style 0.87 100 300

Auto Switch Guide

MLGP Reed switch LED Weight OUT () Terminal no. 2 OUT (+) Terminal no. 1 Resistor RLQ (g) Zener diode Auto switch model D-A33C D-A34C D-A44C MLU 40 162 162 160 ML1C 50 166 166 164 D-A34C, D-A44C Applicable bore size (mm) 63 184 184 182 D80 210 210 208 Choke coil Reed switch LED 100 232 232 230 -X OUT (+) Terminal no. 1 OUT () Terminal no. 2 Resistor Dimensions Zener diode 20Surge absorber

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

C95

Standard stroke (mm) 50/100/150/200/250/300 Max. possible stroke (mm) 300 *different in % related to full span.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro

Series VQ Base Mounted Metal Seal/Rubber Seal

0.5MPa Load factor 25% Piping length 2m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 3.6 (0.2) VQ1000 (Metal seal) 6 5.4 (0.3) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa

CQ2

, 200, 250, 300 Note 1) Attached plain washer must be used for through-hole mounting.

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Technical Data 1207 Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series 25, 32, 40 RoHS How to Order M9BW 25 300 MY1H Z Linear guide type Linear guide type Made to Order Refer to page 1209 for details

33

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 200 A Thermo-chiller Basic Type HRSE Series Note 1) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn X-axis Xn Z-axis Zn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

5

, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Vacuum System Peripherals:

Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235 VQZ225 VQZ245 VQZ315 VQZ335 VQZ325 VQZ345 1.7 2.3 1.7 2.5 3.0 4.5 2.9 4.4 VQZ 200 1 8 1 4 , Base mounted (With sub-plate) VQZ 300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width