MGG

, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

CG5-S

JS63-18-150 1MPa or less 3.5MPa or less -5 to 60C Note 2) Note 1) Use the applicable bore sizes as a guide.

JXCx-OMU0004

LEHZ 3 5mm/s LEHZ10 LEHZ16 LEHZ2025 LEHZ LEHZ 32 40 6 2(3) 6 3(4) 16 11 52 84 10 4 10 5.5 28 19.5 91 147 [N] 14 6 14 8 40 28 130 210 *LEHZ1016 30%F.S.LEHZ2025 25%F.S.LEHZ32 40 20%F.S. * (LEHZJ ) 53 No.JXC-OMU0004-A LEHF LEHF10 LEHF20 LEHF32 LEHF40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15

energy saving effect

HRSH HRSH Polyester band HRSE Cardboard box Hanging position HRZ 60 or less HRZD Forklift insertion side HRW HECR Less than 150 mm HEC Forklift insertion side Wooden skid HEB Less than 150 mm Less than 150 mm HED Forklift insertion side HEA Forklift insertion side Less than 150 mm Model Weight [kg] Dimensions [mm] HRSH100-Al-l 221 IDH HRSH250-A-20 Height 1585 x Width 1185

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

CG5-S

JS63-18-150 1MPa or less 3.5MPa or less -5 to 60C Note 2) Note 1) Use the applicable bore sizes as a guide.

Refrigerated Air Dryers Series IDF/IDU

Note) 100 100 kW 125 125 kW 150 150 kW Note) Note that the above values are for reference only.

Table of Contents

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156 1 Speed Controller with One-touch Fitting Series AS Elbow Type/Universal Type Model Minimizes installation time and cost Reduces the mounting height and enables compact machinery design. Effective area is larger than the former model.

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

VQZ1000/2000/3000

Avoid using the latching solenoid valves in environment where impacts or collisions (30/150 m/s2 or more) exist. Also, do not use in places where the strong magnetic fields are present. 4. Even though the armature in the solenoid of this valve is held on to B side, ON position (Reset), verify either A side, ON position or B side, ON position by energizing prior to use.

Suction Guard (Produced upon receipt of order) FHG Series

130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 90 90 90 115 115 115 145 145 6 6 6 6 6 6 8 8 72 72 72 86 86 86 106 106 110 110 110 130 130 130 170 170 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150

0.4

Station 6 Station 12 Station 18 Station 24 CP Station 7 Station 13 Station 19 S (For P, J kit) VVQZ2000 SSQ1000 4 B P 1 150 For station 1 kit

Booster Regulator/Air Tank

gauge port 1/8 IN side gauge port 1/8 IN port 1/2 221 62 62.8 8 OUT port 1/2 Silencer (Option) 22 32 EXH port 1/2 96 4 x 12 130 3.2 116 150 (When silencer installed: 200) (When high-noise reduction silencer installed: 230) For detailed dimensions, specifications and lead times, please contact SMC.

Dual Rod Cylinder Series CXSJ/CXS

CXSW20-175 CXSW20-200 120 178 60 10 130 198 70 20 44.5 44.5 Standard stroke Long stroke (-XB11) 140 30 218 80 2 x 2 x M5 x 0.8 thread depth 4.5 (Piping port) 150 238 40 90 (Opposite side: Same) 160 258 100 50 (Z) (30) 6 (30) 4 x M4 x 0.7 thread depth 6 2 x M6 x 1 thread depth 10 185 308 75 125 210 358 150 100 235 408 125 175 260 458 150 200 50 0.2 285 508 225 175 310 558 200 250 Only the

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

External Grip Internal Grip MHS2-32D MHS2-32D 150 150 Pressure 0.6 MPa Pressure 0.6 MPa 120 120 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 90 90 0.3 MPa 0.3 MPa 60 60 0.2 MPa 0.2 MPa F 30 30 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 F Gripping point L (mm) Gripping point L (mm) MHS2-40D MHS2-40D 250 250 Pressure 0.6 MPa Pressure 0.6 MPa 200 200 Gripping

Compact Cylinder

M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M6 x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 115 l x 135 l x 155 l 55 60 65 70 75 80 85 90 95 100 110 130 150 60 65 70 75 80 85 90 95 100 105 115 135 155 C(D)55B32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 9.4 10 Fix the cylinder by using the

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXSW20-175 CXSW20-200 120 178 60 10 130 20 198 70 Standard stroke Long stroke (-XB11) 2-5.7 140 218 30 80 44.5 44.5 150 238 90 40 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 160 258 100 50 185 75 308 125 (Z) 4-M4 x 0.7 thread depth 6 6 (30) (30) 210 358 100 150 2-M6 x 1 thread depth 10 235 408 175 125 260 458 150 200 285 508 225 175 0.2 310 200 558 250 Only the CXSW20

Card Motor

200 120 250 W = 300 LAT3m-30 4 200 150 200 150 W = 0 W = 100 W = 200 200 150 300 100 W = 0 W = 100 W = 200 3 300 100 600 50 600 50 2 0 0 0 5 10 15 20 25 30 Stroke(Positioning distance) St [mm] 0 5 10 15 20 25 30 Stroke(Positioning distance) St [mm] 1 Operating condition Model: LAT3F-m Mounting orientation: Horizontal/Vertical Step data input version: Takt time entry method (Triangular drive

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110