C95

64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 32 40 50 63 80 100 Rod boot (gaiter) e max f I h Bore (mm) Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25 25 25 37.5 37.5 37.5 37.5 37.5 37.5 50 50 50 50 50 50 75 75 75 75 75 75 75 75 87

Dual Rod Cylinder Series CXSJ/CXS

120 178 60 10 130 198 70 20 44.5 44.5 Standard stroke Long stroke (-XB11) 140 30 218 80 2 x 2 x M5 x 0.8 thread depth 4.5 (Piping port) 150 238 40 90 (Opposite side: Same) 160 258 100 50 (Z) (30) 6 (30) 4 x M4 x 0.7 thread depth 6 2 x M6 x 1 thread depth 10 185 308 75 125 210 358 150 100 235 408 125 175 260 458 150 200 50 0.2 285 508 225 175 310 558 200 250 Only the CXSW20-10 has a groove

Compact Manifold Regulator Series ARM5

Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M 98 VVQ1000-90-7 17 16 110.5 VVQ1000-90-8 123 VVQ1000-90-9 IN side OUT side 148 VVQ1000-90-11 Fitting size 160.5 VVQ1000-90-12 Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 173 VVQ1000-90-13 4, 5/32 185.5 VVQ1000-90-14 2.5 6 11 37.5 6 198 VVQ1000-90-15 3 12.5 19 37.5 3 6.5 11 38 1/4 210.5 VVQ1000-90-16 3 12.5 19

Tie-rod Type Hydraulic Cylinder

Same surface 75 90 120 (n 4) 2 120 + 50 (n 4) 2 (n 2) 2 20 + 50 90 + 50 Different surfaces D-B59W (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 75 + 50 (n 2) (n = 2, 3, 4 ) 90 + 50 (n 2) (n = 2, 4, 6 )Note 1) 120 + 50 (n 2) (n = 2, 4, 6, 8 )Note 1) Same surface 1 pc. 80 120 90 15 75 35 90 Different surfaces Same surface 100 75 + 30 (n 2) (n = 2,

Electric Rotary Table

or less (No condensation) 10 to 60 (No freezing) 90 or less (No condensation) 200 (Screw mounting), 220 (DIN rail mounting) Note 1) Please note that the version is subject to change.

Hydraulic

Same side 75 90 120 (n 4) 2 120 + 50 (n 2) 2 90 + 50 (n 4) 2 20 + 50 Different sides D-B59W n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6 120 + 5 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6, 8 120 90 1 pc. 15 35 80 90 Different sides 75 100 Same side 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 12.5 12.7 12.8 12.9 13.0 14.5 14.7 14.8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

180 90 180 CRBU2 CRB1 90 S J79W D RA1 C B W30 Size 30 MSU RA1 B W S 50 90 J59W C D Size 50 to 100 CRJ CRA1 Number of auto switches Built-in magnet S Nil 1 pc. 2 pcs.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Adjusting angle at 90 at maximum. 90 type: 90 to 0, 180 type: 180 to 90 MRQ D20A dj 90 us ve ti A port B port ng oo gr di re y ke ct on cti io re of di n ng sti e ju Ad ng ra n io at ot R 0 18 ve oo Ro gr ta y tio ke n of ra ng e How to Adjust Angle Angle adjusting screw Foot Bracket Part No.

Hygienic Design Cylinder Series HY

Standard Stroke Bore size (mm) Standard stroke (mm) 20 20, 30, 50, 100, 150, 200 25 20, 30, 50, 100, 150, 200 32 25, 50, 100, 150, 200 40 25, 50, 100, 150, 200 50 25, 50, 100, 150, 200 63 25, 50, 100, 150, 200 Manufacture of Intermediate Stroke Intermediate strokes of 1 mm each can be produced by using spacers with standard stroke cylinders.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

MK(2) Resistance RS Q G Adjustment dial RS H A RZQ Adjustment dial rotation angle MI W S 90 CEP1 Stopper direction can be changed within 90 CE1 CE2 The stopper lever can be rotated 90.

Air Cylinder Series MB

The overall length is longer than the cylinder with air cushion as follows because the bumpers are attached to the both sides of the piston; 32, 40: +6mm, 50, 63: +8mm, 80, 100: +10mm, 125: +12mm 32 40 50 63 80 100 90 90 102 141 145 164 102 124 124 164 200 200 125 235 132 Stroke range (mm) Bore size (mm) Width across flats S ZZ Effective thread length A C B D Ee11 F G H MA MB J K MM N P V

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Thermo-con

capacity (W) Ambient temperature: 68F (20C) Ambient temperature: 95F (35C) 600 1200 Ambient temperature: 86F (30C) 500 1000 Ambient temperature: 59F (15C) 400 800 Ambient temperature: 59F (15C) 300 600 200 400 100 200 0 0 0 0 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 Circulating fluid temperature Circulating fluid temperature Pump Capacity

LEC-OM071xx

Inrush current: No breaking at the current values shown in the table for 20 ms. 3-6 3 Wiring and Connection 3.1.3 Using the DRIVER with Single-phase, 200 V Power Input LECYU2 series three-phase 200 V power input DRIVER can be used also with a single-phase 200 V power supply.

Aluminum High Vacuum Angle Valve

0 o 83 0.2 2-1 112 q 114 90 O-ring Part No.

Table of Contents

230 1 1/2 Short 1.10 to 3.29 45 90 270 230 2 Middle 0.68 to 2.05 45 90 Component Parts IF33-10 500 420 2 1/2 Middle 0.74 to 2.30 80 160 Material No.

Compact 5-Port Solenoid Valve

CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 140 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 1000 mm 160 180 200 0 100 200 300 400 500 600 700 800 900 1000 Average speed [mm/s] ZK2 Combination Manifold Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions * Values at extension of a directly coupled cylinder when meter-out speed