IDX-OM-U021

i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K 1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

Hydraulic

7539 10052 12565 15078 17591 80 25 4535 IN 4535 6802 9070 11337 13605 15872 7853 OUT 7853 11779 15706 19632 23559 27485 100 30 7147 IN 7147 10720 14294 17867 21441 25014 Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights Unit: g Cylinder stroke (mm) Male thread additional weight 5 Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 63 80 100 180 200 220 240 260 280 300

NCA1

Beltline Suite 119 Carrollton, TX 75006 TEL: (972) 446-9554 FAX: (972) 446-5931 SMC Corporation of America (Rochester) 245 Summit Point Drive Henrietta, NY 14467 TEL: (716) 321-1300 FAX: (716) 321-1865 TAIWAN SMC Pneumatics (Taiwan) Co., Ltd. THAILAND SMC Thailand Ltd. INDIA SMC Pneumatics (India) Pvt., Ltd.

Tie-rod Type Hydraulic Cylinder

63, 80, 100 Aluminum alloy 40, 50, 63, 80, 100, 125, 160 Steel CHQ Specifications CHK Action Double acting/Single rod CHN Fluid Hydraulic fluid Nominal pressure 3.5 MPa CHM Proof pressure 5.0 MPa CHS Maximum allowable pressure 3.5 MPa Minimum operating pressure 0.25 MPa CH2 Without auto switch: 10 to 80C Ambient and fluid temperature With auto switch: 10 to 60C CHA CHA Piston speed 8 to 300

3 Port Air Operated Valve

(Convertible) Standard 0.2 to 1.0 Operating pressure range (MPa) For vacuum 100 kPa to 0.2 Pilot pressure (MPa) 0.2 to 1.0 (Equivalent to the operating pressure or more) Ambient and fluid temperature (C) 10 to 50 (No freezing) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction to axis and right

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 245 245 246 246 249 249 253 255 255 256 256 258 259 261 265 265 266 266 268 269 272 272 273 273 275 276 278 278 279 279 281 283 309 310 310 311 311 312 315 326 Series MU Plate Cylinder 25, 32, 40, 50, 63. Features. Series Variations. Precautions.

Refrigerated Air Dryer

Auto drain IDK Port size Weight R2 245 R2 1/2 270 DIN flange 80 350 R2 245 R2 1/2 270 DIN flange 80 350 kg AMG Body panel: White 1 Base: Gray 2 Coating color AFF Compliant standards EC Directive compliant (with CE marking) Note 1) Air flow capacity under the standard condition (ANR) [atmospheric pressure 20C, relative humidity 65%] Note 2) Air flow capacity converted by the compressor intake

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 16n + 53 L2 = 16n + 87 n: Stations (max. 16 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 85 119 150 160.5 101 135 162.5 173 117 151 175 185.5 133 167 187.5 198 149 183 212.5 223 165 199 225 235.5 181 215 237.5 248 197 231 262.5 273 213 247 275 285.5 229 263 287.5 298 245 279 300 310.5 261 295 325 335.5 277 311 337.5 348 293 327 350 360.5 309

5 Port Air Operated Valve

single Operating pressure range VFA1000 series 101.2 kPa to 1.0 2 position double/3 position Note 2) (MPa) SYA (0.4 x P + 0.1) to 1.0, P: Operating pressure 2 position single Pilot pressure range 0.1 to 1.0 2 position double SYJA (MPa) 0.15 to 1.0 3 position VFA3000 series Ambient and fluid temperature (C) 10 to 50 (No freezing) VZA Not required Lubrication Free Mounting orientation VFA VFA 300

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Air Cylinder NCA1 Series

oversized piston rods transmit more side load 2400 19 45 75 114 145 213 281 347 than is the case with more flexible smaller rods; therefore, the use of oversized 3200 16 41 67 103 130 194 261 329 4000 13 38 63 94 119 175 240 310 rods should not be considered a remedy against excessive side loads. 5000 9 34 60 87 110 163 225 289 6000 5 30 56 82 102 152 208 274 8000 4 26 50 76 93 137 188 245

Electric Actuator/Slider Type

Model L A B n D E LEFS32 -50 245 56 180 4 LEFS32 -100 295 106 230 4 LEFS32 -150 345 156 280 4 LEFS32 -200 395 206 330 6 2 300 LEFS32 -250 445 256 380 6 2 300 LEFS32 -300 495 306 430 6 2 300 LEFS32 -350 545 356 480 8 3 450 LEFS32 -400 595 406 530 8 3 450 LEFS32 -450 645 456 580 8 3 450 LEFS32 -500 695 506 630 10 4 600 LEFS32 -550 745 556 680 10 4 600 LEFS32 -600 795 606 730 10 4 600

Battery-less

750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Lead wire length) Approx. 300 33.1 48.5[55.5] Refer to page 563 for dimensions with connector cable.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

15

T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Action Double acting Operating pressure 0.15 to 0.7 MPa Proof pressure 1.05 MPa 10 to 60C (No freezing) Ambient and fluid temperature 50 to 300 mm/s (Adjuster option/Metal stopper: 50 to 200 mm/s) Piston speed Rubber bumper (Standard, Adjuster option/Rubber stopper) None (Adjuster option/Metal stopper) Cushion Non-lube Lubrication +1 0 mm Stroke

Compact Cylinder with Air Cushion

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 100 Lateral load F (N) 80 10 63 50 40 32 25 Operating pressure 0.5MPa Operating pressure 0.4MPa Graph 1 20 1 10 100 300 1000 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 Caution 100 Load weight kg 80 1.

RQ

D-X 100 Lateral load F (N) 2080 10 Data 63 50 Operating pressure 0.5 MPa Operating pressure 0.4 MPa 40 32 25 Graph (1) 1000 20 1 10 100 300 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 100 Load weight kg Caution 80 63 50 1.