High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

(n2) n=2, 4, 6, 8, 110+50(n2) n=2, 4, 6, 8, Same side Accessory n=2, 4, 6, 8, Double knuckle joint (with pins) 1 10 90 100 110 0.37 0.43 0.43 0.87 1.27 Dif. sides 20 90 100 110 2 Factors in parentheses are for iron tube style.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 81 93 106 131 156 12.5 25 37.5 50 75 100 35 17 68 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 35 17 72 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 35 17 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 19 77 46 Refer to p.1.4-

CHKD/CHKG

140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHKGB25 CHKGB63 10.4 16 CHKGB32 CHKGB80 10.5 22 CHKGB40 CHKGB100 13.5 26.5 282 Compact Hydraulic Cylinder: 16 MPa CHKG Series Specific Product Precautions

Cylinder with Lock

12, 16, ) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16) 90 + 50 Different surfaces (n = 2, 4, 6, 8, ) (n = 4, 8, 12, 16, ) n 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Same surface 1 10 90 100 110 Different surfaces Same surface 20 75 90 100 110 2 Different surfaces 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) 110

CL

151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68 81 93 106 131 156 25 37.5 50 75 100 20 17 35 12.5 72 85 97 110 135 160 185 25 37.5 50 75 100 125 25 17 35 12.5 72 85 97 110 135 160 185 25 37.5 50 75 100 125 32 17 35 12.5 77 90 102 115 140 165 190 25 37.5 50 75 100 125 40 17 46 Over 301 stroke: Long stroke. 9-2-22 21 Series

Electric Actuator Triple Axis P&P Unit

Please inform P/A of any changes in the motor specifications. 6) For motor details, please refer to Applicable motors on page 23. 9 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 30 40 30 Stroke+240(Table movement range) 200 180 2-8H7depth10 4-M8 x 1.25 thread depth 16 Urethane stopper 110 280 (150) (Refer to 4) (Refer to 4) Home position gauge (Refer to 4) L 15 15 110

Dual Rod Cylinder Series CXSJ/CXS

Standard Stroke Housing (mm) Plate Model Standard stroke Manufacturable stroke range CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 10, 20, 30, 40, 50 60 to 100 10, 20, 30, 40, 50, 75 80 to 150 110 to 150 10, 20, 30, 40, 50, 75, 100 6 to 32 Bore size (mm) CXSJM (Slide bearing) CXSJL (Ball bushing bearing) 110 to 200 Strokes beyond the standard stroke range are available as a special order. 0.1 CXSJ6

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

3.3 69 113 105 A section 5.8 1.7 4.8 Stroke + 430 170 8-9 A section detail (Switch groove) 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97 110 30 110 18 9.4 33 10 4.5 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

VQZ1000/2000/3000

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

Air Cylinder

140 162 110 130 100 Do not disassemble the trunnion type.

ISO Cylinder

234 314 C85Fl-lT 137 214 291 Without magnet 101 to 150 mm stroke C85Nl-lT 177 256 344 C85El-lT 181 260 349 C85Fl-lT 167 240 327 Basic weight 1 to 50 mm stroke CD85Nl-lT 45 49 93 120 208 278 CD85El-lT 47 51 96 124 213 283 CD85Fl-lT 43 48 87 110 193 261 51 to 100 mm stroke CD85Nl-lT 150 233 312 CD85El-lT 154 238 317 CD85Fl-lT 141 218 295 With magnet 101 to 150 mm stroke CD85Nl-lT 181 259 348

5 Port Solenoid Valve Series VQZ1000/2000/3000

90 110 130 70 70 Note) The L dimension of 2 to 6 stations is the same.

Hydraulic Filters

150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

2) 2 (n = 4, 8, 12, 16) Note 2) 90 + 55 (n 4) 2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) D-A59W 1 15 90 100 110 120 2 (Different surfaces, same surface), 1 25 110 120 130 140 D-F5NT n (Same surface) (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n 4) 2 120 + 55 (

Magnetically Coupled Rodless Cylinder

Order 50, 100, 150, 200 300 6 50, 100, 150, 200, 250, 300 500 10 Symbol Specifications 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 15 -XB9 -XB13 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Low speed (15 to 50 mm/s) 1000 20 Ultra low speed (7 to 50 mm/s) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Air-hydro 1500 32 Helical insert thread 100, 150, 200, 250, 300, 350

NCG/CG1

25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Single knuckle joint Option Double knuckle joint (With pin) 40, 50, 63 Other intermediate strokes can be manufactured upon receipt of order.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

25, 50, 75, 100, 125, 150, 200 CP95 Single knuckle joint Option Double knuckle joint 25, 50, 75, 100, 125, 150, NCM 40, 50, 63 (With pin) 200, 250, 300 Pin and snap ring are shipped together with double knuckle joint.