Digital Flow Switch (Integrated display type)

Measurement is possible as long as the fluid does not corrode the wetted parts, and viscosity is 3mPas(3 cP) or less. Be aware that water leakage may happen due to internal seal shrinkage or swelling depending on kinds of fluid.

V

(FOR VQZ1000/VQZ2000) VVQZ2000-CP (FOR VQZ3000) SILENCER IS INSTALLED IN THE EXH PORT USED TO BLOCK AN UNUSED CYLINDER PORT WHEN USING A 4 WAY VALVE AS A 3 WAY VALVE SILENCER P/N TYPE AN110-01 VQZ1000 AN200-02 VQZ2000 AN200-02 VQZ3000 O T H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Note) 20 stations 20 For lateral piping For top piping Note) In case of CP port plug is inserted in all 2(A) port.

PF-OMM0004_C

1 [UnLoC][LoC] -59No.PF-OMM0004-D , -60No.PF-OMM0004-D PF3W7 , ,, (), DC(+) DC(-) 40 40 -61No.PF-OMM0004-D ) DC(+) DC(-) (OUT1) (OUT2) 40 LoC(58 ) -62No.PF-OMM0004-D DC(+) DC(-) (OUT1) (OUT2) ( ) GND 30 ms GND 30ms ( 20 ) -63No.PF-OMM0004-D OUT1 (OUT1)80 mA OUT2 (OUT2)80 mA 140 ( ( 1 ) 110 10 -64No.PF-OMM0004-D () PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 (3 mPas(3 cP

PF-OMN0009_C

) 31 235 390(7s 4,AC250V G ()JIS B0202(ISO228-1) ISO1179-1(G )ISO16030(G )JIS B0202(ISO228-1) ISO11791(G ) () ISO1179-1 ISO1179-2 ISO1179-3 ISO1179-4 () ISO16030(G )()ISO16030 () 0100 1 3F.S. 7 s 2 5F.S. 1090 2 -29No.PF-OMN0009CN-F (PVC ) PF3W511 PF3W521 (3 mPas(3 cP)) 1 10100 L/min 30250 L/min 070 () 3F.S. 2F.S. 5%F.S.(25 ) 2 2 3 1 s 15 V 1 k 420 mA DC12 V 300 DC24 V

JXCx-OMY0008

JXC-OMY0008-A 2.3 Product configuration An example of the controller structure is shown below. 1 2 Electric actuator EtherCAT PLC Controller 2 Actuator cable To P1, P2 (Robotic type cable) Model number: LE-CP-(Option) (Robotic type cable) Controller communication cable LE-CP---S (Standard cable) Part No: JXC-W2A-C To SI To ENC 3 4 Noise Filter LEC-NFA 4 5 Conversion cable Part No.: P5062-

JXCx-OMY0004

JXC-OMY0004-A 2.3 Product configuration An example of the controller structure is shown below. 1 2 Electric actuator PROFINET Controller PLC 2 Noise Filter LEC-NFA 4 5 Actuator cable To P1, P2 (Option) (Robotic type cable) Model number: LE-CP-(Robotic type cable) Controller LE-CP---S communication cable (Standard cable) To SI Part No:JXC-W2A-C To ENC Noise Filter LEC-NFA 4 5 Conversion cable

Step Motor Driver （ Pulse input type ）

. *6) Prepared by user Electric actuator *1) I/O cable Part No: LEC-CL5PLC Connect the ground *3) *4) Power supply for I/O signal 24 VDC Driver To CN5 *5) *1) *6) Communication cable for controller setting Actuator cable Part NoLE-CP--S Part No: LEC-W2A-C USB Cable To CN3 LE-CP--B-S To CN4 LEC-W2-U (Standard cable) *2) *5) LE-CPTo CN2 LE-CP--B (Robotic type cable) Teaching box (With 3m cable

JXCx-OMT0062

Electric actuator *1) *5) CC-Link Terminating Prepared by user resistance *6) PLC Communication plug connector *3) *4) LEC-CMJPower supply 24 VDC Controller to CN5 *1) *6) *6) Actuator cable Controller setting kit *2) *5) Part No: LE-CP--S Part NoLEC-W2 LE-CP--B-S to CN4 (Standard cable) to CN3 LE-CPLE-CP--B (Robotic type cable) to CN2 Teaching box to CN1 (With 3m cable) Part NoLEC-T1-3G

JXCx-OMT0061CN

8433-1993: *2) (1) (2) (3) 1. 2. 3. (4) 1. 2. 3. 4. 4 - LECPMJ / 1 / (1)1 1.5 *3) (2) (3) *3) 1 5 - 2. 2.1 CC-Link CC-Link CC-Link CC-Link CC-Link CC-Link 64 / CC-Link DRIVE INP 1 2 CC-Link CC-Link * 6 - 2.2 LE C P MJ (LE ) LEFS16B-100B-S1MJS P (DC24V) [LEFS16B-100] MJ CC-Link D DIN S T T <> LEHZ10K2-4 7 - 2.3 *1 CC-Link *4 PLC *3 LEC-CMJDC24V CN5 *1 *2 CN4 LE-CP-LE-CP

Programless controller (with stroke study) Step motor (servo 24 VDC)

Electric actuator *1) PLC *3)*4) Input / output signal power supply 24 VDC I/O cable *1) Part No: LEC-CK4Controller Actuator cable *1) To CN4 Part No: LE-CP--S LE-CP--B-S To CN3 (Standard cable) LE-CPLE-CP--B To CN2 (Robotic type cable) To CN1 Controller power supply Power supply cable 24VDC Part No: LEC-CK1-1 *1) These items are included when ordered using the part number for an electric

IZ-OMK0015

Connection cable A/IZS31-CF End bracket/IZS31-BE Connection cable B/IZS31-CR Auto balance sensor [Body mounting type]/IZS31-DE Sensor bracket/IZS31-BL M4 screw (provided together with the IZS31-BE) Ionizer/IZS31 M3 screw (provided together with the IZS31-BL) Power supply cable/IZS31-CP 12 Doc.No.IZ-OMK0015D 1-4.

Programless controller Step motor (servo 24 VDC)

PLC Electric actuator *1) Input / output signal power supply 24 VDC I/O cable *1) Part No: LEC-CK4Controller Actuator cable *1) To CN4 Part No: LE-CP--S LE-CP--B-S To CN3 (Standard cable) LE-CPLE-CP--B To CN2 (Robotic type cable) To CN1 Power supply cable Controller power supply Part No: LEC-CK1-1 24 VDC *1) These items are included when ordered using the part number for an electric actuator

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Step Motor Controller (Servo / 24 VDC)

Electric actuator *1) Prepared by user *6) I/O cable Part No: LEC-CN5PLC *3) *4) Power supply 24 VDC Controller to CN5 *1) *6) *6) Controller setting kit *2) *5) Actuator cable Part No: LE-CP--S Part No: LEC-W2 LE-CP--B-S to CN3 to CN4 (Standard cable) LE-CPLE-CP--B to CN2 (Robotic type cable) Teaching box to CN1 (with 3m cable) Part No: LEC-T1-3G *3) Power supply plug (accessory) Controller

5 Port Solenoid Valve

Weight: 34 g Port plug 11.6 VVQ0-CP B port The plug is used to block the cylinder port when using a 5-port valve as a 3-port valve.

AC Servo Motor Driver (CC-Link Type ）

Relay connector Description Protective structure Connector: RM15WTPZ-4P(71) Cord clamp: RM15WTP-CP(5)(71) (Hirose Electric) Numeral changes depending on the cable OD. IP65 a) Relay connector for extension cable Connector: RM15WTJA-4S(71) Cord clamp: RM15WTP-CP(8)(71) (Hirose Electric) Numeral changes depending on the cable OD. b) Relay connector IP65 for motor power supply cable 4 31 4.

LEC-OM02704CN

(IP65) RM15WTPZ-4P(71) RM15WTP-CP(5)(71) (hirose) IP65 RM15WTJA-4S(71) RM15WTP-CP(8)(71) (hirose) IP65 4 34 4 4.11 4.11.1 (EMG) EMG ALMMBR ONRYn0 (EMG) (RYn0)OFF(ALM) (MBR) EMG RA DC24V 16 DC24V (DC24V)OFF ON(RYn0) 4.11.2 PC16()OFF OFF(Tb) 4 35 4 4.11.2 (1) ON(RYn0)ON/OFF ON(RYn0)OFFTb[ms] Tb 0 r/min (95ms) Tb ON OFF (95ms) MBR (1) ON (MBR) OFF (RYn0) ON ONRYn0 (RYn1) (RYn2

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Relay connector Description Protective structure Connector: RM15WTPZ-4P(71) Cord clamp: RM15WTP-CP(5)(71) (Hirose Electric) Numeral changes depending on the cable OD. IP65 a) Relay connector for extension cable Connector: RM15WTJA-4S(71) Cord clamp: RM15WTP-CP(8)(71) (Hirose Electric) Numeral changes depending on the cable OD. b) Relay connector for IP65 motor power supply cable 3 29 3.

AC Servo Motor Driver (CC-Link Type ）

Relay connector Description Protective structure Connector: RM15WTPZ-4P(71) Cord clamp: RM15WTP-CP(5)(71) (Hirose Electric) Numeral changes depending on the cable OD. IP65 a) Relay connector for extension cable Connector: RM15WTJA-4S(71) Cord clamp: RM15WTP-CP(8)(71) (Hirose Electric) Numeral changes depending on the cable OD. b) Relay connector IP65 for motor power supply cable 4 28 4.